air-filter-e

temperature (C) Note 2) 0 to 150 0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

Air Preparation Equipment

temperature (C) Note 2) 0 to 150 0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

Series IDG

Standard dew point 60C: Approx. 120 min. This time can be shortened as described below. 1) Provide a valve on the downstream side of the membrane air dryer. 2) Supply air with the valve closed. Only purge air flows into the membrane air dryer. 3) After 15 minutes or more, open the valve and let air flow to the downstream equipment. 4.

SY

750 150 300 450 600 750 150 300 450 600 750 150 300 450 600 750 SY3120 -C6 Cv = 0.23 SY5120 -01 Cv = 0.59 SY7120 -02 Cv = 0.87 SY9120 -03 Cv = 2.1 The speed of CJ2 and CM2 cylinders is controlled by a fixed orifice built into the cylinder.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Z TA TD-H10 (Hole) TL TU TC TX TE TO TR TT TS TH TF TY W1 CLS 40 50 63 80 100 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 10 93 80 60 10 102 85 119 17 9 17 12 45 60 62 15 CA1-S04 10 103 80 60 10 112 95 129 17 9 17 12 45 60 74 15 CB CA1-S06 10 107 100 70 15 130 110 150 20 11 22 14 55 73 90 18 12 129 120 90 15 166 140 192 26 13.5 24 17 75 100 110 25 CV/MVG CA1-S08 12 135 120 90 15 188 162

Table of Contents

200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

LJ1H

Applicable strokes: 150, 250, 350, 450 Example) LJ1H1011PB-150-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Positioning repeatability Motor Encoder Lead screw Guide Motor/Screw connection Model Performance 0.02 AC servomotor (50W) Incremental system Ground ball screw 12mm, 12mm lead High rigidity direct acting guide With coupling LC1-1B1H(Refer to page

Step Motor Driver （ Pulse input type ）

Position 0.00 0.00 0.00 Acceleration 2000 2000 2000 Step data default Deceleration 2000 2000 2000 Pushing force 100 100 100 Trigger LV 100 100 100 Pushing speed 50 50 50 Moving force 150 150 150 Area1 0.00 0.00 0.00 Area2 0.00 0.00 0.00 In position 0.50 0.50 0.50 96 - LEHZ Basic parameter default Model LEHZ10 LEHZ16 LEHZ20 LEHZ25 LEHZ32 LEHZ40 Lead [mm] 251 / 73 249 / 77 246 / 53 243 / 48

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Booster Regulator/Air Tank

Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 Spare port Rc 1/2 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) 60 (367) (367) OUT OUT Tank OUT port Rc 1/2 278 180 180 170 4 x 11 4 x 11 32 32 312 120 180 180 120 Drain port Rc 1/4 460 471 The length may be longer than the specification if the plugs mounted on the tank

IIIIIIIIII

WETTED MATERIALS Polysulfone, Silicone, Buna-N TEMPERATURE RANGE 40 150 F (4 66 C) REPEATABILITY < +/1% F.S.

Slider Type Ball Screw Drive/11-LEFS Series

LECSB2-S 200 to 230 V V V C1 LECSC1-S 100 to 120 V V C2 LECSC2-S 200 to 230 V V V S1 LECSS1-S 100 to 120 V V S2 LECSS2-S 200 to 230 V V V Note 1) The motor and encoder cables are included.

mb1

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to

70astamb1

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

energy saving effect

fluid flow rate [L/min] IDH HRSH250/300-A-20/4090 0.9 Usable flow rate range Circulating fluid pressure [MPa] 80 0.8 0.7 70 Pump head [m] 0.6 60 Outlet 0.5 50 0.4 40 0.3 30 0.2 20 Return port 0.1 10 0 0 125 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow rate [L/min] 171 HRSH Series Inverter Type Dimensions HRSH100/150/200-A-20 (Air-cooled 200 V type) HRSH100/150/200-A-40 (Air-cooled

LJ1H

(S2) 200 to 230 VAC encoder) Absolute Power supply voltage 50/60 Hz AC servo motor (S7) AC servo motor (S3) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz AC servo motor (S6) 100 to 120 VAC Pulse input type 50/60 Hz AC servo motor (S7) (For absolute AC servo motor (S6) 200 to 230 VAC encoder) 50/60 Hz AC servo motor (S7) Dimensions LECSA 2 x 6 Mounting hole 40 135 (Bearing surface

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175