Modular Design with Uniform Body Style

/4 3/8 1/2 3/4 Size 20 V V Size 30 V V Size 40 V V V Size 40-06 V 3 Modular F.R.L.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 AS221F-01 AS231F-01 R 1/8 AS221F-02 AS231F-02 R 1/4 AS321F-02 AS331F-02 R 1/4 AS321F-03 AS331F-03 R 3/8 AS421F-04 AS431F-04 R 1/2 AS121F-U10/32 AS131F-U10/32 10-32 UNF AS221F-N01 AS231F-N01 NPT 1/8 AS221F-N02 AS231F-N02 NPT 1/4 AS321F-N02 AS331F-N02

Compact 5-Port Solenoid Valve

PG/PGC: Flat ribbon cable (20 pins) PH/PHC: Flat ribbon cable (10 pins) Symbol Stations Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 09 9 stations 02 2 stations Specified layout*2 (Up to 18 solenoids available) 04 4 stations 02 2 stations Specified layout*2 (Up to 8 solenoids available) o Mounting and Option * Enter the number of stations inside m

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 17 (18) AS22l1FG-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02

5 Port Solenoid Valve SY Series

1 4 1 8 M5 38 1 2 1 2 1 4 1 8 M5 Bracket C4 C6 C8 C10 C12 N3 N7 N9 N11 SY3 20 SY5 20 SY7 20 External Pilot (Note 2) DIN External Pilot (Note 2) External Pilot (Note 2) terminal (EA, EB) (P) M8 connector SY9 20 SY3 40 SY5 40 SY7 40 Sub-plate External pilot External pilot DIN External pilot terminal M8 SY9 40 connector Note 1) All AC voltage models have built-in surge voltage suppressor.

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

26.5 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 13.5 12 12 20.5 20.5 3/8, 1/4 (Piping port) 11.5 33 3 position closed center / exhaust center / pressure center [M12 waterproof connector type] 10-SV300(R)-W-02, 03 21 22.5 13.5 99.2 M5 x 0.8 (External pilot port) 84.9 23.4 M5 x 0.8 (Pilot EXH port)

0.4

Rc N NPT VQZ T NPTF F G SQ In the case of alone Sub-plate Terminal block Port size VFS 02 PW VQ2000 1/4 02 VFR Dimensions VQ7 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1-02 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 25.1 28.8 30.1 9.6 33.8 M5 x 0.8 8 13.5

Series AS-FM/AS-M/ASD-FM

Max. 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 12.7 12.3 7 25 25.8 22.2 9.6 28.6 M5 x 0.8 8

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

42

115.5 (Plug lead type) 25 Thread type 12.5 73 Manifold Port size Nil Rc F G N NPT T NPTF 02 1/4 03 3/8 1 Plug-in type 5 Plug lead type 26.4 1(P) VVQ4000-P--02: 1/4 VVQ4000-P--03: 3/8 4(A) 2(B) 1(P') 5(R1) 3(R2) Plug-in type Plug lead type Circuit diagram Individual EXH spacer VVQ4000 R 1 02 163 (Plug-in type) Thread type 115.5 (Plug lead type) 25 Manifold Port size Nil Rc F G N NPT T NPTF

•

M6 MB M5 M6 M8 M5 M6 M8 M4 Ms M6 ~.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

40 AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

ZP3

x 0.8 Female thread 02 2 One-touch fitting 04 4 U2 For 2 polyurethane tubing Barb fitting U4 For 4 soft tubing 8 B5 M5 x 0.8 8 Model M5 x 0.8 8 0 0.1 M5 x 0.8 Effective thread depth 4 Vacuum inlet direction q Pad dia.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VF 74.5 VFR 39.5 VP7 VP4 Individual SUP spacer VVQZ1000-P-5-M5 VVQZ2000-P-5-01 VVQZ3000-P-5-02 M5: VQZ1000 Rc(PT)1/8: VQZ2000 Rc(PT)1/4: VQZ3000 VQ VQ4 B VQZ Used to form a separate supply port for an interior manifold station or stations.