CLQ

to 50 80 116.5 53.5 11 11 99 116 134 43 20 53.5 77 53.5 116.5 75, 100 53 125 10 to 50 100 135 63 11 11 117 136 154 50 22 53.5 94 L1 Rod end nut 63 135 75, 100 Rear flange type: CLQG/CDLQG FV M Rear flange type (mm) 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range FD FT FV FX FZ G L L1 M A A B B 36 91 10 to 50 63 101 46 9 9 80 92 108

Compact Cylinder with Lock Series CLQ

to 50 80 116.5 53.5 11 11 99 116 134 43 20 53.5 77 53.5 116.5 75, 100 53 125 10 to 50 100 135 63 11 11 117 136 154 50 22 53.5 94 L1 Rod end nut 63 135 75, 100 Rear flange type: CLQG/CDLQG FV M Rear flange type (mm) 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range FD FT FV FX FZ G L L1 M A A B B 36 91 10 to 50 63 101 46 9 9 80 92 108

CLQ

Flange Style CLS A + Stroke L FT B + Stroke G 4-FD FZ FX Without auto switch With auto switch Bore size (mm) Stroke range FD FT FV FX FZ G L L1 M CLQ A A B B 92 36 10 to 50 63 9 9 80 92 108 38 18 43.5 60 46 102 102 46 75, 100 MLGP 106.5 43.5 10 to 50 80 11 11 99 116 134 43 20 53.5 77 53.5 116.5 116.5 53.5 75, 100 RLQ 125 53 10 to 50 100 11 11 117 136 154 50 22 53.5 94 63 135 L1 Rod end nut

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

11 33 11.

CL

4 7 7 8 4 7 7 8 26 31 38 47 12 14 18 8 M5 X 0.8 depth7.5 10 12 16 M5 X 0.8 depth8 25 10 14 M6 X 1 depth12 Without rod boot With rod boot Bore (mm) H1 NA P PG PH PL PW S TA TB TC H ZZ e f h l ZZ Stroke range 20 25 32 40 24 29 35.5 44 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 M5 X 0.8 M6 X 0.75 M8 X 1 M10 X 1.25 5 6 6 8 11 11 10 10 to 200 to 300 to 300 to 300 11 11 11 12 141 151 154 169 35 40

LX

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. LJ1 LG1 LC1 LX LC6D/LC6C Switches 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions.

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Rotary Table/Rack & Pinion Style Series MSQ

Basic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

MU

x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17

MU

x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17

Air Slide Table Series MXS

x 0.8 P M MXS-AS6 (L)-X11 15 26.5 C A 5 16.5 MXS-AS8 (L) MXS8 (L) 7 21.5 8 3 14.6 7 10 M3 x 10 11 M3 x 12 15 26.5 MXS-AS8 (L)-X11 M6 x 1 MXS-AS8 (L)-X12 25 5 36.5 B 20 MXS-AS12 (L) E MXS12 (L) 9.5 12 4 18.5 10 13 M4 x 12 16 M4 x 15 31 M8 x 1 15 30 MXS-AS12 (L)-X11 MXS-AS12 (L)-X12 25 40 D F MXS-AS16 (L) 5 24.5 MXS16 (L) 11 14 5 12 16.5 M5 x 18 19 M5 x 18 37 21 MXS-AS16 (L)-X11 15 34.5 M10

KP/KPQ/KPG

19 22 M L A 12 46 58 25 H Reference dimension for R threads after installation Connection threads Note 1) Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm2 D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection thread R Weight g M L2 D2 L1 M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

MXS

MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 11 13 18.5 24 29 34 1.2 1.2 2.8 5.7 5.7 10 M3 X 0.5 M3 X 0.5 M4 X 0.7 M5 X 0.8 M5 X 0.8 M6 X 1 MXQ MXF This will cause problems and possible failure. MXW 3.

ZP

H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 12 12 15 5 6 1.7 21 29.9 46 3 ZPR13UT 13 14 ZPR13 13 1.8 1.5 ZPR16UT 16 17 ZPR16 16 18 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5

CXS

x 0.8 2-6.9 through 2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 7.5 80 30 78 28 14 60 35 6 12 12 30 12 M6 x 1.0 x 18.5 64 CXS25 2-M6 x 1.0 2-6.9 through 2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 8 98 38 96 36 18 75 44 8 16 14 30 16 M8 x 1.25 x 23 76 2-M6 x 1.0 CXS32 PP Q QQ R T TT U W X Y Model UU V 2-M6 x 1.0 with depth 10 2-M8 x 1.25 with depth 12 2-M8 x 1.25 with