VFS

16 14 16 17 14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100

Compact Rotary Actuator Series CRQ2

CRBU2 CRB1 L1 + (3 x P) L1 + (3 x P) Q1 = M Q1 = M MSU L2 + (3 x P) L2 + (3 x P) L1 = L1 = CRJ L2 = L2 = Q2 = M Q2 = M CRA1 Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 CRQ2 (mm) (mm) Q1 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Q2 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Size 10 15 20 30 40 Size 10 15 20 30 40 MSQ MSZ CRQ2X MSQX Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can be

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Series SV

SX3000-22-2 (M2 x 24) SV2000-21-1 (M3 x 30) Round head combination screw Manifold Specification Sheets 75 Series SV Valve Manifold Specifications Type 16: Cassette Base Manifold Replacement Parts Adding manifold bases (type 16) 1 Loosen the screws a (2 pcs. on one side) that hold the manifold base onto the DIN rail.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Free Mount Cylinder Series CU

15.5 19.5 13 15 20 26 32 40 22 24 32 40 50 62 3 4 6 8 10 12 7 7 7 9 10 11 15 16.5 16.5 Note) 16 16 19 21.5 22 22.5 13 16 16 19 23 27 10 11 14 16 20 24 17 18 25 30 38 48 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 12.5 14 18 22 5 6 8 10 4 9 9 13.5 2 4.5

MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

MHZ

port, E = Side ported 12-2-31 31 Series MHZ2 Dimensions MHZ2-6 Double acting/Single acting Basic type 2-M3 x 0.5 through (Mounting thread) Prepared hole dia. 2.6 through (Mounting hole) 0 0.1 When open 12 1 4 20 12 20 When closed 8 0 0.4 0 0.05 0.05 10 11 25.5 +0.022 0 7H8 depth 1.5 38.8 53 M3 x 0.5 (Finger closing port) M3 x 0.5 (Finger opening port) 4-M2 x 0.4 (Thread for mounting attachment

MHZ

16 35 18 23 MHY 0.02 7.6 MHW MRHQ +2.2 0 0 -0.4 25 (35) 12 When open 19.2 When closed 11.2 Misc. 16.4 37.8 (47.8) 12 6 0.05 D57 (67) 2-M3 x 0.5 thread depth 6 (Mounting thread) 20M3 x 0.5 (Finger closing port) 4-M2.5 x 0.45 (Thread for mounting attachment) 11 Auto Switch Mounting Groove Dimensions 5 0 -0.05 3 5.7 6.2 M3 x 0.5 (Finger opening port) 8 5 21 (31) 5.4 For single action, the

Base Mounted Metal Seal/Rubber Seal Series VQ

Maximum stations are 16.

V

Model A L D Applicable Fitting Size d KQP-04 16 32 6 4mm KQP-03 16 32 6 5/32 KQP-06 18 35 8 6mm KQP-07 18 35 8 1/4 KQP-08 20.5 39 10 8mm KQP-09 20.5 39 10 5/16 KQP-10 22 43 12 10mm KQP-11 22 43 12 3/8 Phillips /Ordinary Round Head Screw Gasket Series SY3000-23-4 (M2x21) SY3000-11-8 SY3000 M3x26 (Non Glare Nickel Plating) SY5000-11-2 SY5000 M4 x 31 (Non Glare Nickel Plating) SY7000-11-2 SY7000

CY1F

7 6.5 16 27 9 7 19.5 14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 LL LW LZ Model KC KA KB KH KW LA ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Digital Unit M12 connector (5 pins) M8 connector (3 pins) D-sub connector Spring type terminal block Input Unit 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs Output Unit 8 outputs 8 outputs 8 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs Input/ Output Unit 8 inputs

ZP

Hexagon width across flats 12 Hexagon width across flats G 1 8 Model A 1 8 B C F: M5 x 0.8 F: M6 x 1 F: Rc K L Y E B C F: M6 x 1 F: M8 x 1.25 F: Rc K L Y D Model A E D G E D G E D G D D ZPT40B ZPT50B 34 6 8 6.2 38 5.5 5.5 13.8 10 13 12 15 5 8 16 25 25 31 40 50 43 53 51.5 47.5 32.4 19 24.4 16 48 57 ZPT10B 29 6 8 29 6.2 12 35 8.7 7.5 9.9 8.5 18.5 27.5 27.5 33.5 19 ZPT13B 16 18 20 ZPT16B 21

0.4

16 32 16 32 16 32 16 M12 DeviceNet 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) VFS M12 PROFIBUS DP VFR D-sub Note 4) M12 CC-Link VQ7 M12 EtherCAT IP67 compliant

o

How ttt Order Applicable valves Type 20 NVJ312-O-M3 NVJ3120-O-M3 NVJ322-O-M3 NVJ3220-O-M3 Type 20 and 2OR Internal pilot type NW3J3-2 External pilot type NVv3Jc-2oR@ Type 20 Type 208 Type 2OR NVJ312R-O-M3 NVJ322R-O-M3 |[0ldl!

o

How ttt Order Applicable valves Type 20 NVJ312-O-M3 NVJ3120-O-M3 NVJ322-O-M3 NVJ3220-O-M3 Type 20 and 2OR Internal pilot type NW3J3-2 External pilot type NVv3Jc-2oR@ Type 20 Type 208 Type 2OR NVJ312R-O-M3 NVJ322R-O-M3 |[0ldl!

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

How ttt Order Applicable valves Type 20 NVJ312-O-M3 NVJ3120-O-M3 NVJ322-O-M3 NVJ3220-O-M3 Type 20 and 2OR Internal pilot type NW3J3-2 External pilot type NVv3Jc-2oR@ Type 20 Type 208 Type 2OR NVJ312R-O-M3 NVJ322R-O-M3 |[0ldl!

Electric Actuator Triple Axis P&P Unit

Remove the thin head screws (TP-M3 x 5, 8 pcs.) fixing the pulley cover using a hexagon wrench. Use a normal hexagon wrench. TP-M3 x 5 TP-M3 x 5 2. Pull out the pulley cover in the direction of the arrow. Pulley cover Motor mounting process 1.

MHZ2/MHZJ2

0 2H9 depth 3 4-M3 x 0.5 thread depth 5.5 (mounting thread) 0.02 5.2 Prepared hole dia. 2.6 through (mounting hole) Note) +2.2 0 0 -0.1 4 16 29 23 18 7.6 0.02 11H9 depth 2 +0.043 0 0 -0.7 23 12 When closed 11.2 When open 15.2 16.4 0.05 37.8 6 12 2-M3 x 0.5 thread depth 6 (mounting thread) 57 M3 x 0.5 4-M2.5 x 0.45 (finger closing port) (attachment mounting thread) M3 x 0.5 (finger opening