SYJ300/500/700

+ M5 x 0.8 (X port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10

Vacuum Pad

3 7 2.5 3 7 2.5 3 12.5 12.5 12.5 1 1.2 1.2 1.8 1.8 1.8 16 13 10 11 14 17 ZP3-T10UM;-B5 [Weight: 5.7 g] ZP3-T13UM;-B5 [Weight: 5.8 g] ZP3-T16UM;-B5 [Weight: 5.9 g] Width across flat 10 Width across flat 10 Width across flat 10 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 1 5 1.2 5 14.5 14.5 14.5 7 7 7 1.8 1.8 1.8 1.2 16 13 10 17 11 14 7 With Adapter: Vacuum Inlet Series ZP3 Vertical 10 to 16 Pad diameter

Vacuum Pad

3 7 2.5 3 7 2.5 3 12.5 12.5 12.5 1 1.2 1.2 1.8 1.8 1.8 16 13 10 11 14 17 ZP3-T10UM;-B5 [Weight: 5.7 g] ZP3-T13UM;-B5 [Weight: 5.8 g] ZP3-T16UM;-B5 [Weight: 5.9 g] Width across flat 10 Width across flat 10 Width across flat 10 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 1 5 1.2 5 14.5 14.5 14.5 7 7 7 1.8 1.8 1.8 1.2 16 13 10 17 11 14 7 With Adapter: Vacuum Inlet Series ZP3 Vertical 10 to 16 Pad diameter

Vacuum Pad

3 7 2.5 3 7 2.5 3 12.5 12.5 12.5 1 1.2 1.2 1.8 1.8 1.8 16 13 10 11 14 17 ZP3-T10UM;-B5 [Weight: 5.7 g] ZP3-T13UM;-B5 [Weight: 5.8 g] ZP3-T16UM;-B5 [Weight: 5.9 g] Width across flat 10 Width across flat 10 Width across flat 10 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 1 5 1.2 5 14.5 14.5 14.5 7 7 7 1.8 1.8 1.8 1.2 16 13 10 17 11 14 7 With Adapter: Vacuum Inlet Series ZP3 Vertical 10 to 16 Pad diameter

Compact Cylinder with Lock Series CLQ

(mm) With auto switch B Without auto switch Stroke range (mm) A Bore size (mm) BP C OA Rc NPT G D E F G H I J K L M N O OB P Q RA RB T V Z B A 10 to 50 82 36 15.6 14 63 92 46 1/8 M5 x 0.8 15 20 77 10.5 38 M10 x 1.5 103 7 17 8 60 9 M8 x 1.25 1/4 53 16 4.2 1.6 16.5 19 depth 12 depth 10.5 75, 100 92 46 10 to 50 96.5 43.5 19.6 17.5 80 106.5 53.5 1/8 1/8 21 25 98 12.5 43 M16 x 2.0 132 6 22 10

VHK

66 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-02S-02S 1 4 1 4 1 4 17 VHK-03S-02S 22 46 85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHK-03S-03S 3 8 3 8 3 8 19 VHK-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101 79 81 22 VHK-B2A 49 17 1 30 25 21.5 31 VHK-04S-04S 1 2 1 2 3 port valve Reference dimensions after insertion

VHK

1 27 22 16.5 26 VHKm-02S-02S 1 4 1 4 1 4 17 VHKm-03S-02S 22 46 85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHKm-03S-03S 3 8 3 8 3 8 19 VHKm-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101 79 81 22 VHK-B2A 49 17 1 30 25 21.5 31 VHKm-04S-04S 1 2 1 2 3 port valve Reference dimensions after insertion of R(PT) threads

VHK

66 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-02S-02S 1 4 1 4 1 4 17 VHK-03S-02S 22 46 85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHK-03S-03S 3 8 3 8 3 8 19 VHK-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101 79 81 22 VHK-B2A 49 17 1 30 25 21.5 31 VHK-04S-04S 1 2 1 2 3 port valve Reference dimensions after insertion

Speed Controller with Indicator

-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8 AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 7.2 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03 5/32 8.2 19.8

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PL_ _ ]) . 5-46 6.

MXS Series Air Slide Table

M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5 MXS16 Mounted to table 16.5 M5 X 18 19 M5 X 18 12 5 21 14 37 11 MXS-AS16-X11 15 34.5 M10 X 1 MXS-AS16-X12 25 44.5 Q MXS-AS20 5 27.5 MXS20 M12 X 1.25 21 M6 X 20 24 M6 X 20 13 6 25 17 13 45.5 MXS-AS20-X11 15 37.5 I MXS-AS20-X12 25 47.5 J H MXS-AS25 5 32.5 MXS25 MXS-AS25-X11 15 42.5 25.5 M8 X 25 M8 X 25 17 6 31 19 26.5 M14 X 1.5

SX

SX5000 SX5000 17 17 08 8 stations This also includes the number of blanking plate assemblies. This also includes the number of blanking plate assemblies.

CG5-S

8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 32 to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125 40 to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 50 to 1200 109 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x

CLQ

(mm) With auto switch Without auto switch Bore size (mm) Stroke range (mm) A BP C D E F G H I J K L M N O OA OB P Q RA RB S T U V Z B A B 82 36 Rc 1/8 10 to 50 15.6 depth 12 14 depth 10.5 Rc 1/4 92 46 63 15 20 77 10.5 38 M10 x 1.5 103 7 17 8 60 9 M8 x 1.25 53 16 4.2 93 1.6 47.5 16.5 19 92 46 75, 100 96.5 43.5 10 to 50 19.6 depth 15.5 17.5 depth 13.5 Rc 3/8 Rc 1/8 106.5 53.5 80 21 25 98 12.5

Compact Cylinder with Lock Series CLQ

(mm) With auto switch Without auto switch Bore size (mm) Stroke range (mm) A BP C D E F G H I J K L M N O OA OB P Q RA RB S T U V Z B A B 82 36 Rc 1/8 10 to 50 15.6 depth 12 14 depth 10.5 Rc 1/4 92 46 63 15 20 77 10.5 38 M10 x 1.5 103 7 17 8 60 9 M8 x 1.25 53 16 4.2 93 1.6 47.5 16.5 19 92 46 75, 100 96.5 43.5 10 to 50 19.6 depth 15.5 17.5 depth 13.5 Rc 3/8 Rc 1/8 106.5 53.5 80 21 25 98 12.5

CQS

LS 34 38 48 52 2 2 3.2 3.2 17 19 24 26 2.8 2.8 4 4 13.5 24 4.5 4.5 6.6 6.6 29.5 44 48 62 66 8 8 9.2 17 35.3 40.3 22 10 13.5 25.5 33.5 17 35.3 40.3 22 10 5, 10 14.5 28.5 42 19.5 41.2 51.2 29.5 17.5 10.7 15 32.5 46 22.5 44.7 54.7 32.5 17.5 LS + Stroke A + Stroke Foot bracket material: Carbon steel CUJ Rod end male thread CU CQS Rod end nut CQM Rod Side Flange Style Rod side flange style:

CLQ

x 0.8 Cap bolt 5 Hole: 10 H10 Shaft d9 52.7 A + Stroke CL+ Stroke 20 14 10 7 32 B + Stroke 0.1 0.3 18 +0.4 +0.2 36 Double Clevis Style Stroke range Without auto switch With auto switch Bore size (mm) A B CL A B 82 92 CL 102 23 33 92 102 10 to 50 75, 100 33 92 32 Rod end nut 28.5 9-10-17 17 Series CLQ Dimensions: 40 Both ends tapped style: CLQA40 16 3.2 16 3.2 2 x 4-M5 x 0.8 Basic style (

Rotary Table/Rack & Pinion Style Series MSQ

17 17 1 1 1 1 4 4 4 in seal kit 17 17 17 17 18 18 18 4 4 4 4 4 4 4 18 18 18 18 27 27 27 4 4 4 4 2 2 2 27 27 27 27 29 29 29 2 2 2 2 4 4 4 A grease pack (10 g) is included.

CXS

L M N NN P Q QQ R X Y U Model 2-3.4 through 2-6.5 counterbore with depth 3.3 4-M3 x 0.5 with depth 4.5 2-M4 x 0.7 with depth 7 2-M3 x 0.5 with depth 5 M3 x 0.5 x 10 46 17 44 15 7.5 2-M4 x 0.7 35 20 4 8 20 6 33.6 8.5 7 30 M5 x 0.8 x 5 CXS10 2-4.3 through 2-8 counterbore with depth 4.4 4-M4 x 0.7 with depth 5 M5 x 0.8 x 10 2-M4 x 0.7 with depth 6 2-M5 x 0.8 with depth 8 38.5 58 20 56 18 9

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

24.4 24.9 23.5 21.4 25.3 25.8 23.7 24.6 30.7 29.1 36.1 30.9 32 32.2 8 M5 x 0.8 21.5 10 4 M A L 17 4 4 4 10 14 18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5 x 0.8 (R) 6 18.5 10 10 12 14 18.5 19 25.5 23.5 30.5 25.5 26.5 25 7 14 14 13 24 23 23 46 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 (R) Applicable tubing 8 20.5 26 18 14 10 23 41 29 17 M L A 19 22 H 12 24 58 46 Connection threads Reference