Table of Contents

1 !

5 Port Solenoid Valve

3 (P, R) 2, 4 (A, B) VQ 1/2 VQ 4/5 26 pins/20 pins 25 pins IP67 compliant IP67 compliant IP67 compliant VQC 1/2 IP40 compliant IP40 compliant VQC 4/5 VQC 4/5 VQZ SQ VFS 1/4 3/8 (Rc, NPT, NPTF, G) 1/4 3/8 (Rc, NPT, NPTF, G) VFR VQ7 1/2 (Rc, NPT, NPTF, G) 1/2 (Rc, NPT, NPTF, G) C6 (for 6) C8 (for 8) C10 (for 10) C12 (for 12) N7 (1/4") N9 (5/16") N11 (3/8") 1/4 3/8 1/4 (Bottom ported)

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQC SQ VQ0 VQ4 VQ5 VQZ VQD Plug lead type Plug-in type 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port Rc 1/4: Rc 1/4 thread Rc 3/8: Rc 3/8 thread C8: One-touch fitting for 8 C10: One-touch fitting for 10 C12: One-touch fitting for 12 Lead wire length L0: 600 mm L1: 1500 mm L2: 3000 mm 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port Rc 1/4: Rc 1/4 thread Rc 3/8: Rc 3/8 thread C8: One-touch fitting

CJ2

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5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 13 2-M4 clamp screw Applicable connector: 9 Triangle mark indicator position EXH outlet Flat ribbon cable connector (20P) (Conforming to MIL-C-83503) Release for switching connector direction D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5

SYJ300/500/700

0.35 0.27 0.32 0.24 0.55 0.59 0.59 0.59 0.47 0.39 0.51 2.3 2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31 0.59 0.62 0.54 0.66 0.56 0.54 0.59 1/8 1/4 1/8 1/4 Body ported for internal pilot SYJ72 Type SS3YJ7-21 Type SS3YJ7-40 1/8 1/8 1/8 1/8 C6 C8 Type SS3YJ7-41 Base mounted for internal pilot Type SS3YJ7-42-01 SYJ74 1/4 1/4 Type SS3YJ7-42-C6 Type SS3YJ7-42-C8 1/4 Body ported for

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

4 Rc (PT)1/8 Rc (PT)1/8 Rc (PT)1/4 Rc(PT)1/4 P/R port Rc(PT)1/8 VZ R c(PT)1/8 Rc (PT)1/8 6 One-touch fitting Rc (PT)1/8 Rc (PT)1/8 A port C6 Port size C8 8 One-touch fitting VT M5 X 0.8 M5 X 0.8 X port (1) M3 X 0.8 VT Body ported SYJ7l2/SYJ7l2R Valve effective area (mm2) (Cv) (2) 10.6 (0.59) VP 1/8: 9.2 (0.51) C6: 8.8 (0.49) C8: 10 (0.56) Base mounted SYJ7l4/SYJ7l4R 10.2 (0.57) 10.2 (0.57

5 Port Air Operated Valve Series SYA3000/5000/7000 1

8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 Rc VSA4120-01 VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double 1 4 1 8 Rc 0.70 1 8 Rc VA 1 8 Rc 3 position closed center 1 4 1 8 Rc 0.86 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way,

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible The flow rate value and the device status can be figured out easily via the process data.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

SYJ VQZ300 Port size Symbol VQZ200 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc 1/4 1 C4 C6 C8 C10 M5 02 Metal seal Rubber seal 1 (P) 3 (R) VK (A) 2 N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P=19 1 21 6 Stations D side 1.8 (C6, C8) 17.5 3.5 20.5 10.5 300 75.5 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (C10) (02) 63 56 (11) PE port R 3 1 P (24) 9 2-Rc(PT)1/4 P(SUP) port 2-Rc(PT)1/4 R(EXH) port 21

A

16 3/8 3/8 3/4 5/8 1.57 1 1/2 3 3/4 1 1/4 1 3/8-24 325 (3.25) 1 1/8 3.9 1/2 0 7 1/2 1 1 1/4 1.18 2.34 4 1/4 1 3/8 3/4 5/8 2.72 8 1/4 3/4-16 3/4 7/8 1/2 5/8 1.57 1 1/8 1 1/2 3/8-24 4 1/2 1 1/4 1 400 (4) 4.7 1/2 0 7 1/2 1 1 1/4 1.18 2.34 4 1/4 1 3/8 3/4 5/8 2.72 8 1/4 3/4-16 3/4 7/8 1/2 5/8 Courtesy of Steven Engineering, Inc. !

New

/64 VX210 1 5/64 1/8 C8 13/64 5/32 9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.

CM2

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5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

SYA3000/5000/7000

110 2.5 4.3 [2.4] VFA Exhaust center Pressure center 0.23 [0.32] 0.97 [0.61] 2.2 0.39 0.58 P port: Single Double Closed center 100 106 2 position 3.2 0.26 0.77 3.2 0.37 0.82 1 4 C8 VFRA SYA720-C8 0.25 0.24 0.57 0.63 2.6 [1.9] 2.4 0.42 [0.46] 0.31 0.70 [0.56] 0.62 2.6 M5 x 0.8 One-touch ( ) 3 position 116 2.4 3.3 [2.4] Exhaust center Pressure center fitting for 8 EA, EB port : 1 8 VA 0.28

4/5 Port Air Operated Valve Series SYJA3000

2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at manifold base mounted, 2 position single operating

7.5

1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ2C60 [N.C., N.O. valve x 1 (each)] SJ2C60K with back pressure check valve SJ2C60 [N.C. valve, N.O. valve x 1 (each)] !0 y t r q e u w !2 i !

VZS

0 Tie-rod y, O-ring e, r, Seal A q Plug-in type With D-sub connector: Type 51F VVZS3000-1A-3-Port size (1) (-1) (2) Note 1) Bore -01: Rc 1/8, -C6: Embedded type One-touch fitting for 6, -C8: Embedded type One-touch fitting for 8. Note 2) Refer to page 3-7-5 for the model of D-sub connector type manifold block assembly.

MGG

1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!