CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

Table of Contents

Max. 8 stations Individual Individual 8 Bottom 08 8 stations Option 3-5-17 18 Series VFR2000 Plug-in Type: With D-sub Connector (For wiring specifications, refer to page 3-5-8.)

High Purity Chemical Valve

30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5 115.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PFA 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 484

Table of Contents

46 12 15 15 7 9 9 6.5 8.5 8.5 57 (65) 66 (74) 71 (79) 19.5 22.5 25 40 43 46 46 50 53 73.5 82 87 The figures in parentheses are the normally open type. 24 25 Series VX Safety Instructions The following safety instructions are intended to prevent a hazardous situation and/or equipment damage.

SX

SX5000 SX5000 17 17 08 8 stations This also includes the number of blanking plate assemblies. This also includes the number of blanking plate assemblies.

Series VQ Metal Seal/Rubber Seal Body Ported

(S=10mm2) Cylinder stroke 300mm Series CM2 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller: AS3000F-08 (S=10mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-08 (S=10mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 8 14.6 (0.81) VQ2000 (Metal seal) 8 16.2

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Speed Controller with One-touch Fitting

(42) AS331F-02-08(S)A 8 13.2 37.1 23.5 59.9 14.2 43 (43) AS331F-02-10(S)A 10 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS331F-02-12(S)A 12 18.5 42.5 28.3 64.7 17 48 (48) AS331F-03-06(S)A 6 11.2 12.9 16.6 20.2 36 21.4 57.8 AK 1/4 19 50 48.4 44.5 42.9 VCHC 13.3 34 (35) AS331F-03-08(S)A 8 13.2 37.1 23.5 52.2 14.2 35 (36) AS331F-03-10(S)A 10 15.9 17.4 23 41.2 26.1 54.8 15.6 38 (39) AS331F-03-

SQ1000/2000

(-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal number SOL.

2/3 Port Valve

(56) 54 (64) Y 74 (81) 81 (91) 88 (98) U 47 48 51 W 84 (91) 90 (100) 98 (108) Q 23 25.5 28 VVX21l VVX22l VVX23l The figures in parentheses are a closed style at energizing ( ): Individual pressure 20.5 (17.5) 26.5 (22.5) 26.5 (22.5) 56 (67) 64 (81) 72 (87) 38 49 49 11 13 13 25 30 30 32 40 40 36 46 46 12 15 15 7 9 9 6.5 8.5 8.5 10.5 13 13 4.1-16 Pilot 2 Port Solenoid Valve Series VXD21/22

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 8 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 8 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 8 Stations, A B Port Size: C4 (ø4 One-touch Fitting), P R Port Thread: T (NPTF)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 8 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: NPTF

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Vacuum

08 Tube a a E E 5 List O Pad Dia.

Vacuum

08 Tube a a E E 5 List O Pad Dia.