Sine Cylinder Series REC

0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8

ZP

Size 10, 13, 16 Size 40, 50 Flat Flat Deep: ZPY40D only Deep: ZPY10D/16D only Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 M5 x 0.8 (Miniature tube fitting Series M5) Hexagon width across

Mechanically Jointed Rodless Cylinder Series MY1

needle M5 x 0.8 (Port) 2 x M5 x 0.8 G G 2 x M5 x 0.8 (Hexagon socket head plug) MY3A MY3B (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A MY3M Z + Stroke M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) 2 x 2 x J depth K XX (WW) XX (WW) M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) MY1BG MY1BG VV VV 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) (Hexagon

Rotary Actuator/Vane Type

14 0 0.043 1.5 1.5 8 7 10 0.5 25.5 14 13 21 M4 x 0.7 M4 x 0.7 4.5 4.5 M5 x 0.8 30 16 4 56 64.5 22 44 36 26 59 30 50 47.5 13 22 80.005 0.020 16 0 0.043 2 2 9 8 12 1.0 33.5 15.5 14 25 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 42 21.5 4.5 71.5 82.5 24 52 42 29 69 40 63 53 15 30 100.005 0.020 25 0 0.052 3 4.5 10 9 20 1.0 39 21 20 31.6 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 47.8 25 5 87.5 98 30 64 52 38

High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

A

B240 AL2000 B340 AL3000 B440 AL4000 B640 AL5000/6000 Model A B C D F G H J K L M P NAL1000 25 81.5 25.5 25 27 NAL2000 40 122 38 40 30 27 22 5.4 8.4 40 2.3 40 NAL3000 53 142 38 53 41 40 23 6.5 8 53 2.3 56 NAL4000 70 177 41 70 50 54 26 8.5 10.5 70 2.3 73 NAL5000 90 254 45 90 70 66 35 11 13 90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !

ZP

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 3 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

Series KG Stainless Steel One-touch Fittings

KGY04-M5 KGY04-01 16 M5 0.8 13.5 22 25.5 36 13 15 3.5 4.6 4.6 7 9.5 1 8 4 6.4 6.4 16 13 M5 0.8 14 10 10 18 10.4 1 4 KGY04-02 26 38 19 4.3 13 KGY06-M5 KGY06-01 14.5 17.5 23 14 39 29 4.6 4.6 17.5 7 11.5 1 8 10 6 10 20 12.8 1 4 KGY06-02 27 41 17 17 14 13.4 13.4 21 3 8 KGY06-03 29 42.5 35 1 8 1 4 KGY08-01 KGY08-02 24.5 28.5 43.5 45.5 12 17 13.4 13.4 15 23 15.2 12 23 8 14 18.5 17.7 25.6 3

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

(mm) BF VA 4H9 4H9 5H9 6H9 6H9 ZD 6 10 12 16 20 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZH M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 ZG 15 16 18 22 26 ZF 20 21 28 32 41 BG ZE 5 8 10 14 17 CC 9.5 13.5 17.5 20 25 VB 4 4 5 6 6 AJ 9 9 11 13 13 UE 5.5 5.5 6.6 8.6 8.6 AH 9 12 15 18 20 UD 10 10 12 16 16 AG 26 27 33 35 45 FX 22 26 32 40 50 AF 35 36 44 48 58 BE 30 38 48 58 68 ZJ 3.5 4.5

Stainless Steel One-touch Fittings Series KG

KGY04-M5 KGY04-01 16 M5 0.8 13.5 22 25.5 36 13 15 3.5 4.6 4.6 7 9.5 1 8 4 6.4 6.4 16 13 M5 0.8 14 10 10 18 10.4 1 4 KGY04-02 26 38 19 4.3 13 KGY06-M5 KGY06-01 14.5 17.5 23 14 39 29 17.5 4.6 4.6 7 11.5 1 8 10 6 10 20 12.8 1 4 KGY06-02 27 41 17 17 14 13.4 13.4 21 3 8 KGY06-03 29 42.5 35 1 8 1 4 KGY08-01 KGY08-02 24.5 28.5 43.5 45.5 12 17 13.4 13.4 15 23 15.2 12 23 8 14 18.5 17.7 25.6 3

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

KG

(mm) Connection thread R <M5> (1) A Weight (g) 2-applicable tubing L1 M D1 D2 L2 L3 Model Nylon Urethane MS KGY04-M5 KGY04-01 16 25.5 36 13 13.5 22 15 M5 x 0.8 3.5 4.6 4.6 9.5 7 1 8 4 13 M5 x 0.8 14 10 10 18 10.4 6.4 4.4 16 T 1 4 KGY04-02 26 38 19 4.3 12 KGY06-M5 KGY06-01 29 14 39 14.5 17.5 23 17.5 4.6 4.6 7 11.5 VMG 1 8 10 6 10 20 12.8 1 4 KGY06-02 27 41 17 17 14 13.4 10.6 20 3 8 KGY06

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Floating Joint

(mm) d: Nominal thread size Model M22 x 1.5 M26 x 1.5 H 13 16 32 41 B C 37 47.3 Order no.

MGP

15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5

VQZ1000/2000/3000

mm2 < >: AC 61.5 54 0 1 M plug connector (M): VQZ212 (R)-M-C4/C6/M5 36 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 73.5 92 103.5 62 Indicator light 37.5 <42.5> < >: AC 2-7-12 13 13 Body Ported Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ2000 2 position double Grommet (G): VQZ2220 1(R)-G-C4/C6/M5 300 (Lead wire length) 109.2 54.5 17.3 6 6 R2.5 VQC 3.4 B

Table of Contents

10.5 9.5 10.5 10 11 13 13 14 0.004 0.012 0 0.036 4 9 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 6 14 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 8 16 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5

Air Cylinder

20.5 32.5 44.5 16 6.5 12.5 21 33 45 51 75 93 105 6 5.5 12 12 21 25 39 D-M9lV 10 6 13 13 20.5 32.5 44.5 16 6.5 12.5 12.5 21 33 45 51 75 93 105 6 1.5 8 17 21 35 Band mounting D-A9l 10 2 9 16.5 28.5 40.5 16 2.5 8.5 17 29 41 47 71 89 101 6 1.5 8 8 17 21 35 D-A9lV 10 2 9 9 16.5 28.5 40.5 16 2.5 8.5 8.5 17 29 41 47 71 89 101 6 1 7.5 16.5 20.5 34.5 D-H7l/H7C D-H7lW/H7BA D-H7NF 10 1.5 8.5

CG5-S

M10 x 1.25 M5 x 0.8 83 32 35.5 to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 1/8 85 40 44 to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 1/8 93 50 55 to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 1/4 109 63 69 to 1200 35 32 27 17 M10 x 1.5 19