I

(V) 5 1.5 0.7 3 2.5 1.3 AC125 0.1 AC250 0.8 1.5 2 0.5 1 3 DC30 4 2 3 3 0.1 DC125 0.05 0.4 0.05 0.4 Insulation Resistance 100 M@ 500V (DC) *High Inrush Circuits D I M E N S I O N S P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S IS3000 H O W T O O R D E R P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S IS3000 IS3 0 C O N N E C T I O N L A M P 0 Rc(PT) 1/ 4 1 Flange No

V

5 ~ 60C / 40 ~ 40F Temperature Rc(PT) 1/8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc

Vacuum

(mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum

(mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Regulator for 2 MPa ARX 20

G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

NARM Ser ies

Relief style Port size/Weight Model Porting Port size Weight lb (g) Small Size Pressure Gauge 15mm Reverse flow function available on the standard model IN OUT Total weight (n: stations) Regulator (Except manifold) 1 8 1 8 (80 X n) + 23 Common IN .13 (57) NARM1000 1 8 1 8 (79 X n) + 25 Individual IN Common IN 1 4 1 8 (188 X n) + 43 NARM2000 .3 (136) Individual IN 1 8 1 8 (187 X n) + 45 Space

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

ARX Series

ARX Series Specialty Regulators Regulator for 290psi (2MPa) ARX20, 21 Specifications ARX20 Model Piston regulator Regulator construction Relief type Relief mechanism NPT 1/8, 1/4 Piping port size NPT 1/8, 1/4 Pressure gauge port size 435 (3.0) Proof pressure psig (MPa) 290 (2.0) Maximum operating pressure psig (MPa) ARX20-N02 7~120 (0.05 to 0.85) Standard Regulating pressure range psig (MPa

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve

S Couplers

The figures in ( ) indicate the internal diameter of the applicable hose. 14.0 15.0 16.0 18.0 46.0 46.0 46.0 46.0 16 19 19 33 60.9 60.4 59.9 58.9 70 72 73 81 6 (1/4") 8 (1/4") 9 (3/8") 12 (1/2") 6 (1/4") 8 (1/4") 9 (3/8") 12 (1/2") 27.1 27.1 27.1 27.1 4.5 5.0 8.0 8.0 4.5 5.0 7.7 9.0 7.2 9.0 11.3 15.0 7.2 9.0 11.3 15.0 3 S Couplers Series KK130 Plug (KK130P) Socket (KK130S, L) Nut fitting

Process Pump

P Panel mount union U Union Ordering Example OUT side Tube size 4 x 3 LQ1U22-S Union SMC PB1313AS-1S07 Process pump PB1313AS-1S07 1 LQ1E21-S (Union elbow) 1 LQ1U22-S (Union) 1 LQ1E21-S Union elbow Tube size 6 x 4 Note) Fittings ordered together with the process pump will be shipped in a separate package.

25

Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

SMC Electronic Switch Series Variations

Optional Port size Sealant R(PT) 1/8 NPT 1/8 None With sealant 01 N01 S X201 Lead wire length 3m Operating pressure range 0.1 to 0.6MPa X202 Lead wire length 3m Operating pressure range 0.1 to 0.6MPa X215 3.12-1 Mechanical Style Pressure Switch IS1000 Construction 5 50 20 500 t PSE u ZSE4 ISE4 0.1 (1) 0.2 (2) y 0.3 (3) ZSE5 ISE5 0.4 (4) i MPa {kgf/cm2} 58.5 ZSE6 ISE6 q Components !

Digital Pressure Switch

(See Figure on page 59) Switch output NPN or PNP open collector output: 1 output NPN or PNP open collector output: 2 outputs Max. load current 80 mA Max. applied voltage 28 V (NPN output) Residual voltage 1 V or less (at 80 mA load current) 4 ms or less (with anti-chatter function: 20 ms, 100 ms, 500 ms, 1000 ms, 2000 ms, 10 s, 30 s or 60 s selected) Delay time Short circuit protection Provided

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-89 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-89 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8)