Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 18 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

VK3000

5 Port Solenoid Valve Direct Operated Poppet Type VK3000 Series Rubber Seal [Option] Specifications C: 0.54 dm3/(sbar) (Passage {4/2 5/3 (A/B R1/R2)}) Compact: Width 18 x Length 68 (mm) Low power consumption 4 W DC (Standard type) 2 W DC (Low wattage type) Suitable for copper-free applications All the parts in contact with fluid are non-copper materials Type of actuation Direct operated

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting

LEC-OM02904

C4 TM MR Configurator2 2. 7.7 5 19 5 5.3 (No.PC) * * ** 5.3.1 No.

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 4-13-10

ZB-OM00301

4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

Information

points/32 points)/(Remote register 4 words/4 words) 2 stations occupied (Remote I/O 64 points/64 points)/(Remote register 8 words/8 words) Up to 42 (when 1 station is occupied by 1 driver), Up to 32 (when 2 stations are occupied by 1 driver), when there are only remote device stations.

VKF300

: D Manual override (non-locking) Applicable cord O.D. 4 to 6.5 4Rc(PT) 1/8 (ports P, R) 83 71.5 Max .10 2-4.5 (mounting holes) 75.5 Light (DZ type only) 67.5 20.5 59 P R P R 4Rc(PT) 1/8 (ports P, R) Pg.7 11.5 18 39 18 25 31 Approx. 300 (lead wire length) 53.5 P = 19 14 5 L2 L1 8.5 11.5 49.5 11.5 18 39 nRc(PT) 1/8 (port A) 8.5 11.5 49.5 A A P = 19 14.5 Common SUP, Common EXH/Side Ported:

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

: D Manual override (non-locking) Applicable cord O.D. 4 to 6.5 4Rc(PT) 1/8 (ports P, R) 83 71.5 Max .10 2-4.5 (mounting holes) 75.5 Light (DZ type only) 67.5 20.5 59 P R P R 4Rc(PT) 1/8 (ports P, R) Pg.7 11.5 18 39 18 25 31 Approx. 300 (lead wire length) 53.5 P = 19 14 5 L2 L1 8.5 11.5 49.5 11.5 18 39 nRc(PT) 1/8 (port A) 8.5 11.5 49.5 A A P = 19 14.5 Common SUP, Common EXH/Side Ported:

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

VZ3000

plug connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed

ZQ-OM01401

3.2 0.25 31 29 24 46 0.35 44 39 31 60 0.45 54 48 38 74 0.05 11 11 9 16 0.15 24 22 18 33 4 0.25 34 32 27 48 0.35 46 42 35 62 0.45 57 52 44 76 0.05 12 11 9 16 0.15 25 24 20 33 6 0.25 37 34 30 47 0.35 49 45 39 63 0.45 61 56 48 77 3 39 - No.ZQ-OM01401-B 12. 12.1 12.2 0 40 - No.ZQ-OM01401-B 12.3 Assy ZQ VQ100 3 2 Assy Assy Assy () ZQA-K15LO--2 ZQA-K25LO--2 ZQA-J15LO--1 ZQA-J25LO--1 ZQA-Q15LO

CRBU

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

ZQ-OM01301

(1) Specifications 50A-M5 Without fitting (M5x0.8) 50A-C3 3.2 (Straight) (1) 50A-C4 4 (Straight) Clip (10 pcs. are included in one set) 50A-C6 6 (Straight) A A F1-LC3 3.2(Elbow) ZK1-CP-A F1-LC4 4 (Elbow) 8 Bracket assembly ZQ1-BK1-A 24 - Doc.

Rotary Actuator/Vane Style Series CRB1

M1 M2 Body (B) N Body (A) 2 x R A port S N A port B port 2 x R Y Y A1 M1 A2 SMC SMC J 27 H X A1 (mm) E (g6) F (h9) R () H (R) Model A1 A2 B C D G1 G2 J K L M1 M2 P Q S T U V W X Y Z N CDRB1BW 5026 18 14 M6 x 1 depth 9 12 0.006 0.017 25 0 0.052 R6 R22.5 1/8 67 78 70 32 39.5 3 6.5 32.5 5 13.5 50 60 11 34 66 46 5.5 6.5 CDRB1BW 50-E 21 18 CDRB1BW 6329 15 M8 x 1.25 depth 10 15 0.006 0.017 28

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Solenoid valve Filter element Vacuum pressure switch Fitting PVF 4 5 6 7 i u 18 Series ZQ How to Order Pilot valve How to order connector assembly Connector assembly part no.