Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Compact Manifold Regulator Series ARM5

Options Accessory Symbol Note 2) Oil-free Symbol None 0.35 MPa setting Note 1) Nonrelieving Without pressure display With pressure display Nil A Note 1, 2) Nil 1 2 3 4 5 6 7 Note 1) Pressure display means a pressure gauge or digital pressure switch is attached.

100

/set, with 4 bolts (Including a clip) How to Order Vacuum Port Adapter Assembly*2 n How to Order Ejector Assembly A AD2 ZL112A ZL112A EJ1 A Vacuum port adapter assembly *2 A vacuum port adapter cannot be installed when Nil is selected for the pressure sensor.

Digital Pressure Switch

Normal output Reversed output P_1 = A-(A-B)/4 n_1 = B+(A-B)/4 A = Max. pressure H_1 = (A-B)/2 H_1 = (A-B)/2 B = Min. pressure The set values of OUT2 become as follows "_", i.e. "P_2", "n_2" and "H_2".

IR1000/2000/3000

When using a pressure gauge upside down like Fig. (1), it may result in a shifting of the zero point reading. Make sure to use it in the direction like Fig. (2). Caution 1. When installing a pressure gauge on an existing regulator, be sure to reduce the set pressure to 0 (atmospheric pressure) before removing the plug. 2.

Common Supply Regulator

Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight. 2.

•

I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M .. Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

Vacuum Pad: Ball Joint Type

F Hexagon width across flats 3 3 C C 2 2 A A B B Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 10.5 13 38 ZPT16F-B5-A8 ZPT32F-B5-A10 16 18 32 35 2 13 16 49 40 50 ZPT F-B5-A14 (Without buffer/Male thread) M14 x 1 M5 x 0.8 Hexagon width across flats 19 5 5 20 D 5

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

VZM400

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

Pressure Sensor for General Fluids

Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight. 2.

NARM Series

14 Valve O-ring NBR 1 O-ring Bracket A P3 P5 7 2 O-ring NBR Bracket ass'y Bracket 136312 136412 2 1 set 2 Bracket B Hexagon socket head cap screw 28 X 25 X 1.5 35 X 31 X 2 8 15 O-ring NBR How to Order (1) When adding n stations to ARM : Regulator n pcs.

Pressure Sensor

-100 kPa 100 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OMG0004-D Dimensions PSE54(A)M3 M5 PSE54(A)-M3 PSE54(A)-M5 A 10.8 11.5 B 3 3.5 PSE54(A)01 N01 PSE54(A)R04 R06 PSE54(A)-R04 PSE54(A)-R06 A 4 6 B 18 20 PSE54(A)-IM5 PSE54(A)-IM5H -14No.PS-OMG0004-D Revision history A: For B: Complete revision C: Limited warranty and Disclaimer and measurement laws are added.