VM

16.5 26 VHK-06F-01S VHK-06F-02S VHK-06F-03S 60.4 62.4 36.1 38.1 31 54 56 17 14 41 1 8 1 4 3 8 18 41 1.2 6 8 18 41 62.2 26.2 36 16.5 3.5 18.7 11 9.7 1.2 31 58 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-08F-01S VHK-08F-02S VHK-08F-03S 65.2 66.2 39 40 32 59 60 19 22 40 1 8 1 4 3 8 10 22 46 73.8 30.5 43.3 21.5 4 20.8 14 16.1 3.2 49 VHK-B2A 49 17 1 30 25 21.5 31 VHK-10F-02S VHK-10F-03S VHK-10F-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Series KG Stainless Steel One-touch Fittings

41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

3 Port Air Operated Valve

/Individual Exhaust Type 42 VPA300/500/700 Series VPA700 Series/Dimensions Type 41/Common exhaust: VV3PA7-411-04 Stations 127 40 24 2 x 8.5 (For mounting) N.C.

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

Table of Contents

Model no. of switch rail accessory is listed on pages 8-15-32 and 8-15-41.

Smooth Cylinder/Low Speed Cylinder

41 41 44 41 41 49 49 83.5 93.5 46.5 47 85.5 91 93.5 91 41 41 43 43 41 41 52 43 50 49.5 49 49 52.5 49 49.5 56 57.5 92 102 53.5 53.5 94 107 102 107 49 49 51 51 49.5 49 58.5 51.5 58.5 56.5 56 56 61 56 56.5 65 68 102.5 112.5 61.5 61 104 121 112 121 55.5 56 57.5 57.5 57.5 55.5 66 58.5 Note 2) D-A9/A9V types cannot be mounted on 50. 1224 Auto Switch Mounting Series CA2Y Minimum Auto Switch Mounting

Stainless Steel One-touch Fittings Series KG

41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

SX

-05-C6 One-touch fitting (Inch size) Symbol Port size Applicable series One-touch fitting for 5/32" N3 SX3000 One-touch fitting for 1/4" N7 SS5X3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)

ZP

D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

CG5-S

8 -04 R 1/2 -04 R 1/2 Straight Union KGH KGLU12-02 R 1/4 12 -03 R 3/8 -04 R 1/2 Applicable tubing O.D.

VFR

How to Order Sub-plate Assembly Pilot type Nil R External pilot Internal pilot Thread type Plug-in VFR4000 P 04 Nil Rc Non plug-in VFS4000 S 04 G F N NPT NPTF T B Plug-in VFR4000 P 04 Non plug-in VFS4000 S 04 B Piping port (P, A, B port) Note) Bottom ported is not available for external pilot.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

41 8 18.5 15.2 79 R3/8 19 23 9.5 1.5 47.4 19.8 52.6 79 19.8 52.6 AS321F-03-10ST AS321F-N03-09ST 18.5 1.5 47.4 5/16" 15.2 29.5 41 NPT3/8 19 23 9.5 31.8 43.3 10 21 18.5 81 81 AS321F-03-12ST AS321F-N03-11ST 21 3/8" 17.9 31.8 43.3 32.8 44.3 12 22 20.9 83 141 AS421F-04-10ST AS421F-N04-11ST 21 3/8" 17.9 33.6 47.9 33.6 47.9 10 21 18.5 141 24 28.6 12 1.5 55.8 1/2" NPT1/2 23.8 21.7 28.6 12 35.2 49.5

5

41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56 58.5 56 56.5 55.5 57.5 55.5 66 56 66 58.5 68 102.5 112.5 61.5 57.5 61 57.5 104 121 112 121 Operating Range (mm) Auto switch model Bore size 40 50 63 80 100 Auto switch model Bore size 40 50

SYJ3000/5000/7000

For SYJ5000, refer to page 1-5-41, and for SYJ7000, refer to page 1-5-64.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

SQ1000/2000

08 Dual flow fitting SSQ1000-52AP. 39 P. 41 P. 42 P. 43 C8 N9 P R D side U side Silencer (for EXH port) Port plug VVQZ100-CP Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R P. 39 P. 41 P. 42 P. 43 C6 L6 P R D side SMC AN200 U side Built-in silencer (-S) Back pressure check valve (-B) SSQ1000-BP Special wiring specification (-K) Individual EXH spacer SSQ1000-R-3P. 40 P. 41 P.

smcmaintenancepartslist

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round

Modular Type Lubricators Series AL

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

Speed Controller with One-touch Fitting

) AS32m1F-03-12PA 12 18.5 29.7 40.9 (41.3) 26.8 17 41 (42) AS42m1F-04-10PA 10 1/2 27 (28.6) 15.9 18.8 27.4 41.8 (42.6) 36.2 50.8 49.2 40.4 38.8 15.6 66 (72) AS42m1F-04-12PA 12 18.5 30.8 45.2 (46) 35.1 17 68 (74) 10.4 21.8 33 (33.4) 28.7 42.3 40.7 34.7 (34.2) 33.1 (32.6) 3/8 21 (21.7) 16.6 Note) The values in ( ) are for NPT thread.