VFR

Description Material Gasket Hexagon socket head screw Pilot valve assembly Sub-plate assembly NBR Steel AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) Refer to How to Order Pilot Valve Assembly on page 3-5-10. Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !

5

Applicable bore size (mm) A A1 E1 L1 MM RR1 U1 NDH10 NX I-G04 32, 40 42 14 22 30 M14 x 1.5 12 14 10 +0.058 0 18 0.3 0.5 I-G05 50, 63 56 18 28 40 M18 x 1.5 16 20 14 +0.070 0 22 0.3 0.5 I-G08 80 71 21 38 50 M22 x 1.5 21 27 18 +0.070 0 28 0.3 0.5 I-G10 100 79 21 44 55 M26 x 1.5 24 31 22 +0.084 0 32 0.3 0.5 * A knuckle pin and retaining rings are included.

Electric Actuator Triple Axis P&P Unit

M5 x 18 Tightening torque 4.4Nm0.2Nm M3 x 14 Pulley cover mounting process Pulley cover TP-M3 x 5 TP-M3 x 5 Pulley cover mounting process 1. Mount the pulley cover using thin head screws. Confirm there is no rattle on the pulley cover. 19 Electric Actuator/Maintenance Guide 4 Be sure to read before handling.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

F 2 55.5 6 x M6 x 1 thread depth 10 31 F (With stroke adjuster at extension end) FF 38 70 56 92 89 38 24.5 7 2.5 Stroke adjuster at retraction end 7 22 Stroke adjuster at extension end 54.5 (With stroke adjuster at extension end) N x M6 x 1 thread depth 13 (Insert) KA 31 15 8 NA x M8 x 1.25 thread depth 8.5 K 31 Vacuum suction port Rc, G, NPT1/8 15 8 18 19 18 J 15 Maximum 16.5 (With stroke

SYJ300/500/700

plated Round head combination screw M3 x 31, Matt nickel plated Round head combination screw M3 x 31, Matt nickel plated SYJ700-10-2 Blanking plate V100 SYJ700-5-1 Gasket SY SYJ VK VZ VT Gasket Gasket SYJ700-5-3 SYJ700-5-4 VP VG Applicable base Sub-plate SS3YJ7-40 SS3YJ7-41 SS3YJ7-42 SS3YJ7-41R SS3YJ7-42R VP Applicable base SS3YJ7-20 SS3YJ7-21 SS3YJ7-21R Manifold base S070 Manifold base

Proposals for Energy Saving

S + Stroke ZZ + Stroke Bore size (mm) E F (E1) WA GA S TA ZZ (F1) 17 21 26 26 32 37 18 25 30 32 40 50 2 2 2 2 3 3 20 21 23 23 30 31 18 19 21 21 28 29 77 (85) 84 (93) 97 (109) 97 (109) 116 (130) 117 (131) 17 18 20 20 119 (127) 136 (145) 157 (169) 157 (169) 190 (204) 191 (205) 2 2 2 2 3 3 32 40 50 63 80 100 Note 1) Dimensions other than the above are the same as the standard double acting

Refrigerated Air Dryers

Corrected air flow capacity = Air flow rate (Correction factor A x B x C x D) 4 Corrected air flow capacity = 0.3 m3/min (0.82 x 0.96 x 1 x 0.88) = 0.43 m3/min Corrected air flow capacity = 0.4 m3/min (0.95 x 0.93 x 1 x 0.88) = 0.51 m3/min 5 Select the model.

SX

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted 32 Series SX3000/5000/7000 Dimensions: Series SX3000 2 position

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DU1 R1 NZ NX NDH10 NL NL NO U1 NO NX R1 Applicable pin Part no. Part no.

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DR1 U1 NZ NX NDH10 NL NL NO U1 NO NX R1 Part no. Applicable pin Part no.

REA/REB

REAR25, 32, 40 REAR20 REAR15 REAR10 10 11 12 13 14 15 16 17 18 REAR40 REAR32 REAR25 REAR20 REAR15 REAR10 Deflection (mm) 1 2 3 4 5 6 7 8 9 1000 2000 3000 4000 5000 0 Stroke (mm) The above deflection data indicate values when the external slider has moved to the middle of the stroke. 10-2-18 18 Series REAR Model Selection 4 Caution on Design 3 Body Non-rotating Accuracy and Max.

REA/REB

REAR25, 32, 40 REAR20 REAR15 REAR10 10 11 12 13 14 15 16 17 18 REAR40 REAR32 REAR25 REAR20 REAR15 REAR10 Deflection (mm) 1 2 3 4 5 6 7 8 9 1000 2000 3000 4000 5000 0 Stroke (mm) The above deflection data indicate values when the external slider has moved to the middle of the stroke. 10-2-18 18 Series REAR Model Selection 4 Caution on Design 3 Body Non-rotating Accuracy and Max.

VFS

1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

23 15 7 9.5 10 15 15 7 19 11 18 18.5 23.5 15.5 9.5 12 12.5 17.5 17 11 21 15 22.5 23 28 20 9.5 12 12.5 17.5 21.5 11 25.5 15 30.5 31 36 28 3 5.5 6 11 29.5 4.5 33.5 8.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

GS: Grommet with PCB CS: Conduit 67 18 Applicable cable 6 to 12 55.3 G1/2 38 18 300 500 48.9 18 NPT1/2 47.4 45.9 44.3 DN: DIN terminal without connector WN: M12 connector 41.1 18 31.3 18 JSXD3104 Only the JSXD31 with port size of 04 (1/2) has threads on the bottom of the body. 47.4 46.2 2 x M4 x 0.7 Thread depth 8 Glossary of Terms 18 Specific Product Precautions 30 JSXD Series Dimensions

5 Port Solenoid Valve Series VQZ1000/2000/3000

20.5 17 19.5 15.5 18 20.5 17 19.5 15.5 18 20.5 17 70 70 90 110 130 150 170 190 210 230 250 170 290 310 330 Note) The L dimension of 2 to 3 stations is the same.

MHZ

port, E = Side ported 12-2-31 31 Series MHZ2 Dimensions MHZ2-6 Double acting/Single acting Basic type 2-M3 x 0.5 through (Mounting thread) Prepared hole dia. 2.6 through (Mounting hole) 0 0.1 When open 12 1 4 20 12 20 When closed 8 0 0.4 0 0.05 0.05 10 11 25.5 +0.022 0 7H8 depth 1.5 38.8 53 M3 x 0.5 (Finger closing port) M3 x 0.5 (Finger opening port) 4-M2 x 0.4 (Thread for mounting attachment

MHZ

16 35 18 23 MHY 0.02 7.6 MHW MRHQ +2.2 0 0 -0.4 25 (35) 12 When open 19.2 When closed 11.2 Misc. 16.4 37.8 (47.8) 12 6 0.05 D57 (67) 2-M3 x 0.5 thread depth 6 (Mounting thread) 20M3 x 0.5 (Finger closing port) 4-M2.5 x 0.45 (Thread for mounting attachment) 11 Auto Switch Mounting Groove Dimensions 5 0 -0.05 3 5.7 6.2 M3 x 0.5 (Finger opening port) 8 5 21 (31) 5.4 For single action, the

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Mount of single unit 24 or more 0 0.4 31 31 x n pcs. + 3.5 x (n pcs. 1) ZSE ISE 31 0 0.4 0 0.4 31 ZSP PS ISA PSE IS ISG ZSM Vertical stacking mount of multiple units (n pcs.) 0 0.4 31 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 851 Series PSE300 Dimensions PSE3T 38 8 x M3 3 x 7.2 (= 21.6) Front protective cover (Option) 2 x 3.4 mounting hole (Rotate 90 to mount) 6.4 2 x 6.4 1 2 3 4 35.5 28