VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

Basic type / Direct mount type Series CY3B/CY3R

21 23.5 29 36 45 51 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 HR 17 24 30 36 41 51 62 80 90

KP/KPQ/KPG

-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 4 18 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24

KP/KPQ/KPG

tubing 10 18.5 29 41 24 29.4 M L1 17 17 12 20.9 46 58 25 31.4 22 D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

JIS Standard Hydraulic Cylinder

Related Products 32 40 50 63 80 100 40 50 63 80 100 YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 +0.07 0 +0.07 0 +0.084 0 +0.1 0 +0.1 0 +0.1 0 +0.07 0 +0.084 0 +0.1 0 +0.1 0 +0.1 0 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M16 x 1.5 L1 DM5 x 0.8 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M20 x 1.5 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 20 16 20 M24

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

0.4

(12) (7.5) C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 one-touch fitting P = 10.5 18.1 31.5 2 L n Dimensions Formula L1 = 10.5n + 45.5, L2 = 10.5n + 105 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 66.5 77 87.5 98 108.5 119 129.5

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24 19 22 M L A 46 58 25 12 H Connection threads Reference dimension for

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

30.9 28.2 15.2 17 18.4 34 25.2 6 12.8 41 42.1 25 40.8 7 18.5 1.5 34.7 R1/4 17 40.2 AS231F-02-08ST AS231F-N02-03ST 16 5/32" 10.4 35.2 18.5 18.3 28.2 8 15.2 12.9 44 45.1 40 39.6 30.6 21.9 10.9 16.2 AS231F-02-10ST AS231F-N02-05ST 3/16" 11.4 38.7 16.5 21 20.2 31 10 18.5 48 47.9 41 41.6 31.1 23.9 AS331F-02-06ST AS231F-N02-07ST 1.5 34.7 7 NPT1/4 17.5 19 1/4" 13.2 17 38.5 17 25.2 6 12.8 73 46.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

24 23.5 29 36 HR 30 36 41 51 62 HS 8.5 7.5 6.5 7 8 K 14 11 15 13 15 B 8 9.5 9.5 11 11 HT 17 24 23.5 29 36 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 C 4.2 5.2 5.2 6.5 6.5 HB 17 21 23.5 29 36 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 Model

Table of Contents

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

0.96 1.0 1.0 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

series Bore size (mm) 2-P keeper plate mounting threads Part no. l J P A B C D d H K L E + 0.07 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 32 40 50 63 80 100 40 50 63 80 100 YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 76 60 41

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

VQ5000

2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position

Vacuum Pad

3 7 2.5 3 7 2.5 3 12.5 12.5 12.5 1 1.2 1.2 1.8 1.8 1.8 16 13 10 11 14 17 ZP3-T10UM;-B5 [Weight: 5.7 g] ZP3-T13UM;-B5 [Weight: 5.8 g] ZP3-T16UM;-B5 [Weight: 5.9 g] Width across flat 10 Width across flat 10 Width across flat 10 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 1 5 1.2 5 14.5 14.5 14.5 7 7 7 1.8 1.8 1.8 1.2 16 13 10 17 11 14 7 With Adapter: Vacuum Inlet Series ZP3 Vertical 10 to 16 Pad diameter

Vacuum Pad

3 7 2.5 3 7 2.5 3 12.5 12.5 12.5 1 1.2 1.2 1.8 1.8 1.8 16 13 10 11 14 17 ZP3-T10UM;-B5 [Weight: 5.7 g] ZP3-T13UM;-B5 [Weight: 5.8 g] ZP3-T16UM;-B5 [Weight: 5.9 g] Width across flat 10 Width across flat 10 Width across flat 10 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 1 5 1.2 5 14.5 14.5 14.5 7 7 7 1.8 1.8 1.8 1.2 16 13 10 17 11 14 7 With Adapter: Vacuum Inlet Series ZP3 Vertical 10 to 16 Pad diameter

Vacuum Pad

3 7 2.5 3 7 2.5 3 12.5 12.5 12.5 1 1.2 1.2 1.8 1.8 1.8 16 13 10 11 14 17 ZP3-T10UM;-B5 [Weight: 5.7 g] ZP3-T13UM;-B5 [Weight: 5.8 g] ZP3-T16UM;-B5 [Weight: 5.9 g] Width across flat 10 Width across flat 10 Width across flat 10 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 1 5 1.2 5 14.5 14.5 14.5 7 7 7 1.8 1.8 1.8 1.2 16 13 10 17 11 14 7 With Adapter: Vacuum Inlet Series ZP3 Vertical 10 to 16 Pad diameter