Unit Manifold Valve

Solenoid valve No. 3 8 7 6 5 4 3 2 1 2 No. 8 No. 7 8 7 27 (For C2: 28) 9 No. 6 No. 5 No. 4 No. 3 No. 2 No. 1 6 5 33.6 (Pitch) P = 6 (2) 38 4 3 2 1 1 (No.1) Groove side Barb fitting [1(P), 2(A), 3(R) port] Applicable tubing O.D. 4, I.D. 2.5, Polyurethane tubing (made by SMC) Soft nylon tubing (made by SMC) Connector (L = 300 to 1000) Lead wire length Cut dimension for panel mount (mounting

Compact Vacuum Unit Ejector/ Vacuum Pump System

Note 4) Energization on A (set) side generates vacuum and energization on B (reset) side stops generation of vacuum. 28 - Doc. no. ZB-OM00201-B How to operate the supply valve of the latching type Latching type refers to a solenoid with a self holding mechanism.

5 Port Solenoid Valve

Note) Except SI Unit 604 5 Port Solenoid Valve EX260 (Output device for driving 5 port solenoid valves) Compatible Protocols Compact 28 mm SV SYJ SZ Number of outputs Each 32/16 digital output type available in the series VF Output polarity Each negative common (PNP)/positive common (NPN) type available in the series VP4 Enclosure IP67 (For Units with D-sub connector, and when connected

Air Cylinder

[mm] Bore size A B C D F GA H MM NA NDh8 NN S T Z 6 15 12 14 3 8 14.5 28 M3 x 0.5 16 6 0 0.018 M6 x 1.0 61 (66) 3 117 (122) 10 15 12 14 4 8 8 28 M4 x 0.7 12.5 8 0 0.022 M8 x 1.0 49 105 16 15 18.3 20 5 8 8 28 M5 x 0.8 12.5 10 0 0.022 M10 x 1.0 50 106 : ( ) in S and Z dimensions: With auto switch With Air Cushion/Dimensions other than the table below are the same as the table above.

Table of Contents

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

1

Stopper ZZ d c a b Bore size (mm) Available for use stroke Bore size (mm) G ML MK MI MA MT MH L A B CA2 40 50 63 80 100 M14 x 1.5 181 46 22 32 12 16 20 25 32 40 50 63 80 100 14 19 7 25 11 5 24 3.5 (37.4) 57.7 (64.9) 30.2 5 to 30 206.5 58.5 28 42 14 19 7 28 11 5 24 3.5 (41) 58.5 (68.5) 31 M18 x 1.5 CS1 210 54 28 42 20 22.5 10 36 17 8 29 4.5 (46) 67.5 (79.5) 34 Stroke c + Stroke 257 70 35 55

Electric Actuators

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 Work piece mounting reference plane Refer to Cross section C-C.

EX120/121/122

ZS-28-CA-2 ZS-28-CA-2 ZS-28-CA-3 ZS-28-CA-2 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-4 ZS-28-CA-4 ZS-28-CA-4 SMC part no. Manufacturer's part no.

LX

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 Work piece mounting reference plane Refer to Cross section C-C.

Air Fittings & Tubing

17.46 12.7 14.29 17.46 1 4 28 13.2 10 20.5 17 4.6 30 28 30 5 16 15.2 12 23.5 18.5 6 31.5 31.5 6 32.5 17.46 17.9 17 25.5 21 3 8 34 7 36.5 22.23 36.5 9 17.46 38.5 21.7 17 28 1 2 22 9.6 40 22.23 Reference dimensions after NPT thread installation.

Electric Actuator/Slider Type

Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40 mA Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA) 4 V or less Leakage current 100 A or less at 24 VDC 0.8 mA or less Indicator light Red LED lights up when turned ON.

CXS

36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

L NZ RR1 NX E1 L1 MM U1 ND A1 Cotter pin Polishing ball 12 Y-04C 40 +0.3 +0.1 16 38 M14 X 1.5 12 3 X 18l 22 24 55 13 25 55.5 Polishing ball 12 Y-05C 50, 63 +0.3 +0.1 16 38 M18 X 1.5 12 3 X 18l 27 28 60 15 27 55.5 Polishing ball 18 Y-08C 80 +0.3 +0.1 28 55 M22 X 1.5 18 4 X 25l 37 36 71 19 28 76.5 Polishing ball 20 Y-10C 100 +0.3 +0.1 30 61 M26 X 1.5 20 4 X 30l 37 40 83 21 38 83 Knuckle pins

HRX-OM-W002

Table 3-10 Piping port size Description Port Recommended Recommended piping size tightening torque specifications Circulating fluid outlet port Rc1/2 28 to 30Nm 0.4MPa or more*2 Circulating fluid return port Rc1/2 28 to 30Nm 0.4MPa or more*2 Facility water inlet port *3 Rc3/8 22 to 24Nm 1.0MPa or more (Supply puressure: 0.3 to 0.5MPa) Facility water outlet port *3 Rc3/8 22 to 24Nm 1 For NPT

SFOD-OMT0009CN

-COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

LEYx-OMZ0015

27 31 27 28 27 25 7 Parts list No.

Sensor Range: 4 [For Positive Pressure (0~500kPa)], Port Size: C01 (Rc 1/8), Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: C01 (Rc 1/8), Output Specification: 28 [Current Output (4~20mA) Type]