MXS Series Air Slide Table

With end lock (16) MXS16R With buffer (16) MXS16F 2-M6 X 1 thread 10 deep Operating port 2-M5 X 0.8 J 13 12 18 48 20 41 3 30 0.5 37.5 Dimensions not indicated are the same as basic type.

Modular F.R.L. Unit

Note 2) For M5 and NPT thread type.

Prevents Micro-Bubbles

Symbol Thread type M5 Rc 1/8 NPT 1/8 Body class 2 3, 4, 5, 6 3, 4, 5, 6 LVH Nil N Variations LVD LVC20 LVC30 Model LVC40 LVC50 LVC60 Orifice diameter LVQ Inch sizes 4 8 10 16 22 Tubing O.D. 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Metric 4, 6 6, 8, 10 10, 12 12, 19 19, 25 LQ Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Symbol Type LVN Basic type N.C.

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

Speed Controller with One-touch Fitting

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 Gasket seal Note 3) AS121F-U10/32AS131F-U10/32 10-32UNF Note 3) AS221F-01 AS231F-01 1/8 Note 3) AS221F-02 AS231F-02 1/4 Note 3) Note 3) R NPT Note 1) Sealant AS321F-02 AS331F-02 1/4 AS321F-03 AS331F-03 3/8 AS421F-04 AS431F

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Bore (mm) 25 32 40 50 63 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Applicable pin CD-MU02 CD-MU03 CD-MU04

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Bore (mm) 25 32 40 50 63 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Applicable pin CD-MU02 CD-MU03 CD-MU04

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

3.5 3.5 7.5 11.5 26.5 27.5 11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70 75 19 8 71.5 23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42 42 56 84 75 22 9 60.5 32.5 46.5 88.5 88.5 42.5 46.5 52.5 32.5 Solid state auto switch: D-M9B, D-M9N Stroke B Stroke E Auto switch operating

SYA3000/5000/7000

48.1 SYJA 51.6 38.1 2 x M5 x 0.8 (Pilot port) VZA 13.6 B VFA A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 19 2 x 4.2 (For manifold mounting) VFRA 42 VA (66) 2 x 4.2 (For mounting) (52) (5.5) 47.6 SYA7 20-02-F2) 3 4 5 (49.5) (42.5) 30 24.5 1/4 (A, B port) 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 2 40 (23.9) 18 30 24.5 EB P EA 2 x 2.2 die-cast

5 Port Air Operated Valve SYA3000/5000/7000 Series

SYA3000/5000/7000 Series Dimensions/SYA7000 Series: Body Ported 2 position single SYA7120(-F2) C8, N9 C10, N11 Foot bracket SYA7120-F1 C8, N9 C10, N11 57 87.5 46 M5 x 0.8 (Pilot port) 77.5 B 19.8 13.6 28 38 A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 19 2 x 4.2 (For manifold mounting) Manual override 2 x 4.2 (For mounting) 15 7 42 (66) 2 x 4.2 (For mounting)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

P(SUP) port 2-M5 X 0.8 External pilot port 20 20 37.4 66.5 20 16 20 (38) VQ4 The broken line indicate DIN rail mounted style [-D].

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Width across flats 16 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 Model A 40 ZPT40HJ25-01-A18 D 118.5 40 ZPT40HJ50-01-A18 42 98 153.5 B 42 C 63 Model A 63 ZPT63HJ25-01-A18 F 121.5 63 ZPT63HJ50-01-A18 65 14.5 156.5 B 65 C 14.5 D 26 26 26 28 28 28 E 66 101 137 68 103 139 Y 3.5 3.5 3.5 4.5 4.5 4.5 194.5 63 ZPT63HJ75-01-A18 65 14.5 192.5 40 ZPT40HJ75-01-A18 42 134 189.5 50 ZPT50HJ25-01-A18

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 3) 5 port base mounted without sub-plate: SYJA540 5-2-23 6 Series SYJA5000 Dimesions: Body Ported Dimensions: Base Mounted 2 position single: SYJA5140-01 2 position single: SYJA5120-M5(-F) 41.5 (For mounting) 2-4.3 M5 x 0.8 (Pilot port) 1 Manual override 15 5 11 A B A B 1 M5 x 0.8 (Pilot port) 10 24 A B 19 R P 2-2.6 2-3.5 4 37.5 (For mounting) (For manifold mounting) (Bracket) 47 42

AC

10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4

V

Model A L D Applicable Fitting Size d KQP-04 16 32 6 4mm KQP-03 16 32 6 5/32 KQP-06 18 35 8 6mm KQP-07 18 35 8 1/4 KQP-08 20.5 39 10 8mm KQP-09 20.5 39 10 5/16 KQP-10 22 43 12 10mm KQP-11 22 43 12 3/8 BRACKET ASSEMBLY NUMBER (IF ORDERED SEPARATELY) F1 Type SX3/5/7000-16-2A (With Mounting Screw) F2 Type SX3/5/7000-16-1A (With Mounting Screw) Courtesy of Steven Engineering, Inc. !

Speed Controller with Indicator

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSGl-M5 M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSGl-U10/32 10-32UNF VNote 4) V V V V V V AS2ll1FSGl-l01 1/8 V V V V V V V V V AS2ll1FSGl-l02 1/4 VNote 4) V V V VNote 4) VNote 4) V V V V R NPT Note 1) Sealant AS3ll1FSGl-l02 1/4 V V

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Body fixed/Rod side/Head side tapped type Model Screw size Max. tightening torque [Nm] Max. screw-in depth [mm] LEY25 M5 x 0.8 3.0 8 LEY32 M6 x 1.0 5.2 10 LEY63 M8 x 1.25 12.5 16 Rod side Head side Mounting Caution 1. When mounting workpieces or jigs to the piston rod end, hold the flats of the piston rod end with a wrench so that the piston rod does not rotate.

2–4

35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 14 8 80 41 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7 Compact Cylinder/Guide Rod Type Series CQM Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch Solid state switch D-A9 A B W D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

02 16 stations y SUP/EXH block assembly 2 stations Symbol Communication connector Number of outputs Specified layout Note 2) (Available up to 32 solenoids) Protocol Nil R Internal pilot External pilot 20 0 QA QB NA NB NC ND VA VB DA DB FA FB EA EB 20 stations Without SI unit 32 16 32 16 32 16 32 16 32 16 32 16 32 16 For 16-output SI unit DeviceNet M12 i Mounting Symbol 02 Stations Note 2