Proposals for Energy Saving

12VDC 240VAC, 50/60Hz Other (32A) 1 1/4 (40A) 1 1/2 2 (50A) 2 4 5 6 5 7 9 Optional How to Order Pilot Valve Assemblies 00 VT3113 G 1 Electrical entry Rated coil voltage 1 100VAC, 50/60Hz 200VAC, 50/60Hz 110VAC, 50/60Hz 220VAC, 50/60Hz 24VDC 12VDC 240VAC, 50/60Hz Other 1 2 3 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light Conduit terminal with surge voltage

5-Port Solenoid Valve

V V N7 1/4" V V N9 5/16" V V N11 3/8" V Fixed SS5Y3-50S5-05D-C6 1 set (Type 50 5-station manifold base part no.)

Table of Contents

to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Standard performance 15 Inlet air flow rate (l/min (ANR)) (4) 56 111 222 335 560 830 1110 665 28 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Electric Slide Tables

, 75 Basic type/ R Type 1 0.25 20 to 400 8 3 3 10 to 200 5 Step motor (Servo/24 VDC) 30, 50 75, 100 Series LECP1 LES16 3 1.5 20 to 400 10 5 5 10 to 200 8 30, 50, 75 100, 125, 150 Series LECPA LES25 Symmetrical type/L Type 5 2.5 20 to 400 16 Page 1 30, 50, 75 1 1 4 10 to 200 LES8A 1 0.5 8 20 to 400 3 3 5 10 to 200 Servo motor (24 VDC) 30, 50 75, 100 Series LECA6 LES16A 3 1.5 10 20 to 400 5

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VFR 3 position exhaust center Coil rated voltage Electrical entry 4 1 2 3 4 5 6 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 7 240 VAC, 50/60 Hz Other VQ7 G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 3 position pressure center 5 3 position double check 9 6 Option How to Order Pilot Valve Assembly SF4 DZ 1 20 Manual

Electric Actuator

, 75 30, 50 75, 100 30, 50, 75 100, 125, 150 50, 75 50, 100 50, 100 150 16 3 25 9 25 5 Miniature Rotary Table Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Rod type Slide table type Series LEPS Basic type Series LER High precision type Series LEPY Series LERH CAT.ES100-94 CAT.ES100-92 Series LER Series LEPY Series LEPS Max. speed (n/s) Rotating torque (Nm) Size Size Max. work load (

Air Cylinder

50 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) MB MB1 D-H7 D-H7W D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CA2 CS1 D-H7C D-C73C D-C80C 5 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) CS2 D-G5 D-K59 D-B5 D-B64 5 15 75 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 75 + 55 (n 2) (n = 2, 3, 4,

VFS

pilot External pilot Nil Option How to Order Pilot Valve Assembly Option SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option Refer to page 3-8-5 for voltage conversion. 3-8-100 101 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS6000 Cylinder

Free Mount Cylinder

25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 4 9 9 13.5 2 4.5 4.5 4.5 3.5 5 5 5 With auto switch S Without auto switch Bore size (mm) 5 st 38 41 45 41 45 47 S Z Z 10 st 43 46 50 46 50 52 15 st 48 56 60 56 60 62 5 st 56 62 66 65 73 79 10 st 66 72 76 75 83 89 15 st 76 87 91 90 98 104 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Compact Cylinder Series CQS

M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 12.5 12.5 14 16 7 7 10 10 4 4 7 7 0.5 0.5 1 1 5 to 30 5 to 30 5 to 50 5 to 50 Note 1) For basic style 20 and 25 with 5 stroke, through-hole is threaded over the entire length.

Basic type / Direct mount type Series CY3B/CY3R

CY3B15 CY3B50 1000 500 50 40 30 20 300 200 10 5 100 Usable range Usable range 20 30 40 50 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B63 CY3B20 200 1000 100 500 400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder

Electric Actuator with Integrated Guide

The tables above show the definition for each symbol only and cannot be used for actual model selection. 1 5 Standard Motor Series LTF6 Motor Output Ground Ball Screw 100W 10mm/6mm lead Horizontal Mount How to Order Stroke LTF6E PF 1 R 2 Motor/switch entry direction Left entry Power supply voltage Cable length 1 2 100V/110V AC(50/60Hz) 200V/220V AC(50/60Hz) 2 3 4 5 2m 3m 4m 5m Motor/switch

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

P)(EB) 5 1 3 3 2 1 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz VQC 3 position closed center 110 to 120 VAC, 50/60 Hz (B) (A) 4 2 4 220 VAC, 50/60 Hz VQZ 5 6 24 VDC 12 VDC 3 SQ (EA)(P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center VFS Option (B) (A) 4 2 4 VFR (EA)(P)(EB) 5 1 3 VQ7 3 position pressure center (B) (A) 4 2 5 (EA)(P)(EB) 5 1 3 How to Order Pilot Valve Assembly SF4

ZP

5 10 102.5 52.5 16.5 20 112.5 62.5 (Rotating angle) 40 19.5 13.5 50 40, 50 50 12 30 122.5 72.5 50 167.5 92.5 75 Vacuum inlet: One-touch fitting Applicable tubing O.D.

CATALOG VC10

Burst Pressure: Series 20, 30, 50 5000 PSI Series 70 4000 PSI Leakage: Bubble tight for standard valves Vacuum: To 5 Microns Consult factory .88 .44 (11.2) (22.4) ADD .165 (4.2) FOR SPADE TERMINAL COIL OPTION * ELECTRICAL CHARACTERISTICS Coil Voltage: Series 20 5 to 825 VAC 50-60 HZ. 1.8 to 265V DC Series 30 5.2 to 650 VAC 50-60 HZ. 2 to 240V DC Series 50 5.4 to 575 VAC 50-60 HZ. 3.0 to

TABLE OF CONTENTS

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS COAST PNEUMATICS 8055 E.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 50 100 20 30 40 50 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance from cylinder

CA2

1 Air Cylinder Series CA2 40, 50, 63, 80, 100 CJ1 CJP 4 1 CJ2 Able to absorb 30% more kinetic energy at the maximum. 5 to 15% reduction in weight By the adoption of die-cast cover, this model is 5 to 15% lighter than Series CA1.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) 7 5 5 5 3 7.5 5 3 5 3 90 90 5 90 5 A MHZ 20 20 20 20 (3 x SA) 20 20 MHF Section SD SD MHL MHSJ3-63D MHSJ3-80D MHR MHK 4 MHS 10 4 11 MHC 3 5 3 5 90 90 MHT 5 MHY 20 20 20 20 MHW -X (mm) L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5