Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

4 to 12 stations.

Modular F.R.L. Unit

E Port size Octagon C T-interface B Center of F.R.L. body A D Model Port size A B C D E Applicable model Y110-M5 M5 x 0.8 11 19 12 14 8 AC10, AC10B Y210-01 1/8 15 42 32 28 19 AC20, AC20B AC20C Y210-02 1/4 AC25, AC25B AC25C, AC30 AC30B, AC30C Y310-02 1/4 Y310-01 1/8 15 53 39 30 19 Y410-02 1/4 19 62 44 36 24 AC40, AC40B AC40C Y410-03 3/8 Caution in Mounting Y510-02 1/4 19 66 46 44 24 AC40-06

KR

(mm) <M5> Note) L P D Nylon Urethane 2-applicable tubing KGU04-01 KGU04-M5 4 11 20 12 11 21 34 M5 x 0.8 10.4 36 38 40 39.5 42 46 42.5 45.5 49 51 52.5 55.5 56.5 2.2 2.2 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 58.5 59 60.5 M5 x 0.8 13 1 8 1 4 3 8 1 8 17 12.8 12.8 6 13.4 10.6 14 17 25.6 17.7 15 23 35

Table of Contents

Specifications Model PSE530-M5 PSE531-M5 101 to 101 kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1 MPa 0 to 101 kPa 0 to 101 kPa Proof pressure 1.5 MPa 500kPa Air/Non-corrosive gas Fluid 12 to 24 VDC (Ripple 10% or less) Power supply voltage Current consumption 15 mA or less Output specification Analog output (1 to 5 V, Output impedance: Approx. 1 k) Accuracy 2% F .S. or less (Within

Modular F.R.L. Unit

Note 2) For M5 and NPT thread type.

CLQ

43.5 9 46 80 63 64 60 57.5 58.5 64.5 61 52 15 49 12 51.5 14.5 100 80 70 67.5 68.5 74.5 71 74 18.5 58 15.5 60.5 18 61 100 68.5 21.5 24 71.5 24.5 71 9-10-27 27 Series CLQ Operating Range Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-A7/F7H D-A73C D-A80/A80H D-A80C 12 11 10 12 12 13 D-A79W D-A9/A9V 13 10 9.5 14 9.5 14 9.5 16 11.5 15 9 17 10 11.5 D-F7/F7V D-J79/J79C D-F7W/F7WV

Rotary Table/Rack & Pinion Style Series MSQ

WB 15 20.5 23 26.5 WA 59 65 68 77 UU 17.7 25 25 31.4 SU 45 60 65 75 SF 13 12 14 15 SE 9 10 11.5 14.5 SD 92 117 127 152 Q S 34 37 40 46 JJ M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 YA YB YC JU M8 x 1 M10 x 1 M10 x 1 M14 x 1.5 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 WF 8 10 10 12 Size XA XB XC 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 10 20 30 50 19 24 28 33 3H9 4H9 4H9 5H9 3.5 4.5 4.5 5.5

Air Slide Table Series MXS

M5 x 18 M6 x 20 M8 x 25 0.5 0.9 2.1 4.4 7.0 18.0 0.5 0.9 2.1 4.4 4.4 7.0 M2.5 x 10 M3 x 12 M4 x 15 M5 x 18 M6 x 20 M8 x 25 M2.5 x 8 M3 x 10 M4 x 8 M5 x 10 M5 x 12 M6 x 16 Shock Absorber Caution 1.

CLQ

(unlocks when pressurized) Rod end male threads H1 Rod end nut H2 X C1 L1 (mm) Stroke range Without auto switch With auto switch Bore size (mm) A G E H I K L M Q S U VH VV W D C A B B 61 68.5 19.5 22.5 51 58.5 10 12 7 12 29.5 32.5 36 40 27 31 M5 x 0.8 M6 x 1.0 47 52 8 10 4.5 5 25.5 28 36 42 39.2 43.2 21.2 23.2 9.5 10 6.5 7 19 21.5 5 to 50 5 to 50 20 25 For retraction locking For rod end

Compact Cylinder with Lock Series CLQ

(unlocks when pressurized) Rod end male threads H1 Rod end nut H2 X C1 L1 (mm) Stroke range Without auto switch With auto switch Bore size (mm) A G E H I K L M Q S U VH VV W D C A B B 61 68.5 19.5 22.5 51 58.5 10 12 7 12 29.5 32.5 36 40 27 31 M5 x 0.8 M6 x 1.0 47 52 8 10 4.5 5 25.5 28 36 42 39.2 43.2 21.2 23.2 9.5 10 6.5 7 19 21.5 5 to 50 5 to 50 20 25 For retraction locking For rod end

MU

(mm) P M5 X 0.8 Rc(PT) Rc(PT) Rc(PT) Rc(PT) NY 26 28 36 42 46 MM M6 X 1 Depth 12 NX 6 6.5 8 10 11 H 14 14 15 18 21 ZZ 96 103 115 137 141 The position of the four flats of the piston rod is 3 in relation to the cylinder side surface.

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

CXS

with depth 12 2-M5 x 0.8 with depth 7.5 0.2 60 12 S SS ZZ Z Part no.

CG5-S

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 1/8 83 118 25 to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 32 to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125 40 to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93

Modular Design with Uniform Body Style

g*12 g*12 g*12 g*12 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

SYJ300/500/700

+ M5 x 0.8 (X port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

0.4

stations C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) 1 to 12 stations P kit: Flat ribbon cable 26P C8 (For 8) Side 20 420 1 to 9 stations 20P SS5Q13-SQ130 SQ131 J kit: Flat ribbon cable PC wiring system compatible 1 to 8 stations Option Built-in silencer, direct exhaust 20 420 F L3 (For 3.2) L4 (For 4) L6 (For 6) L5 (M5 thread) 1 to 12 stations L kit: Lead wire 35 460 kit Top (2) S