HRX-OM-S004

capacity . 8-12 HRS Series HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity . 8-14 8.5.1 HRS100/150-A/W-20/40/46. 8-14 8.6 Types of Hazard Labels (HRS--40/46-) . 8-15 8.6.1 Positions of danger warning label . 8-16 8.7 Standards . 8-17 8.8 Sample DoC. . 8-18 8.9 Daily Check Sheet

HRX-OM-M090

5 to 40 5 to 40 outlet system1 Pressure range MPa 0.3 to 0.5 0.3 to 0.5 0.3 to 0.5 Facility water Required flow13 L/min 8 12 14 Facility water pressure differential MPa 0.3 more 0.3 more 0.3 more Port size Rc3/8 Wetted material Stainless steel, Copper brazing, Bronze, Synthetic rubber Feed water pressure range MPa 0.2 to 0.5 fluid filling14 Automatic Feed water temperature oC 5 to 40 range

SFOD-OMT0005CN

(12 0 ) (2) (3) (4) (5) (6) (7) (01-048) B RESET <> <> () (-)(+) W 1W 2 (W 12 0 ) (01-049) PARA B RESET <> <>No.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

23.1 16 27.1 12.7 20.4 14.3 31.1 36.1 27.5 3.2 9.3 1/4" 12 12 32.1 13.5 R 1/8 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01

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I.D. 1/8" (3.18) 0.086" (2.18) KFG2E0122-00 8 1.1 16 12 12 32.8 29.4 5 1.5 10 H2 H3 H1 H2 5/32" (4) 0.098" (2.5) KFG2E0325-00 8 1.6 16 12 12 32.6 29 5 1.8 11 d 5/32" (3.95) 1/4" (6.35) KFG2E0704-00 12 6 39 17 17 39 34.6 6 3.3 13.5 5/16" (8) 0.236" (6) M M KFG2E0906-00 14 17 43 17 17 40.4 35.8 6.6 5.3 15 L2 L1 3/8" (9.53) 1/4" (6.35) KFG2E1163-00 17 19 84 22 22 46.8 41.4 7.6 5.6 20 1/2" (12.7

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

4-14-40.

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

Series VQ Metal Seal/Rubber Seal Body Ported

L Series VQ1000 Plug lead Cassette Plug-in P.1.10-12 P.1.10-14 Series VQ0 P.1.10-44 P.1.10-36 P.1.10-40 Series VQ1000 P.1.10-36 P.1.10-40 P.1.10-44 C Series VQ2000 P.1.10-40 P.1.10-44 P.1.10-36 Series VQ1000 P.1.10-74 P.1.10-76 P.1.10-78 1.10-4 Manifold Variations C S L Port size SUP EXH port Cylinder port kit kit SY Lead wire Direct electrical entry style Serial transmission unit P, R A,

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Maximum stations are 12.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

-23 AS131F-M5-07 1/4" 8.4 3.2 17 24.4 M5 x 0.8 12 21.6 20.7 31.9 13.7 9.3 17.5 13.1 30.9 12.7 AS231F-01-04 AS131F-U10/32-07 1/4" 9.3 4 10-32UNF 24.9 12 18 14.2 35.2 30.2 32.1 27.1 1/8 (12.7) AS231F-01-06 AS231F-01-01 17 12.7 30.9 17.5 9.3 13.1 24.4 8.4 26.9 36.3 13.5 1/8" 22.9 14 11.6 6 10.9 AS231F-01-08 AS231F-01-03 9.3 30.9 40.8 18.5 5/32" 28.2 16.2 15.2 8 12.9 21 24.9 18 12 AS231F-02-04

Smooth Cylinder/Low Speed Cylinder

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40(n 2) 2 105 + 40(n 4) 2 110 + 40(n 4) 2 115 + 40(n 4) 2 With n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) With 2 pcs.

HRX-OM-R005

Facility water source to be prepared (For water-cooled type) Table 3-2 Facility water source to be prepared Required facility water rate Heat Facility water temp. l/min Model Radiated range Facility water temprature oC kW 25 oC 32 oC 40 oC HRS060-W-20 Approx.12 5 to 40 17 20 28 (Rating 25) 3.2 Installation HRS Series 3-6 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.2.3 Installation and

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

fitting size 8 10 12 Only R is available.

5 Port Air Operated Valve

(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38 1/8 [4 (A), 2 (B) port] 12 11.5 1/8 [4 (A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

For 20A/20B 25 5 1.5 4 x 2.6 Depth 7 or less Atmospheric vent port 30 20 30 20 Lead wire with connector M5 x 0.8 Thread depth 3.5 01 4 x 2.6 Depth 7 or less Atmospheric vent port 15.2 R1/8 7.2 N01 NPT1/8 A Piping specification Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 20 ZSE20(F)/ISE20 Series Dimensions With bracket ZSE20(F) ISE20 Option 2 30 A1 25 20 Bracket