l 15 :1-7 "140 177 144 42 19 20 236 118 275 18 M16x 1.5 \ 15 34 15 0160 Up to 1200 I 56 180 38 178.5 20 17 53 Bdre size MM N pis \VithOO1 (l}d bool\ With rod boot (Single side) (mm) (BotilSjjes,1 ZZ ZZ 341 364 341 364 367 388 1m,") H ZZ e f h 0125 M3D x 1 5 30.5 1!
For ISA3-G type, the range is up to 280, with a hysteresis of 20.
, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.
6 1 20 o.174 o.2t7 0.260 0.304 0.347 25 o.272 0.340 0.408 0.476 0.543 32 0.446 0.557 0.668 0.779 0.890 40 0.697 0.870 !.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
Zone 40 :/ 1 30 " /' i 20 ;/ Danger Zone 10 SOOO 1
(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20
(cm2) (mm) (mm) direction 3 4 i 5 6 12.57 j37.7 50.3 62.8 75.4 OUT 40 20 1 140.2: 168.2 28.0 84.1 112.1 37.7 47.2 56.6 IN 9 .43 1283 19.63 58.9 78.5 98.2 117.8 OUT 50 20 49.5 16.49 66.0 IN 82.5 199.0 124.7 155.9 !
For the analogue output type, 5 V or 20 mA is output when [on], and 1 V or 4 mA is output when [oFF]. Press the button.
(Reduce power consumption by up to 20%.)
For the analogue output type, 5 V or 20 mA is output when [on], and 1 V or 4 mA is output when [oFF]. Press the button.
Description Material 20 PDU-8Z 25 PDU-10Z 32 PDU-12LZ 40 PDU-14LZ !
(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic
PSI -8 to 5 PSI -8 to 20 PSI -13 to 20 PSI 0 to 10 PSI 0 to 20 PSI, 3:1 RATIO 0 to 20 PSI, 5:1 RATIO XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX BARB OPTIONS ADJUSTING OPTION W/K = WITH ADJUSTING KNOB W/S = WITH 1/4" SHAFT W/0S = FLUSH SHAFT P80 = 1/16" ID BARBS P85 = 1/8" ID BARBS NOTE: UNITS COME STANDARD WITH STRAIGHT CONNECTIONS FOR 1/16" ID TUBING Back to Top .
Note 4) Option H (Auto-drain bowl type: Metal bowl) is only applicable to the IDFA6E-20.
Bracket (Option) Optional Specifications J: With drain guide u I T: With element service indicator T Maintenance , Drain space Dimensions with mounting bracket E~ment service indicator B E F G H I J Model Port size A C D K L M N 0 P Q R S T U 5 9 5.5 35 54 70 26 4.5 1.6 24 37 AMH150 1/8, 1/4, 3/8 159 20 63 20 76 20 76 20 90 20 90 20 106 20 106 20 122 20 160 10 166 56 15 10 187 66 20 10 187
less 250 x 250 18 625 or less 282 Body size under 100 to 150 350 or less 300 x 300 20 900 or less 339 20 to 350 under 150 to 200 400 or less 23 Over 900 under 200 to 250 450 or less Order a thickness equal to or greater than that shown on the table.
NCmRO-OT NCI|RO-OS H3 ).250 | r-24 o.75 |.0010.621 r2s6;; 093t0.22 t0-32 uNFl0.8l L00 1 . 1 20.12 t10-32 UNF $-m 0.62 0.34 0.880.38 3.22 2.66 2.35 1.69 t.312tyt -24 003t025 O-32UNF .12 r25 1.47 0.2,1 llG32 UtlF 1A-20 0.s10.47 1.22 o.62 3.75 3.34 2-93 1.81 ).137 t%^-20 r.25 1.m).12510-38 | r. -20 UNC 't.75 1.93 0.25 t|l-20 LhrC x.-18 1 . 1 20.38 1.57 0.88 4 . 1 9 3.49 3,692.O0 slrc' Air Cvlinder
: 201 to 300mm 80 40 50 50 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.