CRQ2

Symbol :: C14 Symbol: C15 Symbol: C16 MRQ The rotation angle can be adjusted between 90 to 190. The rotation angle can be adjusted between 0 to 100. The rotation angle can be adjusted between 0 to 100.

KJ

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Refer to page 100 for part numbers. 85

V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

Compact Cylinder with Lock Series CLQ

L 85 100 125 75 -25D -25D x 90 L x 105 L x 130 L x 80 L 90 105 130 80 8.5 CLQ -30D -30D x 95 L x 110 L x 135 L x 85 L 95 110 135 85 -35D -35D 8.5 15.5 16.5 x 100 L x 115 L x 140 L x 90 L 100 115 140 90 RLQ -40D -40D x 105 L x 120 L x 145 L x 95 L 105 120 145 95 -45D -45D x 110 L x 125 L x 150 L x 100 L 110 125 150 100 MLU -50D -50D x 115 L x 130 L x 155 L x 105 L 115 130 155 105 -75D -75D

CRB1/Size: 10, 15, 20, 30

Inner Volume Vane style (cm3) Double vane Single vane CRB1BW15-lS CRB1BW20-lS CRB1BW30-lS CRB1BW10-lD CRB1BW15-lD CRB1BW20-lD CRB1BW30-lD CRB1BW10-lS Model Rotation angle 90 180 270 90 180 270 180 270 180 270 90 100 90 100 90 100 90 100 90 90 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) Inner volume 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 The values in ( ) indicate the

MY1

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

Cylinder with Lock

2 (Different surfaces) 60 65 75 80 85 2 (Same surface) 90 95 100 105 110 D-G39 D-K39 D-A3 n (Different surfaces) 60 + 30 (n 2) (n = 2, 4, 6, 8)1 65 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)1 95 + 100 (n 2) (n = 2, 4, 6, 8)1 100 + 100 (n 2) (n = 2, 4,

Table of Contents

VAC, 100 VDC or less.

Free Mount Cylinder Series CU

, 100 Mass/( ): Denotes the values with D-A93.

Free Mount Cylinder

, 100 Weight/( ): Denotes the values with D-A93.

4/5 Port Solenoid Valve

) 188(108) 187(107) 222(142) 166(86) 180(100) 165(85) 178(98) 0.45 0.57 0.37 0.71 2.3 2.8 2 position 0.36 0.48 0.48 0.35 0.46 0.57 1.9 1.2 3.3[0.85] 2.1 3.4[1.3] 2.1 1/8 1/8 10-SYJ743--01 198(118) 232(152) 190(110) 188(108) 0.36[0.57] 0.45 0.86[0.41] 0.56 3 position 0.43[0.54] 0.78[0.25] 170(90) 188(108) 187(107) 222(142) 166(86) 180(100) 165(85) 178(98) 0.41 0.61 0.35 0.74 2.3 2.9 2 position

ISO Standard Hydraulic Cylinder

32 40 50 63 80 100 Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100.

Cylinder with Lock Series CNS

Different surfaces, Same surface) 1 110 115 105 15 15 + 40 (n 2) 2 (n = 4, 8, 12, 16 ) 105 + 40 (n 4) 2 110 + 40 (n 4) 2 115 + 40 (n 4) 2 n (n = 2, 4, 6, 8 ) (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) 2 (Different surfaces, Same surface) 1 95 100 90 10 D-Y69 D-Y7PV D-Y7WV 10 + 30 (n 2) 2 (n = 4, 8, 12, 16 ) 90 + 30 (n 4) 2 95 + 30 (n 4) 2 100 + 30 (n 4) 2 n (n = 4, 8, 12, 16 ) (n = 4

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

MK(2) Resistance RS Q G Adjustment dial RS H A RZQ Adjustment dial rotation angle MI W S 90 CEP1 Stopper direction can be changed within 90 CE1 CE2 The stopper lever can be rotated 90.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85 80 75 70 65 100 105 115 125 130 95 104 55 99 94 45 89 109 114 119 124 129 139 149 154 159 169 179 25 35 45 95 90 85 80 75 70 105 110 120 130 135 140 150 160 100 8-29-8 9 Dual Rod Cylinder: Basic Type Series CXS

5-Port Solenoid Valve

Applicable connector: 10 pins MIL type with strain relief (Conforming to MIL-C-83503) Applicable connector: 20 pins MIL type with strain relief (Conforming to MIL-C-83503) n: Stations 2 3 4 5 6 7 8 9 10 11 12 L1 84 100 116 132 148 164 180 196 212 228 244 L2 74 90 106 122 138 154 170 186 202 218 234 L3 110.5 135.5 148 160.5 173 198 210.5 223 248 260.5 273 L4 100 125 137.5 150 162.5 187.5 200

100

: 0.35 MPa/0.37 MPa (With valve) ZL6H (04P) Supply pressure: 0.5 MPa/0.52 MPa (With valve) 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL6H ZL6H04P ZL6M ZL6M04P Suction flow rate [L/min (ANR)] 200 100 400 300 600 500 700 0 Suction flow rate [L/min (ANR)] 200 100 400 300 600 500 700 0 Time to Reach Vacuum (Representative value

Modular Design with Uniform Body Style

50 200 Flow rate [L/min (ANR)] 0 50 100 Flow rate [L/min (ANR)] AFM30-D AFD30-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.3 MPa 0.01 0.01 P1 = 0.7 MPa P1 = 0.7 MPa 0 0 0 100 200 500 400 300 600 0 150 100 50 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-D AFD40-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.