0.4

) 22 20.5 7 Stations 1 2 3 n VFR D side U side ( 9.5) 45 65.5 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) VQ7 C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 B 2 (1.5) 37.5 A L n Dimensions Formula L1 = 22n + 24 n:

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

93.5 2 66 9 8 0 40 COM PWR 35 52 61.5 D side U side Stations 8 7 6 5 4 3 2 1 n C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A 12 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 One-touch

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

93.5 2 66 9 8 0 40 COM PWR 35 52 61.5 D side U side Stations 8 7 6 5 4 3 2 1 n C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A 12 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 One-touch

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

Base Mounted Metal Seal/Rubber Seal Series VQ

3 n (41.5) (33) (59.5) 58 Residual pressure release manual override 2-Rc1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting assembly for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 (1.5) 37.5 17.5 A 1 2 3 4 5 6 7 8 10 11 12 L n 13 14 15 16 Dimensions Formula L1 = 22n + 24

Table of Contents

] 60 60 11 2, 3 24 [23] 2n-Rc 1/2, 3/4 20 91 179 L1 L2 9 (Electrical entry) (A, B port) R5.5 Manual override (Non-locking) D side 21 B B B B Manual override (Non-locking) n A A A B B B A A A A 3 1 2 2 P = 51 (Pitch) 1 3 6 [2] n Stations R 1 1/2 250 105.5 Stations 176.5 D side 209 AMC810-14 Exhaust cleaner (Option) 250 135 D side mounting 125 U side External pilot port 194 135 Rc 1/8 125

4/5 Port Solenoid Valve

to 20 stations 2 to 15 stations Valve stations Location Base Side Base Bottom Valve Top A, B port Porting specifications Direction 1/8 1/4 P, R port C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size A, B port 1/8 Flow Characteristics Flow characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [

Metal Seal/Rubber Seal Series VQ Body Ported

9.5) 45 65.5 (41.5) (33) (59.5) 58 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting for 6 Residual pressure release manual override C8: One-touch fitting for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 25 B 2 (1.5) 37.5 17.5 A Dimensions Formula L1 = 22n + 24 n: Station 7.5 4 L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 46 75

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

With external pilot specifications (Pitch) 20.5 15.8 9.5 17.5 P = 16 11.9 9.2 25.2 11.8 5.4 30.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 49.9 E 3/5 E 3/5 E 3/5 E 3/5 63.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 1 P P 1 1 P PE One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 3/8" PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16

Valve Single Unit

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Series SV

(With 2 input blocks) With external pilot specification 46.5 (Pitch) 15.8 9.5 16.5 20.5 17.5 P = 16 M3 M12 11.9 9.2 17.7 25.2 30.6 3 3 4 A 4 A 4 A 4 A 4 A 3 3 3/5 E PWR 49.9 42.7 4 A 4 A 4 A 4 A 4 A E 3/5 3/5 E PWR 2 2 E 3/5 63.5 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 1 1 1 1 1 P P 1 BUS 0 P 1 1 P BUS 0 0 0 X PE PE x One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, N3 6

VFR

1Bore size , VV5FR5-01FUStation 1Bore size Light/Surge voltage suppressor 235.5 204 (72) 60 11 4 60 U side Manual override (Non-locking) 6 [2] 21 R5.5 B B B B A A A A n B B B A A A B B B B A A A A 3 L1 L2 2 11 11 71.5 (Pitch) P = 51 Pitch P = 51 71.5 1 Stations 2n-Rc 1/2, 3/4 (A, B port) 20 24 [23] 105.5 176.5 209 Plug assembly: VVZS3000-21A(Option: Refer to page 3-5-8.) 2n-Rc 1/2 58 28 70

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Flow Characteristics Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv Flow characteristics 1(P), 5/3(R) port 2(B), 4(A) port 1 4/2 (P A/B) 4/2 5/3 (A/B R) VV5Z5-21P-01 VV5Z5-21P-C6 VV5Z5-21P-C8 VZ523 1/4 1/4 1/4 2.1 1.4 1.8 0.36 0.32 0.37 0.55 0.36 0.50 2.3 2.1 2.1 0.26 0.24 0.20 0.54 0.50 0.50 1/8 C6 C8 Note) Value at manifold base mounted, 2 position single operating How

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

VQZ1000/2000/3000

2 2 A A A 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5

V100

actuation Port size {2(A) port} (A) 2 N.C.

VZ5000

2 to 20 stations Valve Rc Rc Rc 1 4 1(P), 3/5(R) port 4(A), 2(B) port 1 8 , C6, C8 1 8 Port size Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50

VQC

B A B A B A B A A A B 143 80 34.5 Mounting hole for 2-M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692 19