100 Pressure switch for vacuum with energy saving function Circuit diagram ZL6 -K2 B2 5 Z -E F ZL6 -K2 B2 5 Z With supply valve and release valve With pressure switch for vacuum with energy saving function ZL6 -K1 B1 5 Z ZL6 -K15L0Z-V W With supply valve With supply valve and vacuum pressure switch Specific Product Precautions 30 A ZL1/ZL3/ZL6 Series Specific Product Precautions 1 Be sure to
Screw-in Piping M5 X 0.8 Relieving port size 50 to 500mm/s Piston speed Mounting Basic, Axial foot, Front flange, Rear flange *Auto switch attachable Dimensions REC B/Basic H2 2-Rc(PT)P Width across flats B2 2-NN G G H1 Width across flats B1 Relieving port M5 X 0.8 Standard port I Relieving port 2-Eh8 D MM AL K A N N F lNA S+Stroke H F ZZ+Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA
95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA
Output data Offset Meaning MSB LSB MSB LSB (INT) 15 8 7 0 D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1 #A4 #A3 #A2 #A1 Slave 8 connection diagnosis 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 In the figure above, #A1 to #A3 are slaves for which the connection is diagnosed. In this case, #A3 slave is not connected, and a diagnostic error is generated.
(Piping specifications A2(L) and B2(L) are excluded.) ZSP PS Specifications ISA Model 500 kPa ZSE80(F) 1.5 MPa ISE80 PSE Withstand pressure Applicable fluid Fluids do not corrode stainless steel 316L IS Models other than above are the same specifications as standard.
Note: Be sure to take out the lead wire between the B2 and B3 terminals. Enlarged View WARNING Be sure to connect the regenerative resistor correctly. Do not short-circuit between B1/ and B2.
Note: Be sure to take out the lead wire between the B2 and B3 terminals. Enlarged View WARNING Be sure to connect the regenerative resistor correctly. Do not short-circuit between B1/ and B2.
B2 B3 1 Main circuit negative terminal L1C LAT 1 and 2 are connected at shipment. 2 LZ L2C Motor Connector * Accessory LC3F2 B1/ + Terminal name Function Details U Servo motor power (U) Connect to motor cable (U, V, W).
e C a u t i o n o f d i s a s s e m b l e D i s a s s e m b l i n g p r o c e d u r e A s s e m b l e p r o c e d u r e T r o u bl e s hoo t i n g Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.
CN1: . 21 6.1 . 21 6.2 . 21 6.3 . 22 (1) (C24V,M24V,0V) . 22 (2) (EMG) . 22 1 - (3) (BL RLS) . 22 6.4 . 23 1 . 23 2 . 24 3() . 25 7. CN5: . 26 7.1 . 26 7.2 . 26 7.3 . 27 8.
Pressure Control Equipment Industrial Filters #8 #9 $0 #7 #7 #7 Single acting (TL, TM) Double acting spring type (BL, BM) The numbers are the same as the "Construction" of the RS2H series catalog (CAT.ES20-216). Seal Kit List Description Material Note No. Replacement Parts: Seal Kit Kit no.
lehl ot 28,3i8 b 0.4536 Pouar w 0.7375 kw l.3al W.ighr g O.005il oz k9 2.2046 b ll.lUg np k9 Tlmparaluat qC 5A"F'32) Forca bt 453.6 bt 0,4536 bl ia.4lEa T!npar.hr! 'F-(1.8r"C)+32 Fo.c. gl 2.iDs r 'loi lbf kgf 2.2016 lbf N 0.2248 lbl sl kE N Flov..b SCFM x 2E.57Nltnin Flo{ r.b Numint0.035.SCFli Ke!
Indicator Switch (Option) Specification Wiring Diagram ISH NPN 3.8 to 30 VDC Max. 0.4 VDC Max. 11 mA Max. 20 mA AWG 24 3 m Blue (BL), Brown (BN), Black (BK) Code Output type Power supply voltage Output voltage Supply current Output current BN + BL Indicator switch Load BK Lead wire Cable length Color (Lead wire) Cable 1082
Avoi d carel ess di sassem bl y or rem oval of part s, as t hi s can l ead t o m al f unct i on.
lehl ot 28,3i8 b 0.4536 Pouar w 0.7375 kw l.3al W.ighr g O.005il oz k9 2.2046 b ll.lUg np k9 Tlmparaluat qC 5A"F'32) Forca bt 453.6 bt 0,4536 bl ia.4lEa T!npar.hr! 'F-(1.8r"C)+32 Fo.c. gl 2.iDs r 'loi lbf kgf 2.2016 lbf N 0.2248 lbl sl kE N Flov..b SCFM x 2E.57Nltnin Flo{ r.b Numint0.035.SCFli Ke!
D rai n w hi l e l i qui d l evel i s vi si bl e. D rai n pi pi ng: 5m or l ess N . C. auto drai n: 4 or m ore ( I . D . ) , 10 ( O . D . ) N . O . aut o drai n: 6. 5 or m ore ( I . D . ) , 10 ( O . D . ) AM G 850: 9 or m ore ( I .
Indicator Switch (Option) Specification Wiring Diagram ISH NPN 3.8 to 30 VDC Max. 0.4 VDC Max. 11 mA Max. 20 mA AWG 24 3 m Blue (BL), Brown (BN), Black (BK) Code Output type Power supply voltage Output voltage Supply current Output current BN + BL Indicator switch Load BK Lead wire Cable length Color (Lead wire) Cable 1082 Diaphragm Valve for Ultra High Purity Manually operated type (For
M14 x 1 Notice label Locking condition indication plate S + Stroke ZZ + Stroke Metal connector With rod boot + ZZ + 5/4 stroke Stroke range A B C BL C CC D D E EE E F FF GA GB GC GD GL H1 J K M AA AL BB Bore size (mm) Without rod boot With rod boot 40 50 63 80 100 25 to 850 25 to 700 45 30 71.5 22 60 42 20 44 22 16 21 11 32 10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 27 25 to 800 25 to 650
Basic type 7 (6 core twisted pair shielded wire) 4 x J M14 x 1 Notice label Locking condition indication plate S + Stroke ZZ + Stroke Metal connector With rod boot ZZ + 5/4 stroke h + l (mm) Bore size (mm) Stroke range B C A AA AL BB BL C CC DD D EF EE E F FF GA GB GC GD GL H1 J K M Without rod boot With rod boot 40 50 63 80 100 25 to 850 25 to 700 30 45 27 71.5 22 60 42 20 44 22 16 21 11.5
, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 1.08 0.32 0.38 0.38 0.73 Double knuckle Accessory bracket 0.19 0.05 0.05 0.05 0.14 Knuckle pin 10-12-49 7 Series CE2 Dimensions: 40 to 100 RC 1/4 Pressurized locking port RC P Rod side cylinder port RC P Head side cylinder port Basic style RC 1/4 Unlocking port Unlocked when pressurized 7 (6 core twisted pair shielded wire) Width across flat BL