Table of Contents

VQC D side U side SQ VQ0 VQ4 Individual SUP spacer VVQ1000-P-3-C6 P block valve Note) Individual SUP spacer Valve Valve (To be ordered using the no. of the standard valve.)

Plug-in/Plug Lead: Single Unit

VQ5000 VQC S kit 9 stations SQ Rc 1/2 Bottom Note) For details about international standard threads other than Rc threads, refer to Option on page 2-6-39.

VQ5000

VQC SQ VQ0 O-ring connector Lever Note) Do not pull on the lead wires with excessive force. This can cause faulty and/or broken contacts.

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Centimeter Sq.

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Centimeter Sq.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

(SE kit) SQ EX121-SUW1(-XP) SI unit for 16 point Uni-wire System (NKE Corporation) (SF1kit) EX121-SAB1(-XP) SI unit for Allen Bradley Remote I/O (RIO) System (Rockwell Automation, Inc.)

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

No. of stations occupied, 2 stations Item Specifications 24 VDC +10%, 5% External power supply Current consumption SA, SB, SBB, SD, SF, SH, SJ, SK, SQ, SR, SV: 0.1A (Internal unit) SC: 0.3A For details on specifications and handling, refer to the separate technical instruction manual.

VS7-6

VQC SQ Pilot Valve/Spacifications Part No.

Plug-in Unit

Series VQC4000 Base Mounted Plug-in Unit How to Order Manifold VQC F L M VV5QC 4 1 08 02 TD0 / / / SQ P T VQ0 Kit VQ4 S Kit VV5QC 4 1 16 03 SDQW VQ5 Series Option VQZ 4 VQC4000 Nil K N None Special wiring specifications (except for double wiring) Note 1) Manifold model VQD With name plate (available for T kit only) Note 2) 1 Plug-in unit When specifying more than one option, enter symbols

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

female 4N 2.32 (58.9) 1.12 sq. (28.4) NPT 1/4 male 6T 2.68 (68.1) 1.12 sq. (28.4) 3/8 inch compression 6BR 2.32 (58.9) Rc 3/8 6BRN 2.32 (58.9) 1.12 sq. (28.4) R 3/8 6 2.32 (58.9) NPT 3/8 female 6N 2.32 (58.9) 1.12 sq. (28.4) NPT 3/8 male M5 x 0.8 depth 6.4 (Mounting hole) 4 Process Gas Equipment Common Precautions 1 Be sure to read before handling.

Series AK1000

female 4N 2.32 (58.9) 1.12 sq. (28.4) NPT 1/4 male 6T 2.68 (68.1) 1.12 sq. (28.4) 3/8 inch compression 6BR 2.32 (58.9) Rc 3/8 6BRN 2.32 (58.9) 1.12 sq. (28.4) R 3/8 6 2.32 (58.9) NPT 3/8 female 6N 2.32 (58.9) 1.12 sq. (28.4) NPT 3/8 male M5 x 0.8 depth 6.4 (Mounting hole) 4 Process Gas Equipment Common Precautions 1 Be sure to read before handling.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

To operate for an extended time, use SQ 2 ---X11 with energy savign circuit. Removing Manifold from DIN Rail (1) Loosen the end plate clamping screws on both sides until they turn freely.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

R1 R2 n VQC B A VVQ4000 -10A-1 SQ 7 VQ0 B A 6 VQ440 0 1 VQ4 B A VQ5 1. Electrical entry of manifold (except L and C kit) is individual wiring. For details, refer to internal wiring figure of each kit. Cable length is 0.6 m for L kit. VQ430 0 1 5 VQZ B A VQD VQ420 0 1 4 1.

SQ1000/2000

Exhaust center: SQ A31 Pressure center: SQ B31 5 (R1) 3 (R2) 1 (P) For applications which demand high speed, high frequency, long life and a precise response time. 1 2 (A) 4 (B) 2 1 2 1 2 SQ B31 N.O. valve N.O. valve 5 (R1) 3 (R2) A side B side 1 (P) A (A) 4 (B) 2 1 2 B SQ C31 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R P Features 2 Series SQ1000 Plug-in Type How to Order Manifolds SS5Q13

0.4

SQ Valve Mounting (VQC4000) VQC1000 VQC2000 Caution VFS Slide locking type (Manual) After confirming that the gasket is installed correctly, securely tighten the mounting screws according to the tightening torque shown below.

Solenoid Valve

This prevents the accumulation of oil inside the pilot valve. 6 No.SQ1000V-OMQ0002-B SQ Series Precautions for 5 Port Solenoid Valve 4 Be sure to read before handling. Operating Environment Maintenance 1. Do not use in an atmosphere having corrosive gases, 1.

VQC

Output VQC I/O SUP port EXH Cylinder port Decentralized Serial Wiring 3 position (Closed center) SQ I/O Gateway application requires a gateway unit and communication cable separately. Please contact SMC for more details.

Plug-in/Plug Lead: Single Unit

SLOW 2(B) VQC SQ 5(R1) 3(R2) VQ0 Circuit diagram Plug-in type Plug lead type VQ4 SUP stop valve spacer VQ5 179 (Plug-in type) 133 (Plug lead type) 32 16 VVQ5000-37A-1 (Plug-in type) VVQ5000-37A-5 (Plug lead type) VQZ 1 (P) 4(A) P U S H 40.3 VQD A SUP stop valve spacer is mounted on a manifold block, making it possible to individually shut off supply air to each valve.

Series VQ Base Mounted Metal Seal/Rubber Seal

Item Specifications 24V DC, +10%, 5% External power supply Current consumption (Internal unit) SA, SB, SD, SE, SF, SG, SJ, SK, SQ, SR: 0.1A SC: 0.3A How to Order Manifold VV5Q 08 C6 12 D XP A S Dust proof styel (-XP)(VQ1000 only) Suffix -XP for the dust proof SI unit. (Except for SE, SG and SQ.)