Unit Manifold Valve

Solenoid valve No. 3 8 7 6 5 4 3 2 1 2 No. 8 No. 7 8 7 27 (For C2: 28) 9 No. 6 No. 5 No. 4 No. 3 No. 2 No. 1 6 5 33.6 (Pitch) P = 6 (2) 38 4 3 2 1 1 (No.1) Groove side Barb fitting [1(P), 2(A), 3(R) port] Applicable tubing O.D. 4, I.D. 2.5, Polyurethane tubing (made by SMC) Soft nylon tubing (made by SMC) Connector (L = 300 to 1000) Lead wire length Cut dimension for panel mount (mounting

Air Cylinder

[mm] Bore size A B C D F GA H MM NA NDh8 NN S T Z 6 15 12 14 3 8 14.5 28 M3 x 0.5 16 6 0 0.018 M6 x 1.0 61 (66) 3 117 (122) 10 15 12 14 4 8 8 28 M4 x 0.7 12.5 8 0 0.022 M8 x 1.0 49 105 16 15 18.3 20 5 8 8 28 M5 x 0.8 12.5 10 0 0.022 M10 x 1.0 50 106 : ( ) in S and Z dimensions: With auto switch With Air Cushion/Dimensions other than the table below are the same as the table above.

1

Stopper ZZ d c a b Bore size (mm) Available for use stroke Bore size (mm) G ML MK MI MA MT MH L A B CA2 40 50 63 80 100 M14 x 1.5 181 46 22 32 12 16 20 25 32 40 50 63 80 100 14 19 7 25 11 5 24 3.5 (37.4) 57.7 (64.9) 30.2 5 to 30 206.5 58.5 28 42 14 19 7 28 11 5 24 3.5 (41) 58.5 (68.5) 31 M18 x 1.5 CS1 210 54 28 42 20 22.5 10 36 17 8 29 4.5 (46) 67.5 (79.5) 34 Stroke c + Stroke 257 70 35 55

CXS

36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

L NZ RR1 NX E1 L1 MM U1 ND A1 Cotter pin Polishing ball 12 Y-04C 40 +0.3 +0.1 16 38 M14 X 1.5 12 3 X 18l 22 24 55 13 25 55.5 Polishing ball 12 Y-05C 50, 63 +0.3 +0.1 16 38 M18 X 1.5 12 3 X 18l 27 28 60 15 27 55.5 Polishing ball 18 Y-08C 80 +0.3 +0.1 28 55 M22 X 1.5 18 4 X 25l 37 36 71 19 28 76.5 Polishing ball 20 Y-10C 100 +0.3 +0.1 30 61 M26 X 1.5 20 4 X 30l 37 40 83 21 38 83 Knuckle pins

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N C2 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y B3 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N Vacuum inlet: One-touch fitting 10 13 16 Applicable tubing O.D.

SJ3A6

4(A) 2(B) KJL03-C2 5/32" one-touch fitting assembly (Elbow type) KJL02-C2 2 one-touch fitting assembly (Elbow type) SJ3000 4(A) 2(B) KJL07-C2 1/4" one-touch fitting assembly (Elbow type) KJL04-C2 4 one-touch fitting assembly (Elbow type) KJW01-C2 1/8" one-touch fitting assembly (Long elbow type) KJL06-C2-N 6 one-touch fitting assembly (Elbow type) KJW03-C2 5/32" one-touch fitting assembly

LEYx-OMZ0015

27 31 27 28 27 25 7 Parts list No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF Auto switch model D-M9NV D-M9N D-M9B D-M9BV D-M9PV D-M9P Electrical entry direction In-line Perpendicular In-line Perpendicular In-line Perpendicular LEJ LEJ Wiring type 2-wire 3-wire NPN PNP Output type LEL Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) LEM Current consumption 10 mA or less Load voltage 24 VDC (10 to 28 VDC

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 27 26 26 48 47 46 104 103 101 199 194 189 385 374 363 42 43 55 58 119 142 219 239 398 444 Flange assembly 9 10 19 25 9 10 19 25 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster

Environment

1 I/O cable length [m]*3 Compatible driver Power supply voltage [V] Size 25 32 40 Nil Without driver A1 LECSA1-S100 to 120 A2 LECSA2-S200 to 230 B1 LECSB1-S100 to 120 B2 LECSB2-S200 to 230 C1 LECSC1-S100 to 120 C2 LECSC2-S200 to 230 S1 LECSS1-S100 to 120 S2 LECSS2-S200 to 230 *3 When Without driver is selected for driver type, only Nil: Without cable can be selected.

CJP

Please order a seal kit with each part number of tube bore size. 6-2-10 5 Series CJP Pin Cylinder Single Acting, Single Return Basic Style CJPB 2-M5 x 0.8 2-M3 (For mounting auto switch) CJ1 CJP CJ2 6 = C2, 10 = C2.5 B' Without rod end thread (Width across flats) Auto switch Rod end nut (Refer to page 6-2-13.) CM2 15 = C3 CG1 Mounting nut (Refer to page 6-2-13.)

CJP

Please order a seal kit with each part number of tube bore size. 6-2-10 5 Series CJP Pin Cylinder Single Acting, Single Return Basic Style CJPB 2-M5 x 0.8 2-M3 (For mounting auto switch) CJ1 CJP CJ2 6 = C2, 10 = C2.5 B' Without rod end thread (Width across flats) Auto switch Rod end nut (Refer to page 6-2-13.) CM2 15 = C3 CG1 Mounting nut (Refer to page 6-2-13.)

Low Differential Pressure Sensor Series PSE550 ®

Output specifications Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 C2 Note 1) Current output type cannot be connected to the Series PSE300. Note 2) The connector is unassembled in the factory but is included with the shipment. Option 1 (Bracket) Nil Option/Part No. None Bracket Note Description Part no. Bracket ZS-30-A With M3 x 5L (2 pcs.)

Slider Type Ball Screw Drive/11-LEFS Series

950 1000 Product weight [kg] 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33 7.61 7.89 8.17 8.45 8.75 9.01 9.29 9.57 9.85 10.13 Additional weight with lock [kg] 0.53 517 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS16 (72) ( ) +0.025 0 3H9 depth 3 40 Body mounting Note 1) reference plane 4 x M4 x 0.7 thread depth 6.4 24 28

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

BM Bellows type with groove UM Flat type with groove KJH C2 06 Pad diameter Applicable tubing O.D. 63 63 80 80 04 4 06 6 03 5/32" 07 1/4" When changing the pad diameter, replace also the plate together. !

LEKF-OMZ0035

LEKFS series slider type / Common precautions . 24 5.1 Design / selection . 24 5.2 Handling . 24 5.3 Mounting . 25 5.4 Precaution on maintenance . 26 3.5 How to detach and attach the dust seal band . 27 5.7 Replacement of belt . 28 6.Troubleshooting . 29 6.1 Alarms . 29 -1- LEKFS Series / Electric Actuator Safety Instructions These safety instructions are intended to prevent hazardous situations

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm194 g102 g