Series VQ Metal Seal/Rubber Seal Body Ported

Two quantities of terminals can be selected in accordance with the number of stations. (8 terminals/16 terminals) Max. 16 stations Porting specifications Applicable stations Series Port size P, R Port location A, B C6 C3, C4, M5 VQ0 VQ1000 VQ2000 Side Max.16 C3, C4, C6, M5 C4, C6, C8 C6 Side Max.16 C8 Side Max.16 Electrical Wiring Specifications Terminal No. Terminal No.

Air Slide Table Series MXS

M8 x 25 0.9 2.1 4.4 7.0 18.0 0.9 2.1 4.4 4.4 7.0 0.9 2.1 4.4 7.0 18.0 M3 x 16 M4 x 15 M5 x 18 M6 x 25 M8 x 25 M3 x 12 M4 x 8 M5 x 10 M5 x 12 M6 x 16 M3 x 16 M4 x 15 M5 x 18 M6 x 25 M8 x 25 D-X Individual -X 85 Series MXS Specific Product Precautions 4 Be sure to read before handling.

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 <M5 type> <M5 type> 8 8 10 10 12 12 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

0.4

Works SUNX Co., Ltd.: S-LINK (8 output points) DeviceNet OMRON Corp.: CompoBus/S (16 output points) OMRON Corp.: CompoBus/S (8 output points) CC-LINK S kit 1 to 8 stations 16 stations 16 1 to 4 stations 8 8 stations D side 1 to 8 stations 16 16 stations Serial transmission kit EX140 integrated-type (for output) serial transmission system (3) 1 to 4 stations 1 to 8 stations 8 16 8 stations

CXS

depth 12 4-M5 x 0.8 with depth 4.5 4-Rc 1/8 with depth 6.5 4-Rc 1/8 with depth 6.5 8-M4 x 0.7 with depth 5.5 8-M5 x 0.8 with depth 7.5 8-M5 x 0.8 with depth 7.5 M6 x 1.0 7.75 12.5 45 9.5 6.5 8 M6 x 1.0 x 12 M8 x 1.25 x 6 CXS20 M6 x 1.0 8.5 15 46 13 9 9 M6 x 1.0 x 14 M8 x 1.25 x 6 CXS25 M8 x 1.25 9 19 56 20 11.5 10 M8 x 1.25 x 16 M10 x 1.5 x 8 CXS32 Strokes Symbol SS Z ZZ Stroke 10, 15, 20

Combination Cylinder

20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 15 17 17 21 21 16 16 11 11 11 11 11 16 16 8 11 11 13 16 15.0 18.0 25.0 31.5 35.5 32.0 36.0 40.0 18.5 18.5 18.5 W/o rod boot W/ rod boot Bore (mm) 40 50 63 80 100 125 140 160 J K KA L MM N P RR S U W H 51 58 58 71 72 110 110 120 Z 234 261 280 327 356 ZZ 244 273

Free Mount Cylinder for Vacuum Series ZCUK

Symbol 2 to 8 10 to 16 20 to 32 40, 50 02 04 06 08 10 13 16 20 25 32 40 50 Suffix 2 4 6 8 10 13 16 20 25 32 40 50 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 B4 M4 x 0.7 Female thread Applicable cylinder model Symbol M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Nil ZC(D)UK 16 to 32 M10 x 1.25 B10 Material Note) -X11 pad: 2 to 8 diameter and flat style

MU

18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.058

MU

16 LX RR 8 10 10 16 16 LD LU 11 14 15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +

SYJ300/500/700

+ M5 x 0.8 (X port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PL_ _ ]) . 5-46 6.

CQS

37.5 12 16 20 25 6 8 7 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5.2 6.2 8.2 10.2 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 12.5 12.5 14 16 7 7 10 10 4 4 7 7 0.5 0.5 1 1 5 to 30 5 to 30 5 to 50 5 to 50 Note) For basic style 12 and 16 with 5 stroke, through-hole is threaded over the entire length.

CL

59 67 73 77 85 112.5 121 133 10 12 16 20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 15 17 17 21 21 16 16 11 11 11 11 11 16 16 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 15.0 18.0 25.0 31.5 35.5 32.0 36.0 40.0 18.5 18.5 18.5 W/o rod boot W/ rod boot Bore (mm) 40 50 63 80

Speed Controller with Indicator

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSGl-M5 M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSGl-U10/32 10-32UNF VNote 4) V V V V V V AS2ll1FSGl-l01 1/8 V V V V V V V V V AS2ll1FSGl-l02 1/4 VNote 4) V V V VNote 4) VNote 4) V V V V R NPT Note 1) Sealant AS3ll1FSGl-l02 1/4 V V

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 5H9 Brake electrical circuit [Yellow] Brown +24V 38 46 76 0V White [Yellow] Note) A contact protection circuit is required when connecting a brake. 2-M2.5 thread depth 4 16 3 10 J 8 27 25 J x K Motor wire (300mm) Stroke + 246 Photo micro sensor wire (300mm) Brake wire (300mm) 13 15 Stroke + 127 (5) 0.5 46.5 3.5 2-M6 thread depth 13 75.5 59 52 27 [18] 15 Stroke + 127

KP/KPQ/KPG

25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 4 18 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24 19 22 M L A 12 46 58 25 H Reference dimension for R threads after