SMC Corporation of America
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(Looked by double solenoid valve) (Looked by double solenoid valve) SOL. location B (*) B (*) B B A B A B A B A B A A A A B A B A SOL. location VQC 3 position 3 position Double Double Double Double SI unit Single Single SI unit Single Single SQ Stations 1 2 3 4 5 Stations 1 2 3 4 5 VQ0 The places of asterisk are not used.

Push button (Mushroom) VM120-01-30R/B/G/Y VM130-01-30R/B/G/Y Panel mounting hole JIS Symbol 2 port 3 port R port 0.5 MPa supply (3 port only) 4.9 mm P.T. 21 N F.O.F. 2-4.6 mounting hole 1.6 mm O.T. 6.5 mm T.T.

Compretied (lbr.) 0ttt.tftt(8) .24 0.28 l2-t30 50 0,000 2t5 0,5 0 I 0ffil.t 5tjl(B) 0.38 r 2. r30 l0 168,000 200 0.8 1.7 80 2 0tlt.25(B) 0.38 t2-130 50 178.000 200 0.8 1.7 8r 2 tR0EI[.25(B] .25 0.38 3 5 0 50 r78.000 200 0.8 1.7 100 2 0tfl.35(Bl .28 0.50 t2-r30 r50 300,000 450 1.0 2.2 t20 3 r.R0r .35(B) ,n 0.50 3-50 150 300.000 450 1.0 2.2 200 3 0 r . 5 ( B ) .44 0_50 t2-180 250 284.000 775

(Tightening torque of 0.3 to 0.4 Nm) Clamp screw B 2.10-23 3 Port Solenoid Valve VQZ100/200/300 Valve Single Unit Base Mounted Plug Lead Unit How to Order Valve VQZ100 VQZ 1 1 5 5 M 01 Series 1 VQZ100 Body width10mm Port size {2(A)port} Without sub-plate Rc(PT)1/8 01 CP Configuration (A) 2 N.C. 1 1 (P) 3 (R) Manual override B: Locking style (Slotted) : Non-locking push style (Flush) Body

L6 L2 5.5 DIN rail holding screw (For DIN rail mounting) 8 47 1.5 DIN rail holding screw (For DIN rail mounting) Communication connector 2 x M4 mounting hole Power connector Light/surge voltage suppressor 85.1 Marker groove 1 0 5.1 5.5 A B A B A B A B A B 3 2 92.6 A 14 A 14 A 14 A 14 A 14 4.6 35 83 106 PWR OUT 90 60.5 0 1 5 4 40.9 2 3 8 B 12 B 12 B 12 B 12 B 12 PCI BUS IN BUS OUT 7 8 8 4.6

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ O-ring NBR u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 O-ring NBR ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

RED ON: MAC_ID duplication error, or BUSOFF error (major communication abnormality). 11 11 Base-Mounted Type Plug-in Unit Series VQC4000 1in = 25.4mm VV5QC41 S Kit (Serial Transmission Kit: EX240) L2 (1 input block: 8 inputs) 14.5 (128.5) L1 8 6.5 Indicator light 54 P = 25 65.5 Manual override Min.0 to Max. 4 unit (0 to 216mm) 9 9 163 A B A B A B A B A A A B 10 143 32 98.8 143 101 Mounting

Input block COM Port size 4(A), 2(B) Nil N PNP or without SI unit / Input block Symbol 02 03 02B Port location / size Application NPN Side, 1/4 Size 01 Type of Input block Side, 3/8 Size 01 Nil 1 2 3 Without Input block Bottom, 1/4 Size 01 M12, 2 inputs M12, 4 inputs Port thread M8, 4 inputs Nil T F Rc Number of Input block NPTF Nil 0 1 Without SI unit / Input block G Note1) Without Input

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

: Manifold Series ZB (inch) 01 M5 ZB3 L(O)0 1 E F K1 Q1 ZZB-S M5 Air pressure SUP Vacuum pressure SUP (PV) port 2 x 0.126 mounting hole C Ejector/Vacuum pump system Silencer exhaust, With supply valve/release valve, With vacuum pressure switch, PV, PD individual port (PV PD) 2 x 1/8, M5 thread depth 0.197 (0.47) (1.18) L2 L1 0.146 2.394 0.165 1.51 2.41 0.05 B 0.236 0.228 C 0.72 Supply valve

C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H

) VQD 12 X n 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 8 A A A A A A A A B B B B B B B B 7 SMC SMC SMC SMC SMC SMC SMC 6 5 L1 L2 4 3 2 44 P = 25 50.5 P = 25 1 X Stations 12 38 26.5 Electrical entry on D side (LD) 37.5 10.2 12 91 D side 43.5 50.5 163 59 96.5 Dimensions Formula L1 = 25n + 63, L2 = 25n + 76 n: Station (Maximum 16 stations) L n 8 263 276 L1 L2 7 238 251 6 213 226 5 188 201 4 163 176 3

(mm) Model Flow characteristics NBR, FKM 1 cm3/min or less Port size Weight (g) External Leakage C[dm3/(sbar)] b Cv Seal material Leakage 2 3 4.5 2 0.59 1.2 2.3 0.59 1.2 0.48 0.45 0.46 0.48 0.18 0.33 0.61 0.18 VXE2110-01 VXE2120-01 VXE2130-01 VXE2110-02 VXE2120-02 VXE2220-02 VXE2320-02 VXE2130-02 VXE2230-02 VXE2330-02 VXE2240-02 VXE2340-02 VXE2250-02 VXE2350-02 VXE2260-02 VXE2360-02 VXE2220

type: Stainless steel 615 Series AS20-T Dimensions L4 D3 H (Hexagon width across flats) T2 L3 A L2 D1 D2 T1 L1 Dimensions A AS120-U10/32-T 10-32 UNF 10-32 UNF AS120-M5-T M5 x 0.8 8 9 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 Weight (g) 13 9 4.5 10 31 10.3 0.7 27.4 AS220-N01-ST NPT 1/8 12.7 NPT 1/8 AS220-F01-ST G 1/8 AS220-01-ST Rc 1/8 12 14.3 R 1/8 33 14.6 7 18 34.7 13.2 1.5 31.6 AS220

U side D side (L4) L3 (9.1) 8 56.2 20.8 5.5 35 DIN rail 17.2 (SJ3000) [17.5 (SJ2000)] B A B A B A B A B A DIN rail holding screw Manual override (Non-lock) 4(A) port side: Blue 2(B) port side: Yellow 30.6 Aapprox. 300 (Lead wire length) 5 L2 (DIN rail mounting hole pitch: 12.5) L1 SS5J3-M60B (S, R, RS) Stations 32.1 (SJ3000) [32.5 (SJ2000)] 15.4 (SJ3000) [15 (SJ2000)] SJ3000 SJ2000 pitch

(A) 2 (A) 1 (P) 3 (R) 2 (A) 2 (A) 3 (R) Model C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv VEX312-01 VEX312-02 VEX332-02 VEX332-03 VEX332-04 VEX350-04 VEX322-01 VEX322-02 VEX342-02 VEX342-03 VEX342-04 1/8 1/4 1/4 3/8 1/2 1/2 1/8 1/4 1/4 3/8 1/2 2.4 3.5 4.1 8.7 9.8 24 3.3 4.1 8.1 12 13 0.19 0.35 0.36 0.29 0.37 0.32 0.34 0.28 0.34 0.26 0.20 0.59 0.89 1.1