LVQ

1/46 1/46 LVD (Max.

Metal Seal/Rubber Seal Series VQ Body Ported

Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

( ) 02 ( ) 03 ( ) 04 ( ) Port no.

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

VM

R-12F-12F 22 12 12 46 63 31.5 31.5 21.5 4 67 14 21.8 21.8 17.5 3.2 Applicable tubing O.

/

(mm) Port size Av x 10-6m2 Cv converted 10 10 15 10 15 20 25 35 40 50 1/4 (8A) 1.9 2.4 4.5 2.4 5.5 9.5 13 23 31 49 46 58 110 58 130 230 310 550 740 1200 VXED2130-02 VXED2130-03 VXED2140-03 VXED2130-04 VXED2140-04 VXED2150-06 VXED2260-10 VXED2270-32 VXED2380-40 VXED2390-50 420 0.5 3/8 (10A) 670 500 670 1150 1650 5400 6800 8400 1.0 0.5 Thread (Nominal size) 0.02 1/2 (15A) 1.5 3/4 (20A) 1 (25A

Smooth Cylinder/Low Speed Cylinder

Applicable bore size (mm) d H B C D 125 140 160 Y-12A Y-14A Y-16A 8 46 100 M30 x 1.5 27 42 +0.084 0 +0.3 +0.1 0.1 0.3 25 32 64 NT-12 NT-16 125, 140 160 M30 x 1.5 18 46 53.1 44 8 48 105 M30 x 1.5 30 47 +0.084 0 +0.3 +0.1 0.1 0.3 28 36 72 M36 x 1.5 21 55 63.5 53 8 55 110 M36 x 1.5 34 46 +0.1 0 +0.3 +0.1 0.1 0.3 32 40 80 Use a single knuckle joint or a double knuckle joint individually.

Basic type / Direct mount type Series CY3B/CY3R

-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-08-X214 10-AS2001F-04-X214 10-AS1001F-04-X214 In-line type (throttle valve) 10-AS2001F-06-X214 10-AS1001F-06-X214 10-ASD330F-01-06 10-ASD230F-M5-04 Dual type (speed controller) CY3B CY3R 10-ASD330F-01-08 10-ASD230F-M5-06 AS2201FPQ

AC Servo Motor Driver (Pulse input type/Positioning type ）

DOCOM 46 DOCOM 46 OPC 12 20 47 OPC 12 20 47 24 V DC 24 V DC DICOM DICOM DOCOM DOCOM PP 10 PP 10 PP2 37 PP2 37 PG 11 PG 11 NP 35 NP 35 NP2 38 NP2 38 NG 36 NG 36 For sink input interface For source input interface 3. This diagram shows sink I/O interface. For source I/O interface, refer to section 3.9.3. 4. CN2L can not be used. Connect the encoder cable to CN2. 5.

HRX-OM-W032

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Combination Cylinder

(mm) 40 50 63 80 100 NT-04 NT-05 NT-08 NT-10 40 50/63 80 100 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 40/50/63 80 100 10 12 16 18 20 25 46 55.5 71 76.5 83 88 38 47.5 61 66.5 73 78 4 4 5 5 5 5 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 22 27 32 41 25.4 31.2 37.0 47.3 21 26 31 39 8 11 13 16 MIGAKIMARU10 MIGAKIMARU12 MIGAKIMARU16 MIGAKIMARU18 MIGAKIMARU20 MIGAKIMARU24

•

'-02 ~2 06 6 (Application: Refer to ListO) i 08 ~8 U Flat type Material a With buffer 04 4 Pad type.

Speed Controller with Indicator

, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Vacuum

(Check leakag) 100 lloninntal lype Uacuum tntny: Without BufleU Wilh Ban[eil ]itting Specif ications l',.1.t':.,.l,',,,l,. : : : t : . : : . : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x

Vacuum

(Check leakag) 100 lloninntal lype Uacuum tntny: Without BufleU Wilh Ban[eil ]itting Specif ications l',.1.t':.,.l,',,,l,. : : : t : . : : . : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x

CG5-S

8 -04 R 1/2 -04 R 1/2 Straight Union KGH KGLU12-02 R 1/4 12 -03 R 3/8 -04 R 1/2 Applicable tubing O.D.

CL

(mm) l 40/50/63 80 100 40 50 63 80 100 NT-04 NT-05 NT-08 NT-10 40 50/63 80 100 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 10 12 16 18 20 25 46 55.5 71 76.5 83 88 21 26 31 39 38 47.5 61 66.5 73 78 25.4 31.2 37.0 47.3 22 27 32 41 4 4 5 5 5 5 8 11 13 16 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 MIGAKIMARU10 MIGAKIMARU12 MIGAKIMARU16 MIGAKIMARU18 MIGAKIMARU20 MIGAKIMARU24