Multistage Ejector Series ZL112/212 1

Air consumption (l/min (ANR)) 2 stage performance ZH 3 stage performance ZL112 100 200 ZL212 63 126 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Suction flow rate 250% suction flow rateincrease ZL Series ZL212 ZY ZQ Diffusers stacked and integrated Compact

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

164.5 170 180 230 251 15 15 15 20 22 22 8 3 , , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

LEKF-OMZ0035

-V 200 to 230 Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -10- 2.3 Construction LEKFS Motor : In-line (AC servo motor) Component Parts No.

Profile Design ISO/VDMA Air Cylinder Series CP95

Bore stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 700 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 800 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600, 700, 800 1400 100 25, 50, 80, 100, 125, 160, 200,

Stability of suction position,

structure and materials Pad diameter: 63, 80 Compared with the ZP series ( ) * The pad material when weight was measured is NBR. 8 16.4 ZP (Current model) ZP3E ZP2/Flat type ZP3E/Flat type with groove Pad diameter Suction port Area [mm2] Suction port Area [mm2] 32 8.4 55.4 40 6 28.3 50 63 8 50.2 16.4 211 80 100 10 78.52 125 Pad diameter Weight [g] Weight [g] 32 56 40 91 57 50 110 75 63 230

Mechanical Valves Series NVM, NVFM, NVZNI

F O F ' 14 33 lbs (6 5 kg) T T 1 2 " '75 PSIG (5 Kgf/cm2) A B c D E F G H J K il 6.97 (1771 6.26 (159) 5.98 (1521 2.13 154) 2.91 (74\ 2.O9 (53) 2.76 (70) 0.63 (16) (1e) 0.75 0.43 ( 1 1 ) 1.24 131.5 Millimeters in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM NVM220-N02-01 230-N02-01 230-N02-02 F O F , I 529 lbs (2+kg) F O F 4,85 lbs (2 2ko ) P T 2 7 6 i n ( 7 m m ) O T 0 197 in (smm

IIIIIII

F O F ' 14 33 lbs (6 5 kg) T T 1 2 " '75 PSIG (5 Kgf/cm2) A B c D E F G H J K il 6.97 (1771 6.26 (159) 5.98 (1521 2.13 154) 2.91 (74\ 2.O9 (53) 2.76 (70) 0.63 (16) (1e) 0.75 0.43 ( 1 1 ) 1.24 131.5 Millimeters in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM NVM220-N02-01 230-N02-01 230-N02-02 F O F , I 529 lbs (2+kg) F O F 4,85 lbs (2 2ko ) P T 2 7 6 i n ( 7 m m ) O T 0 197 in (smm

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Caution Particulate Generation Characteristics Caution 1. A sine cushion (smooth start-up, soft stop) function is included in the standard specifications.

CS1

300 to 1000 0.2 Stroke 164 234 110 159 227 75 40 133 182 250 159 227 182 250 98 Lube Non-lube Air-hydro Lube Non-lube Air-hydro to 1000 0.2 Stroke 184 262 110 159 227 75 40 133 182 250 159 227 182 250 98 to 1200 0.2 Stroke 204 292 120 173 248 75 40 141 194 269 106 173 194 269 248 to 1200 Lube Non-lube 0.2 Stroke 228 326 135 272 85 45 153 290 115 294 276 190.5 208.5 192.5 210.5 Lube Non-lube

HRX-OM-Q026

/300-A-20. 8-1 8.1.2 HRSH100/150/200/250/300-A-40. 8-2 8.1.3 HRSH100/150/200/250-W-20. 8-3 HRSH Series HRX-OM-Q026 Contents 8.1.4 HRSH100/150/200/250-W-40. 8-4 8.1.5 Option T High head temp . 8-5 8.1.6 Refrigerant with GWP reference . 8-6 8.1.7 Communication specifications . 8-6 8.2 Dimensions . 8-7 8.2.1 HRSH100-A-20/40. 8-7 8.2.2 HRSH150-A-20/40-, HRSH200-A-20/40. 8-8 8.2.3 HRSH250/300-

KJ

K M H D Plug Insertion Force in Pressurized Condition MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Insertion Force of Series KK T 350 300 VMG 250 Insertion force N Series KK6 200 Series KK4 150 100 Series KK3 Series KK2 50 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8

V

(L3) 125 125 137.5 150 16+2.5 175 187.5 187.5 200 212.5 225 237.5 250 250 262.5 (L4) 135.5 135.5 148 160.5 173 185.5 198 198 210.5 223 235.5 248 260.5 260.5 273 Stations are counted from the D side Courtesy of Steven Engineering, Inc. !

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage.

VM

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25

LEF-OM002xx

24 to 930 16 to 620 8 to 310 Stroke Speed range 701800 20 to 550 12 to 330 6 to 180 24 to 750 16 to 500 8 to 250 [mm/s] 801900 24 to 610 16 to 410 8 to 200 9011000 24 to 500 16 to 340 8 to 170 500 10 to 500 5 to 250 20 to 1000 12 to 500 6 to 250 24 to 1200 16 to 500 8 to 250 Actuator specification 501600 20 to 900 12 to 500 6 to 250 24 to 1200 16 to 500 8 to 250 Driver type LECPA Note2)

VM

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25

C95

, 320, 400, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

Vacuum System Peripherals:

At 0.5 MPa, temperature 20C 1690 910 Elbow type Check valve Series AK Large valve capacity Low cracking pressure/0.02 MPa Port size Rc Effective area (mm2) Model 1 8 1 4 27.5 (Rc ) 95 (Rc ) 230 (Rc 1) AK2000 1 4 3 8 1 2 1 2 , 1 4 AK4000 AK6000 , , 3 4 , 1 Series AK 13-14-15 15 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

MXQ

to 0 1) 0.1 mm for 75 mm or longer stroke 4 to 0 4 to 0 6 to 0 10 to 0 12 to 0 Bore size (mm) 8 12 16 20 25 D50 to 500 mm/s Piston speed Holding force (N) 25 60 110 160 250 Table (1) B Side Parallelism to A Side -X (mm) Note) For caution on end lock, refer to page 8-5-7.