Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Industrial Filters

318.5 240 560 1195 1550 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 1000 20 200 92 445 318.5 240 560 1460 1815 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 750 24 295 137 560 400 270 710 1305 1705 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40

MY1

100) (80 and 100) (80 and 100) Black zinc chromated Seal list No.

Electric Actuators

Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 CAT.NAS100-101 CAT.NAS100-78 Features 7 Actuators RotaryTable Miniature Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Rod type Slide table type Basic type High precision type Series LEPY Series LEPS Series LER Series LERH Stroke Stroke Size

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable

Compact 5-Port Solenoid Valve

to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 i Option4 (For details on the Function/Application, refer to page 121.)

CXS

Stroke range Standard strokes (mm) Bore sizes (mm) Long strokes (mm) Series 10 80, 90, 100, 110, 120, 125, 150 10 to 75 CXSM CXSL 15 110, 120, 125, 150 20, 25, 32 10 to 100 110, 120, 125, 150, 175, 200 10,15 10, 20, 30, 40, 50 75, 100, 125, 150 CXSWM CXSWL 10, 20, 30, 40, 20, 25, 32 125, 150, 175, 200 50, 75, 100 Dimensions CXS10, 15 CXS20, 25, 32 Stroke ZZ Stroke ZZ SS SS Z Z (Z) (Z) CXS10

Compact Manifold Regulator Series ARM5

150 200 250 0 0 50 100 150 200 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM5AA1-308 (One-touch fittings: IN/OUT 6) ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition

MXS Series Air Slide Table

0 50 100 150 200 160 120 80 40 200 0 0 100 150 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 20 20 20 Lr=122mm 0.040 0.05 0.10 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table

Table of Contents

VC (1) Fluid temperature (C) 10 to 60 (No freezing) 10 to 100 Dusttight, Low jetproof (equivalent to IP65) Enclosure VDW Environment Location without corrosive or explosive gases VQ Valve leakage (cm3/min) 0 (with oil pressure) Mounting orientation Unrestricted VX2 (3) 30/150 or less Vibration/Impact resistance (m/s2) 24, 12 VDC, 100, 110, 200, 220, 230 VAC (50/60 Hz) 100, 200, 220, 230

Electric Actuator

30, 50, 75 100, 125, 150 50, 75 50, 100 50, 100 150 16 3 25 9 25 5 Miniature Rotary Table Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Rod type Slide table type Series LEPS Basic type Series LER High precision type Series LEPY Series LERH CAT.ES100-94 CAT.ES100-92 Series LER Series LEPY Series LEPS Max. speed (n/s) Rotating torque (Nm) Size Size Max. work load (kg) Stroke (mm) Size

Air Slide Table

(mm) Table displacement (mm) MXQR20-50 MXQR20-30 MXQR20-40 MXQR20-100 MXQR20-125 MXQR20-150 MXQR20-40 MXQR20-100 MXQR20-125 MXQR20-150 0.06 MXQR20-50 MXQR20-150 MXQR20-100 0.08 MXQR20-125 MXQR20-30 0.04 MXQR20-20 MXQR20-100 0.04 MXQR20-20 MXQR20-10 0.04 0.02 MXQR20-10 0.02 0 0 0 100 200 300 100 200 300 400 500 600 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQR25-150

Base Mounted Metal Seal/Rubber Seal Series VQ

Lead wire color 24 VDC 100 VAC 110 V 200 VAC 220 V Black Lead wire color 24 VDC 100 VAC 110 V 200 VAC 220 V SOL.A SOL.A Black (Blue) [Red] (Yellow) [Yellow] () () Red (Blue) [Red] Red (Blue) [Red] White (Gray) [Gray] COM ( + ) COM(+)() SOL.B Single solenoid VQ0 double VQ1000 double solenoid ( ) is for 100, 110 VAC [ ] is for 200, 220 VAC Note Black (Blue) [Red]: A side solenoid () Red (Blue

Air Slide Table Series MXQ

(mm) MXQ20-40 MXQ20-75 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-30 0.06 MXQ20-100 MXQ20-125 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-150 0.08 MXQ20-30 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-20 MXQ20-100 MXQ20-10 0.04 0.02 MXQ20-10 0.02 0 0 0 100 200 300 100 200 300 400 500 600 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr=200 mm 0.08 MXQ25-150 MXQ25-150 MXQ2550 MXQ2575 MXQ2510 MXQ2520 MXQ2530

Table of Contents

150 200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

Hygienic Design Cylinder Series HY

Standard Stroke Bore size (mm) Standard stroke (mm) 20 20, 30, 50, 100, 150, 200 25 20, 30, 50, 100, 150, 200 32 25, 50, 100, 150, 200 40 25, 50, 100, 150, 200 50 25, 50, 100, 150, 200 63 25, 50, 100, 150, 200 Manufacture of Intermediate Stroke Intermediate strokes of 1 mm each can be produced by using spacers with standard stroke cylinders.

SX

A: Orange B: Green M3 Terminal screw DIN rail (mm) 3 4 5 6 7 8 stations 2 stations 135.5 125 108 13.5 Stations n L1 L2 L3 L4 148 137.5 118.5 14.5 160.5 150 129 15.5 173 162.5 139.5 16.5 185.5 175 150 17.5 185.5 175 160.5 12.5 198 187.5 171 13.5 (Rail mounting hole pitch 12.5) 1-6-100 101 Base Mounted Series SX3000/5000 SX5000: 9 Pins Terminal Block/Plug-in SS5X5-45TUStations DC4 C6 C8 Note

LEY-OM007

150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87

CL

CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series