Compact 5-Port Solenoid Valve

CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 100 125 140 CS1 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 1000 mm 160 180 200 0 100 200 300 400 500 600 700 800 900 1000 Average speed [mm/s] ZK2 Combination Manifold Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions * Values at extension of a directly coupled cylinder when meter-out speed

100

MPa Supply pressure: 0.35 MPa 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply

REA/REB

, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

REA/REB

, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

Cylinder with Lock Series CNS

CL1 200 MLGC CNG 100 500 400 300 200 100 100 500 400 300 200 100 MNB Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNA Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 2000 600 CNS 500 160 160 CLS 140 400 1000 140 700 800 900 CLQ 125 320 Load mass: m (kg) Load mass: m (kg) 125 300 RLQ 600 500 MLU 400 200 300 MLGP ML1C 200 280 100 100 100 500 400 300 200 100 500 400 300 200

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

CDA2 B 50 200 X1184 B31J S With built-in special magnet Number of auto switches Cylinder stroke Description 2 pcs. 1 pc.

Sine Rodless Cylinder Series REA/REB

Number of axes 10 150, 200, 300 Symbol Specifications 150, 200, 300, 400, 500 15 750 1 axis XB10 Intermediate stroke (Using exclusive body) 200, 300, 400, 500, 600 20 1000 X168 Helical insert thread specifications 200, 300, 400, 500, 600, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Stroke exceeding the standard stroke will be available upon request for special

24

Selection conditions Mounting: Vertical Bearing type: Ball bushing Stroke: 30 stroke Maximum speed: 200 mm/s Load mass: 3 kg Eccentric distance: 90 mm Find the point of intersection for the load mass of 3 kg and the eccentric distance of 90 mm on graph (5), based on vertical mounting, ball bushing, 30 stroke, and the speed of 200 mm/s.

Modular Design with Uniform Body Style

80 AC50-D/AC60-D Model E F G H Applicable size VHS20-D 28 42 17.5 40 AC20-D VHS30-D 38 53 20 53 AC30-D VHS40-D 52 71 29 70 AC40-D VHS40-06-D 52 71 29 70 AC40-06-D VHS50-D 72 90 33 90 AC50-D/AC60-D Caution on Mounting Use an air filter on the inlet side for operating protection.

Compact manifold regulator ARM5 Series

Stations L2 dimension IN IN IN 35 1 2 3 4 5 6 7 8 9 M VVQ1000-90-7 98 17 16 VVQ1000-90-8 110.5 VVQ1000-90-9 123 IN side OUT side VVQ1000-90-11 148 Fitting size VVQ1000-90-12 160.5 Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y VVQ1000-90-13 173 4, 5/32 VVQ1000-90-14 185.5 2.5 6 11 37.5 6 VVQ1000-90-15 198 3 12.5 19 37.5 3 6.5 11 38 1/4 VVQ1000-90-16 210.5 3 12.5 19

Environment

: 2000 mm/s2 90 50 Lead 4: LEY32C 80 Lead 4: LEY32C 40 43 Horizontal work load [kg] 70 Vertical work load [kg] Lead 8: LEY32B 60 30 40 45 50 Lead 8: LEY32B 22 Lead 16: LEY32A 20 30 11 20 10 Lead 16: LEY32A 10 0 0 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY40m LEY40m for acceleration/deceleration: 2000 mm/s2 100 60 Lead 4: LEY40C Lead 4: LEY40C 90 53 Horizontal

7

Special electrical entry direction With bracket/Special electrical entry direction VXD2 to VXD2 3 A 6 D VXD2 to VXD2 3 A 6 D VXD2 to VXD2 7 E 9 G 90 Symbol Symbol Standard 180 90 180 90 90 A IN OUT Nil B IN OUT OUT IN IN OUT 180 180 180 180 270 90 270 90 B IN OUT IN OUT A C IN OUT IN OUT 270 270 270 270 1 Available for the VXD23 A to 26 D. 2 Bracket is attached as standard with the resin

Table of Contents

Weight (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 90 270 180 90 270 180 180 270 180 270 180 90 270 Rotating angle Single vane Double vane 469 47.1 263 140 142 143 72 47.5 258 255 491 480 72 73 47 Body of rotary actuator Auto switch unit + 2 switches 30 50 60 46.5 30 Angle adjuster 30 90 150 203 47 90 100 90 100 90 90 100 90 100 100 Rotating angle 158 308

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Power supply connector, communication connector Power supply connector Operating temperature range [C] 0 to 40 (No freezing) Operating humidity range [%RH] 90 or less (No condensation) Storage temperature range [C] -10 to 60 (No freezing) Storage humidity range [%RH] 90 or less (No condensation) Weight [g] 200 (Screw mounting), 220 (DIN rail mounting) Note 1) Please note that the version

5 Port Solenoid Valve Series SV1000/2000/3000/4000

CM2 20 10% 30% 50% 70% 150 Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed

Programless Controller Series LECP1

VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and

Step Motor Controller

VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and

Auto Switch Guide

CS1 Auto Switch Internal Circuit C76 D-90 C85 OUT () Weight OUT () Brown Contact protection box CD-P11 CD-P12 Reed switch C95 (g) CP95 OUT ( ) D-90 D-97 Auto switch model OUT ( ) Blue Black line 5 5 0.5 NCM Lead wire length (m) 23 23 3 D-97 37 37 5 Contact protection box CD-P12 NCA Choke coil OUT (+) Brown DDimensions OUT (+) Reed switch Zener diode Zener diode -X D-90 OUT () OUT () Blue

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

8, ) Note 1) 1 10 90 100 110 2 Different surfaces 20 90 100 110 Same surface 75 Different surfaces (n = 2, 4, 6, 8, ) Note 1) 20 + 50 (n 2) 2 (n = 4, 8, 12, 16, ) Note 2) 90 + 50 (n 4) 2 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) D-B59W n Same surface 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 50 (n

Vacuum Ejector Series ZM

setting (ZSE1) 2 outputs, without analog output, 3 rotation setting (ZSE1) 2 outputs, without analog output, 200 setting (ZSE1) 1 output, analog output, 3 rotation setting (ZSE1) 1 output, analog output, 200 setting (ZSE1) 1 output, without analog output, 200 setting, PNP output (ZSE1) Note) When the product is used for the manifold, the exhaust air of the operating ejector may enter the