For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

(Station 5) 02 2 stations : : Option Prefix "" mark on valves to be assembled on the manifold. 20 20 stations Write sequentially from the 1st station on the D side None DIN rail mounting DIN rail mounting (Without DIN rail) D DO Uside Dside Stations...3.2...1 A port P1 How to Order Valve VQ M C6 2 1 1 1 G VX VNl Series/Orifice Port size VQ Port size One-touch fitting for 6 One-touch fitting

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

Pilot valve symbol 1 2 3 4 5 6 100 AC 200 AC 110 AC 220 AC 24 DC 12 DC q w e r t y u i Nil Y Nil Y Nil Nil Nil Nil K1 K1 J1 J1 Q1 Q2 N1 N2 Combinations (1) to (8) in the above table are the only possible options. 850

PFxx-OMX0002

/UKCA marked Piping Piping specification Rc1, NPT1, G1 Rc1 1/2, NPT1 1/2, G1 1/2 Rc2, NPT2, G2 Materials in contact with fluid Aluminum alloy, PPS, HNBR (Sensor: Pt, Au, Ni, Fe, lead glass (not RoHS compliant), Al2O3) Lead wire with connector 3 m Rc 610 g 1190 g 1680 g Piping port sizes NPT 610 g 1190 g 1680 g Weight G 630 g 1220 g 1720 g Lead wire with connector +90 g -91No.PF-OMX0002-B

Digital Flow Switch ( compatible)

(page 83) 2030 0x07EE 0 R/W Cut (Zero cut-off setting) U8 1 Y Setting range 0 to 10 1.0% increments 0: oFF 1: rAC 2040 0x07F8 0 R/W inP (External input setting) U8 1 Y (Accumulated value reset) 2: rPb (Reset peak/bottom) 2100 0x0834 0 R/W AoUt (Setting of analogue output) U8 0 Y 0: 1-5 (1 to 5 V) 1: 0-10 (0 to 10 V) Setting of analogue output (Voltage output type only) 1 R/W FrEE (Analogue

Digital Flow Monitor

(increment of 0.1 sec.), 1 to 10 sec. (increment of 1 sec.), 20 sec., 30 sec.

ZSE30/ISE30

or less (70mA or less for current output) Current consumption Panel mount/Bracket Option Features 2 2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 3.2 to 12 1 to 4 M5 to 1/2 1/8" to 1/2" Refer to the Web Catalog for details.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

1 !

IZSE_X101

1 Output 3-Screen Display High-Precision Digital Pressure Switch RoHS IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

ZSE20(F)_ISE20

1 Output RoHS 3-Screen Display High-Precision Digital Pressure Switch IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

5 Port Solenoid Valve Series SQ1000/2000

N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.

VK3000

Unrestricted 300/50 m/s2 Fluid Ambient and fluid temperature Response time (at the pressure of 0.5 MPa) (1) Manual override Lubrication Mounting orientation Impact/Vibration resistance (2) Enclosure Note 1) Based on dynamic performance test, JIS B 8419: 2010.

VK3000

direction 01 1 station Solenoid on same side of A and B port A port: Rc 1/8 B port: Rc 1/8 Nil P port: Rc 1/8 Thread type R port: Rc 1/8 20 Type S42 Solenoid on same side of A and B port 20 stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C4 (4mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side), Operation Manual/Calibration Certificate: K (with

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: F1 (G1/8), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: M (SI units only), Bracket: S (Bracket (mounting position: Stream side))

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C6 (6mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C4 (4mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: 01 (Rc1/8), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: S (Bracket (mounting position: Stream side))

2

Nipple: KQ2N Applicable fitting D Model L M d Min. port size 2 x Applicable fitting Weight (g) D d 1/8 KQ2N01-99 36 13.3 2.1 0.2 3/16 KQ2N05-99 38 13.3 3.4 0.4 1/4 KQ2N07-99 39 13.3 4.6 1 3/8 KQ2N11-99 49 15.6 7 2 1/2 KQ2N13-99 51 17 9.5 3.5 L M M Reducer Nipple: KQ2N Applicable fitting Model L M1 M2 d Min. port size Weight (g) a b Applicable fitting b 1/8 5/32 KQ2N01-03 36.5 13.3 13.3 2.1