Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01 (Lead H: 0.02) Lost motion [mm]*2 0.05 Lead [mm] 20 12 6 24 16 8 30

LEF-OM006xx

100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200,

Smooth Cylinder/Low Speed Cylinder

31 16.5 40 6 5.5 M10 x 1.25 17 29 M5 x 0.8 depth 7.5 19.5 2 22 10 14 8 Up to 300 38 20 40 6 5.5 M10 x 1.25 17 35.5 M5 x 0.8 depth 8 19.5 2 22 12 18 10 Up to 300 47 26 50 8 6 M14 x 1.5 19 44 M6 x 1 depth 12 27 2 30 16 25 14 Up to 300 58 32 58 11 7 M18 x 1.5 27 55 M8 x 1.25 depth 16 32 2 35 20 30 18 Up to 300 72 38 58 11 7 M18 x 1.5 27 69 M10 x 1.5 depth 16 32 2 35 20 32 18 Up to 300 89 50

VDW

Series 2 3 200 Nil Option 300 None F Foot bracket C.O. Valve type Note) The foot bracket is packed with a valve.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

MY1

400 500 1000 1500 0.05 0.5 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Technical Data Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 1349 Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1W Series 16, 20, 25, 32, 40, 50, 63 How to Order MY1 M W K 300

Cylinder with Lock

Chart (1) 400 st 500 st 600 st 700 st 400 st 500 st 600 st 700 st 10 5 4 300 st 300 st 3 200 st 200 st Load movement time: t (S) 2.

Electric Grippers

force (N) Size 16 25 32 40 16 25 32 40 141 452 707 1058 Up to 300 Up to 400 Up to 500 Up to 500 Up to 200 Up to 300 Up to 300 Up to 300 141 452 707 1058 AC Servo Motor Basic type Series LEY In-line motor type Guide rod type Series LEYG Guide rod type /In-line motor type Series LEYD Series LEYGD Dust/Drip proof compatible Dust/Drip proof compatible Series LEY Series LEY Series LEYG Series

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

CNA

(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P

C95

Standard stroke (mm) 50/100/150/200/250/300 Max. possible stroke (mm) 300 *different in % related to full span.

CNA

MXS 50 50 50 40 40 40 80 80 80 100 100 63 63 63 MXQ Load weight m(kg) Load weight m(kg) 50 50 50 40 40 40 50 40 30 50 40 30 MXF 20 20 [Example] MXW 10 10 MXP 5 4 3 5 4 3 MG 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 MGP Max. speed V(mm/s) Max. speed V(mm/s) MGQ Graph m Graph v 0.5MPa P 0.5MPa P MGG 1000 1000 100 100 100 80 80 80 MGC 500 400 300 500 400 300 63 63 63

Compact Cylinder Series NCQ8

175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-

LX

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

MNB

1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 32 50 40 Load weight: m(kg) Load weight: m(kg) 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V(mm /s) Maximum speed: V(mm/s) 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA SOUTH KOREA SMC Pneumatics Korea Co., Ltd.

Table of Contents

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

LX

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

Manifold Specifications

EVS (Pitch) Manual override (Non-locking) VFN M5 x 0.8 (PE port) 4-4.5 Mounting hole 2-Rc 1/8 (1(P) port) (4(A), 2(B) port) 300 (Lead wire length) (Pitch) (5(R1), 3(R2) port) (mm) Stations 2 3 50 40 66 56 20 338 328 L1 L2 4 82 72 5 98 88 6 114 104 7 130 120 8 146 136 9 162 152 10 178 168 11 194 184 12 210 200 13 226 216 14 242 232 15 258 248 16 274 264 17 290 280 18 306 296 19 322 312 3-3

LEY-OM007

30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20