Micro Mechanical Valve Series VM1000

39 38 21 30.5 1.5 1.5 Symbol 18.5 3 (B) 2 (A) 4 (161) (109.5) (140) 12 14 PE EA P EB 3 (EB) 1 (P) 5 (EA) B A 91 17.8 14 14 17 23.3 12.8 38 36 3 13 22.5 2 13.8 26.7 30 18 5 x 1/8 0.5 MPa supply 2 x 3.5 mounting hole T.T. 26 N F.O.F.

0.4

F kit P. 572 P kit P. 574 T kit P. 576 L kit P. 578 M kit P. 580 Station 6 SOL.B Silencer (For EXH port) AN15-C08 Double check block VVQ1000-FPG-SOL.A 8 9 10 21 Station 7 SOL.B 22 SOL.A 6 19 SOL.B 23 24 11 Station 8 12 25 13 13 COM. to CYL port Connector terminal no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Y Without rod boot With rod boot (One side) (Both sides) H ZZ e f h l ZZ ZZ 40 40 207 3.2 42 70 81 M14 x 1.5 27 1/4 42 11 20 45 153 27 13 51 255 43 11.2 59 1/4 stroke 263 271 50 45 222 3.2 50 80 90 M18 x 1.5 30 3/8 46 10 21 50 168 27 13 58 284 52 11.2 66 1/4 stroke 292 300 63 50 250 3.2 59 93 106 M18 x 1.5 31 3/8 48.5 13 23 60 182 34 16 58 298 52 11.2 66 1/4 stroke 306 314 80 65 296 4.5 76

VS 8-2/VS 8-4

Insulation resistance M/km, 20C 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 5 or more Note) The minimum bending radius of the D-sub connector cables is 20 mm.

CL

F D GA 80 H 8 BQ GK GQ GL GR 5 BZ BP GC GB GD 3.5 B1 AL B B2 BN BC 13 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 Up to 400 55 8 8 41 4 6 4 38 26 40 73.5 15.5 63.5 8 13 20 8 6 Up to 450 64.5 8 9 45 7 9 7 45 4 32 47 83.5 19.5 74.5 10 22 17 90 13 CNS 25 8 6 Up to 450 64.5 8 9 45 7 9 7 45 4 32 47 83.5 19.5 74.5 12 22 17 90 13 32 10 8 Up to 500 70 11 8 50 7 11 8 52 4 41 54 90.5 21 80 14 24 22 100.5 16 40

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Table of Contents

P [200 VAC specification] Power cord outlet (17) [100 VAC specification] Power cord (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101 270 32 21 330 413 38 150 3/8 226 410 240 15 51 232 138 24 327 125 67 304 33 73 31 36 154 21 330 473 1/2 13 453 283 275 498 455 15 270 31 80 230 32 15 240 80 284 42 3/4 355 300 568 485 4 6 Refrigerant HFC134a

KR

(mm) Note) Weight (g) D L1 L2 L3 A M P Q1 Q2 KGLU04-M5 KGLU04-01 KGLU04-02 KGLU06-M5 KGLU06-01 KGLU06-02 KGLU06-03 KGLU08-01 KGLU08-02 KGLU08-03 KGLU10-02 KGLU10-03 KGLU10-04 KGLU12-02 KGLU12-03 M5 x 0.8 12 10 11 10.4 18.5 24 26.5 30.5 29.5 32 36 25.5 27.5 16 10.4 18.5 10 30 26.5 33 29.5 4.3 4.1 4 1 8 1 4 6.0 4.1 14 21 13 M5 x 0.8 4.3 4.3 13 12.8 21 17 12.8 20.5 12 1 8 15 22 35 29.5

Tie-rod Type Hydraulic Cylinder

23 17.5 19.5 22.5 24.5 13 15 11 13 17 19 11 13 15 17 11.5 13.5 14 16.5 11 13 CHN 63 23.5 24.5 20 21 25 26 13.5 14.5 19.5 20.5 13.5 14.5 17.5 18.5 13.5 14.5 80 23.5 26.5 20 23 25 28 15.5 18.5 13.5 16.5 19.5 22.5 13.5 16.5 17.5 20.5 14 17 16.5 20 13.5 16.5 CHM 100 27 31 23.5 27.5 28.5 32.5 19 23 17 21 23 27 17 21 21 25 17.5 21.5 20 24.5 17 21 Note 1) The auto switches listed below cannot

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 42 29 11 7.5 8 8.5 9 M4 x 0.7 10 12 13 15 M4 x 0.7 4.3 4.3 5.6 5.6 M5 x 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 8 8 10 10 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 5 5 6 6 13 15 18 21 18 26 30 36 42 13 15 18 21 18 22 24 30 12 16 20 25 10, 20, 30, 40, 50, 75, 100 125, 150

MXQ

16 20 20 Z ZZ (NN 1) x H G H 10.5 5.5 10.5 5.5 A B 3.2 3.2 6.5 6.5 7 7 3H9 depth 2.5 +0.025 0 12 1 B A NN-M4 x 0.7 thread depth 8 4 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5

smcmaintenancepartslist

(FKM can be selected.) 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) Tube gasket Tube gasket NBR NBR (FKM can be selected.) (FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit.

Electric Actuators

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

CM2

26 5 8 M8 X 1.25 M20 X 1.5 15 8 28 18 24 13 5 15.5 20 8 4 40 8 41 6.8 21 25 20 3.2 40 55 M10 X 1.25 17 32 6 8 M26 X 1.5 15 10 33.5 22 30 13 5.5 19.5 20 8 4 47 8 45 6.8 25 28 25 3.2 40 55 M10 X 1.25 17 32 6 8 M26 X 1.5 15 12 37.5 22 34.5 13 5.5 19.5 20 8 4 47 8 45 6.8 25 28 32 3.2 40 55 M14 X 1.5 M32 X 2 22 41 8 10 21.5 14 46.5 24 42.5 16 7 21 23 11 4 54 10 50 7 27 30 40 3.2 55 75 Dimensions

MY1

18 16.5 26 42 GB 24.5 30 36.5 37.5 39.5 G 16 19 23 27 29.5 QQ 16 16 26 28 30 NC 21 26 32 43.5 60 VV 16 19 23 28 30 TT 15.5 21 22.5 35 43 WW 11 13 20 22 25 UU 16 16 24.5 24 28 XX 38 48 54 74 92 SS 3.5 4 10.5 10 13 RR 19 24 25.5 35 49 "P" indicates cylinder supply ports.

•

) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L-40 13-/22-MXQ6L-50 Note) Note) Note) Refer to the bottom view of MXQ6-30. 1322803 MXQ 1322Air Slide Table

MGG

size (mm) W V U T O P S Z X Bore size (mm) Bore size (mm) Y R HR HN Q Y R Q 20 25 32 40 50 40 48 82 12 M6 x 1 depth 9 Rc 1/8 26 157 30 20 25 32 40 50 20 25 32 40 50 11 25.3 12 (14) 21 37 47.5 107 (115) 104 46 57 100 13 Rc 1/8 M6 x 1 depth 13 31 175 37 11 28.3 12 (14) 21 40 104 48 107 (115) 52 65 114 16 Rc 1/8 M6 x 1 depth 13 38 201 37 11 31.3 12 (14) 21 43 106 49 110 (118) 62 84 138 Rc 1

Modular Design with Uniform Body Style

v*13 v*13 v*13 v*13 *1 Option B is included in the package with the product but does not come assembled.

REA/REB

3 6 6.5 52 40 29 13 REAS20 10 9.5 5 21.6 16 8.5 62 46 36 17 Max.