Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

VCC

Indication of A B C D E F G H T VCKL1209-02F VCKL1008-02F VCKL1075-02F VCKL0806-02F VCKL0604-02F 19 9 to 12 Nm 12/9 13 43.5 33 30.5 10 18.5 17 6 to 9 Nm 10/8 11 42.5 33 30 9 18.5 17 6 to 9 Nm 1075 11 42.5 33 30 9 18.5 14 4 to 9 Nm 8/6 9 40 32 27.5 8 16 12 3 to 8 Nm 6/4 7 38.5 32 27.5 8 16 VNA VNB SGC SGH VNC VNH VND VCC VCC TQ 653 VCC Series Special Tools Tool for Attaching/Detaching Valve

VZ100/300/500

C6 B3 B7 2 stations 02 M5 x 0.8 1/8 Tube Nil Rc G NPT NPTF F N T 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 A port M5 x 0.8, 1/8, C4, C6, B3, B7 One-touch fitting for 5/32" One-touch fitting for 1/4 Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Description SY3000 SY5000 Note SY3000 (Metric size) C4:With one-touch fitting for 4 C6:With one-touch fitting for 6 (Inch size) N3:With one-touch fitting for 5/32 N7:With one-touch fitting for 1/4 SY5000 (Metric size) C4:With one-touch fitting for4 C6:With one-touch fitting for 6 C8:With one-touch fitting for 8 (Inch size) N3:With one-touch fitting for5/32 N7:With one-touch fitting for1/4

SZ3000

KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A B A B A FREE LOCK 1-3-11 12 Series SZ3000 Manifold Option DIN rail dimensions/Weight D-sub connector (25 pins)/Cable assembly AXT100-DS25015 030 050 VZ1000-11-1Refer to the L dimension tables Enter a number from the DIN rail dimension table below.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VS VFN C6: One-touch fitting for 6 VVQZ200-10A-5 4-14-35 Base Mounted 36 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ15Stations Port size C Grommet (G) (35) 27.5 (11) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3, C4, C6, M5 (5.5) 2-4.5 mounting hole 20 (7.5) (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Manual override 5.5 A 2 A 2 5

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

SZ3000

KQ2P-04 KQ2P-06 KQ2P-08 4 16 32 6 6 18 35 8 8 20.5 39 10 A A A B A B A FREE LOCK 1-3-11 Series SZ3000 Manifold Option DIN rail dimensions/Weight D-sub connector (25 pins)/Cable assembly AXT100-DS25015 030 050 VZ1000-11-1Refer to the L dimension tables Enter a number from the DIN rail dimension table below.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Indication of A B C D E F G H T VCKL1209-02F VCKL1008-02F VCKL1075-02F VCKL0806-02F VCKL0604-02F 19 9 to 12 Nm 12/9 13 43.5 33 30.5 10 18.5 17 6 to 9 Nm 10/8 11 42.5 33 30 9 18.5 17 6 to 9 Nm 1075 11 42.5 33 30 9 18.5 14 4 to 9 Nm 8/6 9 40 32 27.5 8 16 12 3 to 8 Nm 6/4 7 38.5 32 27.5 8 16 15 VCC Series Special Tools Tool for Attaching/Detaching Valve VCC-G-A Knurled 8 4 x 1.8 21 For attaching

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Type 41 Applicable solenoid valve SYJ514-SYJ514M-SYJ524-SYJ524M-How to Order SS3YJ5--41-05 -C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 one-touch fitting 6 one-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" one-touch fitting

modular-press-e

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

EtherNet/IP TM Compatible Fieldbus System

SI unit which is not 32 output is connected to the port specified by diagnostic setting < 32 point switch diagnostic > 0x8-0xF Reserve 24 No.EX-OMS0014-A Diagnostic setting Output data Offset Meaning MSB LSB MSB LSB (INT) 15 8 7 0 Slave 8 #D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1 #A4 #A3 #A2 #A1 connection diagnostic 32 point 9 COM_D COM_C COM_B COM_A switch diagnostic -: Unused < Slave

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Model A L D KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A A A B B 6 Cassette Type Manifold Series SZ3000 Manifold Options DIN rail dimensions/Weight table D-sub connector (25 pins)/Cable assembly AXT100-DS25015 030 050 VZ1000-11-1Refer to the L dimension tables Enter a number from the DIN rail dimension table below in the .

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 10 () (+) White Black Item Characteristics Japan Aviation Electronics Industry, Ltd. 10 stations SOL.B 23 () (+) Gray Red 11 () (+) White Red Conductor resistance /km, 20C J.S.T. Mfg. Co., Ltd. 65 or less SOL.A 11 stations Hirose Electric Co., Ltd.

Table of Contents

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

Secondary Batteries

Refer to page 66 for details. 33 Heavy Duty Stopper Cylinder 20, 32 50, 63 90-RSH/RS1H Series How to Order Piping direction Positional relationship of lever and port Port 90-RSH20 Flange side Direction of transfer Nil Nil Direction of transfer 90-RSH32 Port Cylinder stroke 15 20 Bore size 20 32 15 mm (90-RSH20) 20 mm (90-RSH32) 20 mm 32 mm Heavy Duty Stopper Cylinder 20, 32 M9BWL 32 20 D

Compact manifold regulator ARM5 Series

side OUT side Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y 4, 5/32 2.5 6 11 35.5 2.5 6 11 35.5 4, 5/32 2.5 6 11 37.5 2.5 6 11 37.5 6 3 6.5 11 36 3 6.5 11 36 6 3 6.5 11 38 3 6.5 11 38 1/4 6.5 6 11.5 38.5 6.5 6 11.5 38.5 1/4 6.5 6 11.5 40.5 6.5 6 11.5 40.5 710 Regulator/