PFxx-OMU0002

Nominal thread size Required torque Port size Width across flats of attachment Rc1NPT1 36 to 38 Nm 1 45 mm Rc1 1/2, NPT1 1/2, Rc2, NPT2 48 to 50 Nm 1 1/2 60 mm 2 70 mm 16 No.PF-OMU0002-D Wiring Connection Connections should only be made with the power supply turned off. Use a separate route for the product wiring and any power or high voltage wiring.

PFxx-OMJ0005CN

0.835.3 1.888.3 4177 8353 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 CO2 0.817.6 1.844.1 488 8176 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 N2Ar 0.837.1 1.892.7 4186 8371 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 / CO2 0.818.5 1.846.3 493 8185 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 -2 0.1 CFM10 -2 1 CFM10 -2 1 CFM10 -2 / 0.1 CFM10 / 0.09.0 0.09.9 09 09 310 -1 310 -1 310 -1 310 -1 ft ft ft ft 310 -1 0.1 ft

AC Servo Motor Driver (MECHATROLINK-II type)

Alarm FL-2*2 CPF00 Digital Operator Transmission Error 1 CPF01 Digital Operator Transmission Error 2 A.

Water-cooledThermo-chiller

Time 2 min. N2 purge port Option Cooling capacity: Max.30 kW 1. Normal operation Option Customers machine Circulating fluid outlet Up to 30 kW cooling capacity achieved.

ChemicalThermo-con

Please contact SMC for fluids other than those described on the check list. 2. Caution for the use of fluids with high permeation When the Chemical Thermo-con is used for a fluid with high permeation into fluorine resin, the permeation can affect its life. If the fluid also generates corrosive gas, perform N2 supply and exhaust (N2 purge) inside the heat exchanger. 3.

AC Servo Motor Driver (Pulse input type)

Configuration Minimum equipment and wiring requirements to get started 1 Provided Ex) 200 V AC (*1) by customer 6 5 Provided 1 by customer 7 2 3 (-) PC 1 2 4 (+) 8 C D 11 21 9 U 2 Electric Actuators Ex) LEF V W Provided by customer 3 10 (*1) Refer to LECSB Operation Manual, Chapter 3 if the power supply voltage is 100VAC. 1 Driver LECSB*-S* 2 Motor cable LE-CSM-*** 3 Encoder cable LE-CSE-

Clean Air Module

LLB3 LLB4 Note ZFC Clean regulator assembly 1 LVB3-1 LVB4-1 SF Pressure outlet port assembly 2 LVB3-2 LVB4-2 Without flow adjuster LVB2-3 LVB4-3 ON/OFF valve assembly/ Air operated valve SFD 3 With flow adjuster LVB2-3-1 LVB4-3-1 ON/OFF valve assembly/Manual operation valve LVB2-3-2 LVB4-3-2 LLB LLB Restrictor assembly 4 LVB2-4 LVB4-4 LVB3-65 to 100 L/min With L-type connector

PFxx-OMO0004CN

-2No.PF-OMO0004CN-E / 1 1.5 *3) 1 1 [] -3No.PF-OMO0004CN-E () () () N2 () -4No.PF-OMO0004CN-E () * UL UL1310 2 UL1585 2 ,30[Vrms]42.4[V ] 2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMO0004CN-E * FG (49 N () ,IN () () -6No.PF-OMO0004CN-E * 6 33 () 30 m DC(-)() -7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB

PFxx-OMS0001CN

-2No.PF-OMS0001CN-A / 1 1.5 *3) 1 1 [] -3No.PF-OMS0001CN-A () () () N2 () -4No.PF-OMS0001CN-A () * * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMS0001CN-A * FG (49 N 9022545 ,IN () () -6No.PF-OMS0001CN-A * () 6 33 () 10 m DC(-)() -7No.PF-OMS0001CN-A * () () CE 050 -8No.PF-OMS0001CN-A * 1015 10 /23% 3 LCD * OUT -9No.PF-OMS0001CN-A

VXA21/22

IN MaterialO Model Body Seal Brass, Stainless steel NBR, FPM, EPR Orifice size (mm) Model Port size Rc(PT) VXA212 , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 , 3 8 1 2 0 2 3 4.5 VXA213 0 2 VXA223 0 2 4.5 6 8 VXA224 0 2 VXA225 0 2 10 VXA226 0 2 4.1-57 VXA21/22 Normally Closed (N.C.)/Normally Open (N.O.)

PFxx-OMP0001CN

L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD

Metal One-touch Fittings

(See Fig. 2.)

KQ-OMS0022

(See Fig. 2.)

Digital Flow Switch (Remote type sensor unit)

PFM5-(N)01/(N)02/F01-1/2 -25No.PF-OMJ0016-J PFM5-(N)01L/(N)02L/F01L-1/2 -26No.PF-OMJ0016-J PFM5S-(N)01/(N)02/F01-1/2 -27No.PF-OMJ0016-J PFM5S-(N)01L/(N)02L/F01L-1/2 -28No.PF-OMJ0016-J PFM5-F02-1/2 -29No.PF-OMJ0016-J PFM5-F02L-1/2 -30No.PF-OMJ0016-J PFM5S-F02-1/2 -31No.PF-OMJ0016-J PFM5S-F02L-1/2 -32No.PF-OMJ0016-J PFM5-C/N-1/2 -33No.PF-OMJ0016-J PFM5-C/NL-1/2 -34No.PF-OMJ0016-J PFM5S-C/N

KFx-OMV0011

In particular, for the swivel elbow, the stud may come off. 2) If the fitting is tightened with excessive torque, a large amount of sealant will seep out. Remove the excess sealant. 3) Insufficient tightening may cause seal failure, or loosen the threads. 4) Reuse 1. Normally, fittings with a sealant can be reused 2 to 3 times. 2.

Space Saving Vacuum Ejector Series ZQ [Option] Note) CE compliant: For DC only.

1, 2, 3 and 4.

AIR FLOW CONTROLLER. FLOW CONTROLLER FOR AIR. 0.48500 lb. Q46.

Please contact us for the latest version.sales@ocaire.com, CYL, TIE ROD, NON-ROT, ACTUATOR, MB TIE-ROD CYLINDER, RK, 80MM MB NON-ROTATING, .00000 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)MBNon-rotating rod typeMBKDouble acting, Single rod--666

Please contact us for the latest version.sales@ocaire.com, CYL, TIE ROD, NON-ROT, ACTUATOR, MB TIE-ROD CYLINDER, RK, 80MM MB NON-ROTATING, 9.98693 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)MB1Non-rotating rod typeMB1KDouble acting, Single rod--666

Please contact us for the latest version.sales@ocaire.com, CYL, TIE ROD, NON-ROT, ACTUATOR, MB TIE-ROD CYLINDER, RK, 80MM MB NON-ROTATING, 15.43235 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)MB1Non-rotating rod typeMB1KDouble acting, Single rod--666