REA/REB

axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products

REA/REB

precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

2-wire Improved water resistance (2-color indication) Y7BA Lead wire length symbols:0.5 m Nil(Example) Y69B 3 m L (Example) Y69BL 5 m Z (Example) Y69BZ Notes) Solid state switches marked are produced upon receipt of order.

Slider Type/Ball Bushing Bearing

CY1L15/20/25/32/40 Z + Stroke Hollow shaft for piping Auto switch mountable 2 x P 4 x MM Depth M 4 x J Depth JK 4 x Counterbore dia. B CY3B CY3R 4 x Counterbore depth.

Type: 11S (Bottom Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 11 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C8 (ø8 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C8 (ø8 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 4 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 3 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 9 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C8 (ø8 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 6 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: C8 (ø8 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 10 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C8 (ø8 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 6 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

This is a legacy product, and replaced bySY30M-3-1AR-C8-NA, SUP/EXH END BLOCK ASSY, VALVE, NEW SY3000 MFLD, 21, NEW SY3000 MFLD,NO SIZE RATING, .02645 lb

Type: 11S (Bottom Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 4 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None)