VDW30/40-XF

Rz 3.2 or less for sheet surface 500 Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Dimensions VDW30-G--C4 C6 /One-touch fitting for 4, 6 VDW40-G-/One-touch fitting for 8, 10 C8 C10 36 30 21 23 Approx. 300 32 17.5 20 Approx. 300 27 56 48 10 9 18 21 3 3 21 23 26 A A C4, C6 1 (IN) port C4, C6 2 (OUT) port C8, C10 1 (IN) port C8, C10 2 (OUT) port Dimentions A 3

Digital Flow Switch (Integrated display type)

If using straight entry piping, the material and tubing need to be taken into consideration when deciding panel cut-out spacing. 2 If a bend (R) is used, limit it to R3 or less. 3: Suitable for panel thickness of 1 to 3.2 mm.

Table of Contents

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

MY1

MX Applicable bore size Port variations MTS MY1B10 MY1H10 MY L R CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L L CX R R DR Note 1) Note 1) R R R L L R L L L -X 20L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

CRBU

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Compact manifold regulator ARM5 Series

ARM5B R 06 A Individual Supply Type 3. Semi-standard 1.

Vacuum Regulator

1 1.5 4 7 65 26.6 40.5 5.2 7 Options One-touch Fittings for Vacuum Regulator Bracket Assembly Bracket For IRV10(A) P601010-17 For IRV20(A) P601020-17 One-touch fitting for IRV10(A) 51A C6 VVQ1000 Bracket Fitting type Fitting size Nil L1 Straight Elbow Size 6 8 1/4" 5/16" Symbol C6 C8 N7 N9 One-touch fitting for IRV20(A) Bottom Bracket Assembly VVQ2000 C6 51A For IRV10(A) P601010-14 For IRV20

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Compact Manifold Regulator

Note 3) This option is available with the digital pressure switch. 732 Compact Manifold Regulator ARM11A/B Series Regulator Block ARM11B 1 A R 06 Z A q w e r u t y N Individual Supply Type ARJ 1.

ARM10/11

OUT fitting type AMR Inch size Metric size Straight Elbow Straight Elbow Symbol Symbol 4 5/32 6 1/4 ITV 4 6 5/32 1/4 04 05 16 17 54 55 66 67 Note 1) A pressure gauge with a full span of 0.4 MPa is attached. Note 2) The oil-free type has nongreased fluid contact areas. IC VBA A ARM11B 1 A R 1 06 Z Individual supply type VE 1 2 3 4 5 6 1.

ARM10/11

OUT fitting type AMR Inch size Metric size Straight Elbow Straight Elbow Symbol Symbol 4 5/32 6 1/4 ITV 4 6 5/32 1/4 04 05 16 17 54 55 66 67 Note 1) A pressure gauge with a full span of 0.4 MPa is attached. Note 2) The oil-free type has nongreased fluid contact areas. IC VBA A ARM11B 1 A R 1 06 Z Individual supply type VE 1 2 3 4 5 6 1.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

EXH SS5Y7-20 1/4 C10 3.60 0.93 0.88 0.27 3.60 0.93 2 to 20 (1) Valve stations Note) Values for 5 stations manifold with a 2 position single type valve. 4/2 (A/B) Location Valve 1,3,5 (P,EA,EB) Port 1/4 1/8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) Port size 4,2 (A,B) Port Manifold

PFxx-OMJ0005CN

8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

Digital Pressure Switch

Description Symbol Part number 01 N01 W1 WF1 M5 C4 C6 Bracket A A ZS-24-A Bracket B B ZS-24-B Bracket D D ZS-24-D ZS-35-C Panel mount adapter E ZS-35-D ZS-35-F Panel mount adapter + Front protective cover F ZS-35-G Accessories 1 / Part numbers Part number Option 1 ZS-24-A Bracket A with 2 mounting screws each of M3 x 5 L, M4 x 5 L ZS-24-B Bracket B with 2 mounting screws M4 x 5 L ZS-24-D

2-Color Display High Precision

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A P-1 H-1 n-1 Formula for Obtaining the Set-Value Min.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

A( ) A 24V 12V 100V SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 24V DC 12V DC 100V AC SOL SOL C(+) C ZNR Light DIN connector circuit with light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resistor LED: Emitting diode R: Resistor 4.3-2 Series VQ20/30 Manifold Caution Caution Valve Mounting How to Mount/Remove from DIN Rail After confirming the gasket is correctly placed under

PSxx-OMM0006CN

(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D

Table of Contents

Selection Step 1. Pad selection 1-A Theoretical lifting force 1-B Calculation method: Pad diameter 2.

Table of Contents

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +