4/5 Port Solenoid Valve Series SYJ3000/5000/7000

) P. 1 + SYJ5000 Body ported Base mounted 0.47 4/2 5/3 (A/B EA/EB) With light/ surge voltage suppressor L plug connector { } P. 23 + SYJ7000 2 Position Single 2.4 4/2 5/3 (A/B EA/EB) Double { } M plug connector + For AC P. 47 Non-locking push type SYJ3000 3 Position 100 VAC / Hz 110 VAC / Hz 200 VAC / Hz 220 VAC / Hz 50 60 50 Closed center 60 0.46 4/2 5/3 (A/B EA/EB) 50 60 { }

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) G GP H HB HG HP A HS HT HA D FB FA d EA EB B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5 40 34 12 10 3 6.5 10 12 33 14 25.5 PA J x K LD (N) PB PW Q S ta tb TT T QW W Z L Model CY1S6 CDY1S6 M4 x

CL

SMC if the fine lock-up unit must be disassembled. 3.1-54 Lock-up Cylinder/Double Acting Single Rod Series CL1 Basic/(B) A Lock-up at piston forward B Lock-up at piston backward 40 to 100 With rod boot CL MLGC CNA CB CV/MVG CXW 125 to 160 CXS CXT With rod boot MX MXU MXS MXQ MXF MXW MXP MG MGP MGQ (mm) MGG Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 BY C EA K D BX J KA BP EB

VQ7-6/7-8

63 PE PE PA B 80.5 (50) 63 P PE PE P R1 R2 R1 R2 EA EB EB EA A A Dimensions inside ( ) are for sub plate apertures Rc3/8 and 1/2 Dimensions inside are for sub plate aperture Rc3/4 Dimensions inside ( ) are for sub plate apertures Rc3/8 and 1/2 Dimensions inside are for sub plate aperture Rc3/4 28 Series VQ7-8 Manifold Options Individual EXH spacer VV72-R-03, 04 Individual SUP spacer VV72

Air Pilot Operated

A common Pressure Gallsry (P) and two common Exheusl Gall6rle3 (EA & EB) Interconnect wlth lha p(seur6 and Bxhausl ports of all ihs valve wlthin the a$smbly. Prg38ur6 and Exhausi sMca connectlona ar locatod at eithor 6od of the manlfold.

7.4

Manifold Flow Rate Characteristics Port size Flow rate characteristics 1R4/2 (PRA/B) 4/2R5/3 (A/BREA/EB) Model 1, 5, 3 (P, EA, EB) 4, 2 (A, B) C [dm3/(sbar)] Cv C [dm3/(sbar)] Cv SS0752-C 1/8 C4 2.6 0.71 2.7 0.75 SS0755-CC 1/8 C4 2.1 0.58 1.9 0.53 SS0755-VC M5 thread V4 0.86 0.24 0.86 0.24 When 5-station single solenoids are operated simultaneously. 740 Valve Specifications S0700 Series

5 Port Solenoid Valve Series VQZ1000/2000/3000

port) (External pilot only) 11.5 11.5 1/8 [1(P), 5(EA), 3(EB) port] 19 38 L-type plug connector (L) M-type plug connector (M) 58.4 [60.6] Approx. 300 (Lead wire length) Approx. 300 (Lead wire length) 84.2 [86.4] 48.6 [55.6] 43.6 EA EB EA EB P P Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC Unless otherwise indicated, dimensions are the same as Grommet (G). [

NCQ2/CQ2

Rod Axial Piping Water Resistant End Lock Clean Series Copper/Fluorine free series Construction and Parts Bore size (mm) 12 16 20 25 32 40 50 63 80 100 100 Standard/ Allowable kinetic energy: Ea 0.022 0.038 0.055 0.09 0.15 0.26 0.46 0.77 1.36 2.27 100 50 40 30 Allowable lateral load at rod end W (N) Allowable lateral load at rod end W (N) 80 With rubber bumper/ Allowable kinetic energy: Eb

Air Pilot Operated Series NVSA

A common Pressure Gallsry (P) and two common Exheusl Gall6rle3 (EA & EB) Interconnect wlth lha p(seur6 and Bxhausl ports of all ihs valve wlthin the a$smbly. Prg38ur6 and Exhausi sMca connectlona ar locatod at eithor 6od of the manlfold.

99

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

JXCx-OMX0009

LEY40#EA: 9 kg, LEY40#EB:19 kg, LEY40#EC:38 kg LEYG40#EA:7 kg, LEYG40#EB:17 kg, LEYG40#EC:36 kg 109 - Caution (1) Supply power when the actuator is stationary. The controller acquires the absolute position data from the absolute encoder when power is applied.

Regulator

EB EB EB EC EC EC EC NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current output + ED ED ED ED c Flow direction Nil Nil Nil Nil Flow direction : Left to right R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Nil Nil Nil Nil Name plate and pressure gauge in imperial unit : MPa e Pressure unit Note2) Z Z

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

LEY40#EA: 9 kg, LEY40#EB:19 kg, LEY40#EC:38 kg LEYG40#EA:7 kg, LEYG40#EB:17 kg, LEYG40#EC:36 kg 75 - Cution (1) Supply power when the actuator is stationary. The controller acquires the absolute position data from the absolute encoder when power is applied.

Regulator

EB EB EB NPN open collector 1 output + Analog voltage output EC EC EC EC NPN open collector 1 output + Analog current output + ED ED ED ED c Flow direction Nil Nil Nil Nil Flow direction : Left to right R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Name plate and pressure gauge in imperial unit : MPa Nil Nil Nil Nil e Pressure unit Note2) Z Z

2–4

Standard without auto switch: 12 and 16; 5 stroke, 25; 5 to 10 stroke Built-in magnet with auto switch: 20; 5 stroke 6 Series CQM Dimensions 32 to 50 2-HA through Auto switch 2-P 2-HB through V KA F Q U 2 x 2-OB counterbore with depth RB 2-N through IB IA EA EB EC M 22 Z 11 Min. lead wire bending radius 10 (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2

VQ4000

) VQD 1 4/2 (P A/B) 2 position rubber seal 1 2 VQ4 51 4/2 5/3 (A/B EA/EB) Note) Port size: Rc 3/8 Manifold Option Refer to pages 2-5-34 to 2-5-38 for detail dimensions of each option.

Table of Contents

Note 2) Fixed unit: kPa Built-in silencer Port exhaust Nil P Vacuum pressure sensor Digital vacuum pressure switch specifications Nil GN G E EB EE None Adaptor Rc 1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E For E (ZSE4) EB (ZSE4B) 25 26 65 Lead wire length 0.6 (3.0) m Lead wire

Multistage Ejector Series ZL112/212 1

Note 2) Fixed unit: kPa Built-in silencer Port exhaust Nil P Vacuum pressure sensor Digital vacuum pressure switch specifications Nil GN G E EB EE None Adaptor Rc 1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E For E (ZSE4) EB (ZSE4B) 25 26 65 Lead wire length 0.6 (3.0) m Lead wire

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

bolt MY1H LZ Stroke Bore size (Shock absorber stroke) T S E EA EB W h TT Stroke adjustment unit Shock absorber FC FA EY EC (mm) E EA EB EC EY h S T TT FA FC Shock absorber model Applicable cylinder W F MY1H25 18 9 40 7.5 53.5 16 21 3.5 46.7 7 53 RB1007 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 67.3 12 64 RB1412 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 67.3 12 9 (Max.25) 75

        Series VKF300

( , 0( , = ) % $ B /EB3A /EB '!' B /EBA /EB '' B /EBA /EB '' B /EB3A /EB '' i D 3 B /EB A /EB '4' % *% o ?%) , < Series VKF300 $ "# $ %& ! %& ! ! "# $ %& ' ( &) $%% / / 01 * & * * & ) # ! %& !+ & ,,& &-% + &) ,.. ! "# ! * & ) $%% / / 01 * & * ' ( &) !+ & ,,& &-% + &) ,.. ! " # $ # ! %& Series VKF300 * ( / 73 * "" ()*+ "" ,&30 ! // 44 44 $ %& ' !"