24

200 300 39 77 117 167 28 3 3.5 M6 x 1.0 12 17 25 37.5 13.5 30 26 78 38 91 64 82 50 44 120 200 300 39 77 117 167 34 4 4.5 M6 x 1.0 12 17 MGPM (Slide bearing)/A, DB, E Dimensions MGPL (Ball bushing) MGPA (High precision ball bushing)/A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E Bore size [mm] A DB E 25 to 100 st 125 to 200 st 250 st or more 25 to 100 st 125 to 200 st 250 st or more

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

voltage suppressor Grommet Grommet terminal (E) (Standard) Non-locking push type (Flush) 100 VAC, 50/60 Hz VFS1000 (P .1114) 1.8 1.8 SV Grommet terminal (EZ) Conduit terminal (TZ) DIN terminal (DZ) 200 VAC, 50/60 Hz 24 VDC Body Ported 2 position double SYJ Non-locking push type (Extended) With surge voltage suppressor 3 position closed center (Option) VFS2000 (P .1122) SZ 3.4 3.4 110 to 120

VFS

Only surge voltage suppressor can be equipped on the middle of lead wire. 110 to 120 VAC, 50/60 Hz Locking type (Tool required) VFS 3 position exhaust center 220 VAC, 50/60 Hz 240 VAC, 50/60 Hz 12 VDC 100 VDC VS4 Locking type VFS3000 3 position pressure center 6.8 6.5 (Lever) VQ7 Locking type (lever) is not available for body ported Series VFS2000/3000.

0.4

Dust-protected SI unit: L5 = 10.5n + 97, L6 = L3 + 25, L7 = L4 + 25 Formula L1 = 10.5n + 44.5, L2 = 10.5n + 72.5 n: Station (Maximum 16 stations) 2 L n Dimensions 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 65.5 76 86.5 97 107.5 118 128.5 139 149.5 160 170.5 181 191.5 202 212.5 93.5 104 114.5 125 135.5 146 156.5 167 177.5 188 198.5 209 219.5 230 240.5 125 125 137.5 150 162.5 175 187.5

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Scale: 35% For 45PG (20 pins) For 45PH (10 pins) 2 123 112.5 91.5 15.5 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 210.5 200 175.5 17.5 198 187.5 165 16.5 185.5 175 154.5 15.5 173 162.5 144 14.5 160.5 150 133.5 13.5 148 137.5 123 12.5 148 137.5 112.5 17.5 135.5 125 102 16.5 SS5Y3-45PUStations B-Q (26 pins) C4 C6 Stations n L1 L2 L3 L4 2 135.5 125 108 13.5 3 4 5 6 7 8 9 10 148 137.5 118.5 14.5

Table of Contents

Series ZPT/ZPX Vacuum Pad: Large Size Bellows Type 40, 50, 63, 80, 100, 125 .

Pin Clamp Cylinders

125 126 127 128 129 130 135 136 137 138 139 140 145 146 147 148 149 150 Guide pin diameter [mm] 11.5 11.6 11.7 11.8 11.9 12.0 12.5 12.6 12.7 12.8 12.9 13.0 13.5 13.6 13.7 13.8 13.9 14.0 14.5 14.6 14.7 14.8 14.9 15.0 Applicable hole diameter of workpiece [mm] For 12 For 13 For 14 For 15 Guide pin shape Round type/Diamond type Symbol 155 156 157 158 159 160 175 176 177 178 179 180 195 196

CL

Bore size (mm) 100 125 140 160 Kit no.

CG1

to 125st 126 to 200st Bore (mm) 20 25 32 40 ZZ 135 ZZ ZZ 160 ZZ 185 LS 70 70 70 76 LS 95 95 95 101 LS 120 120 120 126 145 145 151 140.5 165.5 190.5 215.5 142.5 160 167.5 185 192.5 210 217.5 235 1-7-24 Standard: Single Acting Spring Return/Extend Series CG1 With Mounting Bracket Front flange/CG1FN (mm) Bore size (mm) Stroke range (mm) B E F FX FD FT 20 25 32 40 Up to 125 6 5.5 28 2 12 40

MG

M5 x 0.8 56 10 38 5 44 110 27 60 105 200 28 70 30 3 81 3.5 54 M6 x 1.0 72 12 44 17 44 120 300 39 77 117 167 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 200 34 78 38 4 91 4.5 64 M6 x 1.0 82 12 50 17 44 120 300 39 77 117 167 MGPM (Slide bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 50 st 25 st 75 to 100 st 75 to 100 st 125 to 200 st 250 st or more 125 to 200 st

JIS Standard Hydraulic Cylinder

4) 2 (n 4) 2 (n 4) 2 15 + 55 120 + 55 135 + 55 140 + 55 120 + 55 150 + 55 n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 125 140 150 2 (Different surfaces), 1 130 160 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 125 + 55 140 + 55 150 + 55 130 + 55 160 +

Guide Cylinder Series MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

135.5 146 156.5 167 177.5 188 198.5 209 219.5 230 240.5 125 125 137.5 150 162.5 175 187.5 187.5 200 212.5 225 237.5 250 250 262.5 135.5 135.5 148 160.5 173 185.5 198 198 210.5 223 235.5 248 260.5 260.5 273 553 Plug-in Unit Base Mounted VQ1000/2000 1021The dashed lines indicate DIN rail mounting [-D] (with DIN rail mounting bracket).

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

135.5 146 156.5 167 177.5 188 198.5 209 219.5 230 240.5 125 125 137.5 150 162.5 175 187.5 187.5 200 212.5 225 237.5 250 250 262.5 135.5 135.5 148 160.5 173 185.5 198 198 210.5 223 235.5 248 260.5 260.5 273 553 Plug-in Unit Base Mounted VQ1000/2000 1021The dashed lines indicate DIN rail mounting [-D] (with DIN rail mounting bracket).

C95

115 110 85 70 60 25 1 15 2 (On different faces or same face) 15 120 115 110 85 70 60 25 D-F5/J5 1 10 2 (On different faces or same face) 15 130 125 120 95 75 70 25 D-F5NTL 1 10 D-F5 W D-J59W D-F5BAL D-F5 F D-F5LF 2 (On different faces or same face) 15 130 125 120 90 75 70 25 10 1 Auto Switch Mounting Position and Mounting Height Reed switch Solid state switch Auto Switch Mounting Position

AC Servo Motor Driver (Pulse input type/Positioning type ）

G3-G4 contact specifications Maximum voltage: 120 V AC/DC Maximum current: 0.5 A/4.8 V DC Maximum capacity: 2.4 VA 11 12 11.

IIIIIIIIII

CURRENT RATING LISTED IN CATALOG UL/CSA RATING 15A 15.1 Amps and 1/2 HP, 125 or 250 VAC. 1.2 Amp, 125 VDC; 1/4 Amp, 250 VDC 5 Amps, 120 VAC "L" (lamp load) 10A 10 Amps and 1/4 HP, 125 or 250 VAC. 1/2 Amp, 125 VDC; 1/4 Amp, 250 VDC 3 Amps, 125 VAC "L" (lamp load) 4A 4 Amps, 250 VAC 1/10 HP, 125 VAC 3A 3 Amps, 125, 250, 277 VAC 1/10 HP, 250 VAC Gold Option .1 Amp, 125 VAC MATERIAL APPROVALS

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 250mm, First Stroke: 120mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: L (Foot), Bore Size: 32mm, Thread: Rc, Full Stroke: 250mm, First Stroke: 120mm

Dual Rod Cylinder Series CXSJ/CXS

Standard Stroke (mm) Symbol Specifications Model Standard stroke Long stroke CXS6 CXS10 CXS15 CXS20 CXS25 CXS32 Heat resistant cylinder (10 to 150C) -XB6 60, 70, 75, 80, 90, 100 10, 20, 30, 40, 50 Low speed cylinder (10 to 50 mm/s) -XB9 80, 90, 100, 110, 120, 125, 150 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75 Long stroke type -XB11 110, 120, 125, 150 Low speed cylinder (5 to 50 mm/s)