Air Cylinder Series MB

PLC Yes 12V PLC Terminal conduit 24V 2-wire 100V,200V Relay PLC DIN terminal Diagnostic indication (2-color display) Grommet 3-wire (NPN) 3-wire (PNP) 5V,12V 24V IC circuit Grommet 100V,200V 2-wire 12V IC circuit 3-wire (NPN) 2-wire 5V,12V Terminal conduit 12V Relay PLC 3-wire (NPN) 3-wire (PNP) Yes 5V,12V Diagnostic indication (2-color display) IC circuit 24V 2-wire 12V Water resistance

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V

Vacuum

Brackets l to 5v 0 to 5VDC 12VDC o tc I OVDC 100kPa t ' .

ZSE30/ISE30

(Panel mounting) With analog output High-precision resolution: 1/1000 In addition to the conventional voltage output type (1 to 5V) Current output type (4 to 20mA) is now available. Convenient when longer wiring is required Excellent noise resistance Variations Switches for vacuum and positive pressure can be easily distinguished.

F/ISE

4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 100kPa 1MPa 100kPa 1MPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Output voltage 1 to 5V

Vacuum

Brackets l to 5v 0 to 5VDC 12VDC o tc I OVDC 100kPa t ' .

C95Series

please see pg. 15 o.,noaas ~(2 ""\Of~) W ~ l00V, 200V ~ 24V 5V,12V 3---e{NPNJ tC circuit ~ , FIP 3-Yr11re(PNP) J51 1'" l 00V,2QOV 2-wire l ~ 12V 3liWe (NPN) I F&8W 5V,12V IC I' FS. 3'1'111"(1 (PNP) Circuit Relay * Lead Wlre lenglh C.5m ...

•

(PNP) /5V.12\ I Iy " (NP;;:'OO'I 5V A96 I e , '.. ,. 2-w". ~ ~ ~ Grommet ~ 1""' 100V ; Ott,",' ',Co 1'00" ',$ e 1~ ~2tJ1)' A54 iPle It.k 2-.,.,ire 24 V A64 e 1 =:, :' 12 V A33 .1 :, A34 1D'N te,,,na' A44 -1 , ,I G'omme, A59W e e lSm .

MY2

Lead wire length (m) Auto switch models Electrical entry direction Load voltage Special function Indicator light Wiring (output) Electrical entry Type Reed switch Solid state switch 0.5 (Nil) 3 (L) 5 (Z) Applicable loads DC AC Perpendicular In-line IC circuit 100V or less 5V 12V A90 A90V No Relay, PLC 24V 2-wire Grommet A93 A93V 100V 12V Yes 3-wire (NPN equiv.) 3-wire (NPN) 3-wire (PNP

Compact Cylinder with Air Cushion

IC circuit 5V A76H A96V A96 A72H A73H A72 A73 A73C 200V Grommet A93V A93 Reed switch Solid state switch Yes 100V 12V Relay, PLC 2-wire 24V Connector Diagnostic indication (2-color display) A79W Grommet F9NV F9PV F9BV F9NWV F9PWV F9BWV F9N F9P F9B F9NW F9PW F9BW F9BA F79 F7P J79 F79W F7PW J79W F7BA F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) IC circuit 5V, 12V 3-wire

RZQ

5V,12V 3-wire (PNP) 24V Yes Grommet 12V Water resistant (2-color indication) 2-wire With diagnostic output (2-color indication) Magnetic field resistant (2-color indication) 4-wire (NPN) 5V,12V IC circuit 2-wire Auto switches marked with a "" symbol are produced upon receipt of order.

RQ

PNP) Grommet 12V 2-wire Connector 3-wire (NPN) IC circuit Diagnostic indication (2-color indication) 5V, 12V 3-wire (PNP) Relay, PLC 24V 12V 2-wire Water resistance (2-color indication) Grommet 4-wire (NPN) With diagnostic output (2-color indication) 5V, 12V IC circuit F79F Solid state auto switches marked with a "" are produced upon receipt of order.

PF-OMN0009_C

F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] FLOW ( ) P POWER ( ) A 1-5V 1-5V , 4-20mA 90% Ka , () ,, ,, 10 L/min 10 L Sa Ta () Yu PVC -15No.PF-OMN0009CN-F IN(36)IN -16No.PF-OMN0009CN-F (PF3W504/520/540 ) (M44 ) 8 1.5 mm (41) (PF3W511 ) (M54 ) 2 mm (41) -17No.PF-OMN0009CN-F (PF3W504/520/540 ) ,(3.0,4 ) 8 0.50.7 Nm (41) , , 4 (PF3W511/521 ,(4.0,4 ) 1.01.2 Nm (41) ,, 4 -18No.PF-OMN0009CN-F

LFE-OMZ0012

When the analogue output is in the range 1 to 5V, it will vary between 1 to 5V according to the rate of flow. The same for analogue output of 4 to -20 mA. A Analogue output Applicable fluids The fluid(s) that the product can measure. Attachment The metal part of both sides of the product to which piping is connected.

RS2H-OM0045P

DC AC 0.5 1 3 5 () (M) (L) (Z) M9NV M9N IC 3 NPN 5V 3 PNP M9PV M9P 12V 2 12V M9BV M9B M9NWV M9NV IC 3 PNP M9PWV M9PW 3 NPN 5V 12V 2 2 12V M9BWV M9BW 24V M9NAV M9NA IC 3 PNP M9PAV M9PA PLC 3 NPN 5V 12V 2 2 12V M9BAV M9BA 2 2 P3DW 3 NPN A96V A96 IC 12V 100V A93V A93 2 24V 5V 100V A90V A90 IC PLC 12V 0.5m D-M9N M 1m D-M9NM L 3m D-M9NL Z 5m D-M9NZ 1 17 - 7-2. -1516

CEx-OMQ0013

N No. 6 7 8 9 1 0 0 0 0 2 1 0 0 0 3 0 1 0 0 4 1 1 0 0 5 0 0 1 0 6 1 0 1 0 7 0 1 1 0 8 1 1 1 0 9 0 0 0 1 10 1 0 0 1 11 0 1 0 1 12 1 1 0 1 13 0 0 1 1 14 1 0 1 1 15 0 1 1 1 16 1 1 1 1 0IN69 COM 1IN69 COM No.1 ON OFF 1 2 50msec 25 7-3-3 INPUT 13 +24V +5V /1 23412 +5V +24V IN 10mA COM 10mA 7-3-4 OUTPUT 4 +5V END DC +30V 50mA050 CEU2 NPN OUT Max DC +30V 50mA CEU2 COM CEU2P PNP OUT

CEx-OMQ0011

N No. 6 7 8 9 1 0 0 0 0 2 1 0 0 0 3 0 1 0 0 4 1 1 0 0 5 0 0 1 0 6 1 0 1 0 7 0 1 1 0 8 1 1 1 0 9 0 0 0 1 10 1 0 0 1 11 0 1 0 1 12 1 1 0 1 13 0 0 1 1 14 1 0 1 1 15 0 1 1 1 16 1 1 1 1 0IN69 COM 1IN69 COM No.1 ON OFF 1 2 50msec 34 9-3-3 INPUT 13 +24V +5V /12 3412 +5V +24V IN 10mA COM 10mA 9-3-4 OUTPUT 4 5V END DC +30V 50mA050 CEU2 NPN OUT Max DC +30V 50mA CEU2 COM CEU2P PNP OUT

MRQB-OM0002

Ta 10 STa(S 10) = & I Ta (Nm) I: & 2 = & (rad/s2) 2 t 5.2 5.3 22 5.4 P A F 1 1 = (1) P A F 2 2 = (2) 2 1 D 4 A = (3) ) d D ( 4 A 2 2 2 = (4) F=[N] F=[N] = A=[mm] A=[mm] D=[mm] d=[mm] P=[MPa] 5.6 () 5.7 () 5.5 23 6. 6. 6. 6. ,, , ,, 6-1. 6.1 (m) DC AC 0.5 3 5 (L) (Z) (N) 3 (NPN) F7NV F79 3 (PNP) 5V,12V F7PV F7P IC F7BV J79 2 12V J79C 24V 3 (NPN) F7NWV F79W PLC 3 (PNP) 5V,

CU

Special function Type Electrical entry Wiring (output) Indicator light Applicable load 0.5 (Nil) 3 (L) 5 (Z) DC AC Perpendicular In-line 5V 12V IC circuit 100V or less Reed switch Solid state switch A90 No A90V Relay PLC 2-wire 24V Grommet 12V A93 100V A93V Yes 3-wire (NPN equiv.) 3-wire (NPN) 3-wire (PNP) IC circuit 5V A96 A96V F9N F9NV IC circuit 5V 12V F9P F9PV 2-wire 12V F9B F9BV

CY1F

) IC circuit A96 A96V 5V F9N F9NV IC circuit 5V 12V F9P F9PV 12V 2-wire F9B F9BV Relay PLC Grommet Yes 24V 3-wire (NPN) 3-wire (PNP) F9NW F9NWV Diagnostic indication IC circuit 5V 12V F9PW F9PWV 2-color display 2-wire 12V F9BW F9BWV Lead wire length symbols 0.5m Nil (Example) F9NW 3m L F9NWL 5m Z F9NWZ Solid state switches marked with a "" symbol are produced upon receipt of order. 9