Adsorption Plate

processing precision (adsorption surface) Large, evenly distributed adsorption force Parallelism (m, or less) Weight (kg) 30 30 30 40 40 40 Rectangular Square Size Sintered body particle diameter Aperture ratio Material Finishing Material 0.5 1.2 2.1 3.2 5.8 8 0.4 1.0 1.8 2.9 5.3 7.4 mm 50 x 50 100 x 100 150 x 150 200 x 200 250 x 250 300 x 300 mm 0.3 (sphere) Adsorption surface 15% or more

Shock Absorbers and Rate Controls

,890 1.6 lRott l Ysxl 30 25.0 0.08-0.8 680 226,000 34,500 l l 5 r55 17J90 t 0 Otil | 7rx2 30 50.0 0.3.3_5 r.360 271,000 34,500 t6 6.660 4.5 LROtilllr/sx? 30 50.0 0.08.0.8 1.360 ?71,000 34.500 t6 r55 11,760 4.' | | 7rx4 30 100,0 0.3-3.5 2.710 362,000 34,500 10 r60 6.660 3 Otlll Vax6 30 150.0 0.3-3.5 4,070 42t.000 34,500 90 285 6.660 6.6 Al d mensions in m llimeters.

Support Guide/11-LEFG Series

The load factor for each direction can be obtained as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 LC3F2 2000 1000 2000 800 1500 1500 Lz 600 L1 [mm] L3 [mm] L2 [mm] 1000 1000 400 Ly 500 500 200 Lx 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 61 Support Guide 11-LEFG Series 11-LEFG16, 25

IDU/IDF

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

VQC

Proper tightening torque (Nm) Tightening torques for piping Connection thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

Series AP500

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00

ITV

signal (monitor output) JIS Symbol NPN open collector output: Max. 30 V, 30 mA PNP open collector output: Max. 30 mA Switch output Within 1% (full span) Within 0.5% (full span) Within 0.5% (full span) Within 0.2% (full span) Within 0.12% (full span)/C 3% (full span) MPa: 0.01, kgf/cm2: 0.01, bar: 0.01, PSI: 0.1 , kPa: 1 Linearity Hysteresis Repeatability Sensitivity Temperature characteristics

IIIIIIIIII

VP-700-5 VP-700-10 VP-700-30 1 1 2 5 10 30 30 30 30 0.5 0.6 1.0 1.0 1.2 2.0 VPMOUNTING STYLE BARBED FITTING (FM & PM ONLY) VALVE FUNCTION RANGE (In. Hg) PM = PANEL MOUNT PT = PIPE THREAD MM = MANIFOLD FM = FLUSH MOUNT B80 = NYLON 1/16" I.D. TUBE B85 = NYLON 1/8" I.D.

ZP

) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

MHZ

MPa 0.2 MPa 5 Misc. 50 D0 10 20 30 40 50 0 50 100 150 Gripping point L (mm) Gripping point L (mm) 20MHZ2-16D/MHZL2-16D MHZ2-40D 400 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 50 350 0.6 MPa 0.6 MPa 0.6 MPa 0.6 MPa Gripping force (N) 300 Gripping force (N) 40 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 250 0.4 MPa 0.4 MPa 0.4 MPa 30 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa

MHZ

MPa 0.3 MPa MRHQ 100 L 0.2 MPa 0.2 MPa 0.2 MPa 5 Misc. 50 D0 10 20 30 40 50 0 50 100 150 Gripping point L (mm) Gripping point L (mm) 20MHZ2-16D/MHZL2-16D MHZ2-40D 400 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 50 350 0.6 MPa 0.6 MPa 0.6 MPa 0.6 MPa Gripping force (N) 300 Gripping force (N) 40 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 250 0.4 MPa 0.4 MPa 0.4 MPa 30

ZP

20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model

Series AK1000

in.Hg to 30 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa Refer to the following porting configurations.

CNG

5.5 10 35.5 73 40 20 15 6.6 35 22 59.4 M10 x 1.25 1/8 154 12 48 3 12 26.5 2.5 10 4.5 30 M6 x 1 58.4 6 14 44 81 49 22 18 6.6 40 30 71.4 M14 x 1.5 1/8 169 (178) 14 56 4 12 28 (mm) Without rod boot With rod boot Bore size (mm) Z l H Z 0.25 ZZ e f h ZZ 20 25 32 40 231 35 190 211 30 16 55 210 Stroke x 250 40 207 228 30 17 62 229 260 40 214 238 35 17 62 236 289 (298) 50 241 (250) 269 (278) 35

MXW

Nil B Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CNG

5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 12 40 20 15 10 6.6 35 4.5 49.4 48 22 28 59.4 3 12 M5 x 0.8 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 14 49 22 18 10 6.6 40 4.5 58.4 56 30 30 71.4 4 12 M6 x 1 Without rod boot With rod boot Bore size (mm) 20 25 32 40 l ZZ H Z e f h Z ZZ 35 190 211 30 16 55 210 231 0.25 x Stroke 229 40 207 228 30 17 62 250 40 214 238 35 17 62 236 260 50 241 (250) 269

Cylinder with Lock Series CNG

5.5 10 35.5 73 40 20 15 6.6 35 22 59.4 M10 x 1.25 1/8 154 12 48 3 12 26.5 2.5 10 4.5 30 M6 x 1 58.4 6 14 44 81 49 22 18 6.6 40 30 71.4 M14 x 1.5 1/8 169 (178) 14 56 4 12 28 (mm) Without rod boot With rod boot Bore size (mm) Z l H Z 0.25 ZZ e f h ZZ 20 25 32 40 231 210 35 190 211 30 16 55 Stroke x 250 229 40 207 228 30 17 62 260 236 40 214 238 35 17 62 289 (298) 261 (270) 50 241 (250) 269

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250

MXW Series Long Stroke Slide Table

) 5H9 +0.03 depth 4.5 0 6 38 5 22 12 Y Y 25 40 84 L 10 13 13 K A 30 24 15.8 A Z NN-M4 x 0.7 thread depth 8 Bottom through hole 3.3 (N-1) x H G N-M4 x 0.7 thread depth GG HH H 6 depth 4.5 5H9 +0.03 Bottom through hole 3.3 0 5H9 +0.03depth 4.5 0 F E G F E Model HH H GG J Z N L K NN 64 106 71 MXW875 30 19 92 228 5 45 31 1 98 112 106 MXW8100 32 34 115 278 5 70 56 1 121 144 129 MXW8125 32 32

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350