Series SV

70% Stroke mm AS2201F -01-08 AS2200-01 200 100 70% 50% 30% 10% 0 400 MB 40 300 Stroke mm AS2201F -02-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke mm AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components

MY2

speed mm/s Piston speed mm/s 5 Model Selection Series MY2 Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2HT40 MY2HT40 MY2HT40 40 40 40 30 30 30 MY2HT25 20 20 20 MY2HT25 MY2HT25 MY2HT16 10 10 10 MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000

Proposals for Energy Saving

300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

MGG

(mm) Bore size (mm) Stroke range (mm) F N M E L D C K A B J G H I AC AF AB AE AA AD AP 63 80 100 100 66 200 140 180 30 135 117 200 228 13.5 M16 x 2 depth 28 65 25 15 50 M12 x 1.75 depth 24 25 170 60 20 depth 4.5 75, 100, 125 150, 200 250, 300 115 76 234 214 170 30 160 230 262 13.5 M16 x 2 depth 28 138 75 27 15 55 M12 x 1.75 depth 24 30 200 70 20 depth 14.5 125 274 80 245 210 190 35 280 304

Digital Flow Switches Series PF2A

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 13

Profile Design ISO/VDMA Air Cylinder Series CP95

390 280 350 420 G (rear) 0.5 310 260 340 250 310 370 0.6 270 230 300 220 270 330 0.7 240 210 270 190 240 290 0.8 210 190 250 170 220 270 0.9 190 170 230 160 200 240 1 170 160 210 140 190 220 CD 0.2 1200 920 1150 1330 0.3 760 960 730 910 1050 C 0.4 640 820 620 770 890 0.5 570 720 540 680 780 D 0.6 630 510 650 490 610 700 0.7 560 460 600 440 550 640 0.8 510 430 550 400 510 580 0.9 470

Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

PF2A/PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

V100

Note) Standard lead wire length: 300 mm.

7ND9071en

Disconnect and remove all cabling which enters the limit switch housing (300). Remove screws (325), 3 pcs. and lift out the limit switch base plate (324) complete with switches, LUI and connector block. Open screw (326) and turn the limit switch housing (300) from the positioner housing. Remove the electronics cover (39). Proceed with the valve controller as applicable.

SYJ3000/5000/7000

Standard length is 300 mm, but the following lengths are also available.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

72 64 [65.3] 123 87.8 [90.4] 103.8 [106.4] (Lead wire length) 300 41.6 300 54 [60.5] (Lead wire length) [ ] for AC Other dimensions are the same as the grommet style

SY

750 150 300 450 600 750 150 300 450 600 750 150 300 450 600 750 SY3120 -C6 Cv = 0.23 SY5120 -01 Cv = 0.59 SY7120 -02 Cv = 0.87 SY9120 -03 Cv = 2.1 The speed of CJ2 and CM2 cylinders is controlled by a fixed orifice built into the cylinder.

CG1

(mm) Bore (mm) Standard stroke (mm) Long stroke (mm) ZZ TB GB A H J K P TA B1 NA D AL H1 KA S C E I MM F GA Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 20 25 32 40 50 63 80 100 106 (114) 111 (119) 113 (121) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) 11 11 10 (11) 10 (12) 12 (13) 12 (13) 12 18 22 22 30 35 35 40 40 15.5 35 40 40 50 58 58 71 71 M4

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

: (800) 258-9200-www.stevenengineering.com 0.5 400 st 300 st 200 st 300 st 0.5 0.5 200 st 100 st 200 st 100 st 100 st 75 st 75 st 0 0 0 0 0 0 10 20 30 40 50 Allowable end load F (N) 20 40 60 80 100 10 20 30 40 50 60 70 Allowable end load F (N) Allowable end load F (N) MGGM40Stroke 3 (Slide bearing type) 2.5 800 st Deflection Y (mm) 2 700 st 600 st 1.5 500 st 1 300 st 400 st st: Stroke (mm

Slider Type Ball Screw Drive/11-LEFS Series

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

4/5 Port Air Operated Valve Series SYJA3000

59.6 [66.6] Approx. 300 (Lead wire length) 33 48.5 [55.5] Refer to page 1-5-79 for dimensions with connector cable.

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

SV

AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500