Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

CG5-S

flats B1 2-Rc P Dim.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

(With 2 input blocks) With External Pilot Specifications 46.5 (Pitch) Ground terminal 16.5 13.5 P=10.5 14.1 8.4 18.3 2 x M12 8.6 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 3 PWR 3 3 3 3 5 E 5 3 E 3 5 E 5 3 E 42.7 PWR 43 T T 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P 1 1 1 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" BUS

0.4

VQ 2 x Rc 3/4 1 2 3 4 5 6 7 8 n Stations D-side U-side VQ4 3(R) port 2 x Rc 1/2 4 x G 1/2 1(P) port VQ5 Conduit port SMC SMC SMC SMC SMC SMC SMC VQC 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 13 VQZ 55.5 42.7 43.5 20.5 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A SQ 33.5 12 11.5 15.7 2 x Rc 1/8 Pilot EXH port (6.5) 21.5 2 x Rc 1/8 VFS External pilot port 27 31 2n x Rc 1/4, 3/8, C8, C10, C12 Rc 1/

5 Port Solenoid Valve

) 52.8 26.9 A 4 A 4 BUS OUT (91.3) E X 78.9 76.9 76.7 P 1 P 1 8.7 (69.7) 73.2 1 B 2 B 2 B 2 B 2 B 2 BUS IN 56.6 P 3/5 E 3/5 E PWR B 2 2 A 4 A 4 A 4 A 4 A 4 (For DIN rail mounting) One-touch fitting [PE: Pilot EXH port] [X: External pilot port] 7.5 11.8 Applicable tube O.D.: 4, 5/32" [Communication connector D-sub] BUS OUT BUS 1 P P 1 B 2 B 2 2 2 BUS IN 3/5 E E 3/5 PWR PWR A 4 4 A 4 4 Note

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

Fieldbus System

) 52.8 26.9 A 4 A 4 BUS OUT (91.3) E X 78.9 76.9 76.7 P 1 P 1 8.7 (69.7) 73.2 1 B 2 B 2 B 2 B 2 B 2 BUS IN 56.6 P 3/5 E 3/5 E PWR B 2 2 A 4 A 4 A 4 A 4 A 4 (For DIN rail mounting) One-touch fitting [PE: Pilot EXH port] [X: External pilot port] 7.5 11.8 Applicable tube O.D.: 4, 5/32" [Communication connector D-sub] BUS OUT BUS 1 P P 1 B 2 B 2 2 2 BUS IN 3/5 E E 3/5 PWR PWR A 4 4 A 4 4 Note

Table of Contents

M5 x 0.8 2-RB G G HT U (NA) (Option) A L HN (Max.)

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

EXxx-OMZ0016

Wireless Wireless Communication channel WEB distance Protocol Base Remote select function function (F.C.S.) 1 EXW1 EXW1 Up to 100 m V.1.0/V.2.0*1 Available*2 2 EXW1 EXW1+EX600 *3 V.1.0 NA 3 EXW1 EX600 Up to 10 m V.1.0 NA 4 EX600 EXW1 Up to 10 m V.1.0 NA Available*4 5 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*4 6*5 EX600 EX600 Up to 10 m V.1.0 NA Available *1: For more details, check

CL

1/2 8 11 11 13 16 With rod boot CLAL40SCLA40, #2 (#1+#2+#11) CLAL50SCLA50, #2 (#1+#2+#11) CLAL63SCLA63, #2 (#1+#2+#11) CLAL80SCLA80, #2 (#1+#2+#11) CLAL100SCLA100, #2 (#1+#2+#11) Without rod boot Bore (mm) l 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke Y h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14.0 e 43 52 52 65 65 ZZ 244 266 290 339 358 H 51 58 58 71 72 ZZ 252 274 298 348 367 40

Combination Cylinder

Same side Same side 110C K Heat resistant tarpaulin D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75

Air Slide Table

wire, 3-wire) Solid state auto switch (2-wire, 3-wire) 2-color indication solid state auto switch (2-wire, 3-wire) Made to Order (For details, refer to pages 28 to 29.)

Round Type Hydraulic Cylinder

(n 2) 2 20 + 35 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9 5 20 CHQ 55 (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 D-M9W 10 20 55 CHK (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) (n = 2, 3, 4, 5) 25 + 35 D-M9A 10 25 60 CHN (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9 5 15 50 CHM CHM (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) (n = 2,

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.