VHK

10 46 61 30.5 30.5 21.5 4 65 14 20.8 20.8 16.1 3.2 VHKlR-12F-12F 22 12 12 46 63 31.5 31.5 21.5 4 67 14 21.8 21.8 17.5 3.2 Bracket mounting dimensions Tube O.D (mm) Model Weight (g) S Bracket assy No.

VHK

R-12F-12F 22 12 12 46 63 31.5 31.5 21.5 4 67 14 21.8 21.8 17.5 3.2 Applicable tubing O.

Speed Controller with One-touch Fitting

1/4" 11.2 21.3 20.2 36.5 AS131F-U10/32E-07A 9.6 9.4 26.5 25.4 23.5 22.4 13.3 6 11.5 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation 559 AS Series For R, NPT thread Dimensions/ Elbow type Seal method: Sealant For R, NPT thread D3 Applicable tubing O.D. d D1 A L4 L3 M T L1 H (Width across flats) L2 Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L4 L1 L2 L3 M d O.D.

KF

15 13.7 14 15 13.7 16 14.7 16.8 16 14.7 16.8 17 15.7 16.8 17 15.7 16.8 21.3 22.3 21 21.3 22.3 21 23.3 22 25.3 23.3 22 25.3 25.5 24.2 25.3 25.5 24.2 25.3 9.5 28.2 21.5 4 5 11 30.2 23.5 12 14 16.2 8 12 28.2 21.5 5 6 16 Applicable tubing Connection thread 30.2 23.5 18 31.8 24.5 12 5.5 6.5 20 33.8 26.5 14 10 17 18.8 23 12 31.8 24.5 7.5 6.5 26 33.8 26.5 14 24 7 8 30 19.3 34.3 27.5 14 19 12 27

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 11n + 15.5 L2 = 11n + 55 n: Stations (max. 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 191.5 231 262.5 273 16 L1 L2 (L3 ) (L4 ) 26.5 66 87.5 98 37.5 77 100 110.5 48.5 88 112.5 123 59.5 99 125 135.5 70.5 110 137.5 148 81.5 121 150 160.5 92.5 132 162.5 173 103.5 143 162.5 173 114.5 154 175 185.5 125.5 165 187.5 198 136.5 176 200 210.5 147.5 187 212.5 223 158.5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M1 D3 L4 Max. Min. Max. Min.

Electric Actuators

[mm] Overhang: L4 [mm] Overhang: L4 [mm] Overhang: L4 [mm] 160 160 160 160 L4 120 120 120 120 80 80 80 80 40 40 40 40 0 0 0 0 0.0 0.88 1.76 2.64 3.53 4.4 0.0 0.88 1.76 2.64 3.53 4.4 0 0.44 0.88 0.32 1.76 2.2 0 0.44 0.88 0.32 1.76 2.2 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 Overhang: L5 [mm] Overhang: L5 [mm] 160 160 120 120 80 80 40 40 0 0 0 0.22 0.44 0.66 0.88

Integrated Controller

[mm] L4 [mm] L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30

Digital Flow Switch ( compatible)

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -98No.PF-OMZ0002-A Dimensions PF2MC7501/7102/7202 Symbol Model Piping port size A B D E F H K L N PF2MC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PF2MC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PF2MC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Bracket dimensions

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

14 10 210.5 200 181 15 11 223 212.5 191.5 16 12 235.5 225 202 17 13 248 237.5 212.5 18 14 248 237.5 223 12.5 15 260.5 250 233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Weight (g) d L4 Model L3 D1 T H D2 D3 L1 L2 Max. Min.

Digital Flow Switch ( compatible)

output type PFMC7###-##-L3/L4#-### -25No.PF-OMY0002 Outline of Settings [Measurement mode] Power is supplied The output will not operate for 3 seconds after supplying power.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 C6: Onetouch fitting for 6 VVQZ200010A2 VV5QZ2205C 1.12-19 VQZ1000/2000/3000 Body Ported Dimensions: VQZ1000 VV5QZ12 C Station Grommet (G) 27.5 (11) (35) 44.5 Mounting holes (5.5) n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread 20 (7.5) DIN rail clamp screw U side n 5 4 4 4 4 4 SMC SMC 14 P=10.5 2 2 2 2 (L4) (L3)

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

285.5 11 142 191 211 237.5 248 16 192 241 261 287.5 298 12 152 201 221 250 260.5 15 182 231 251 275 285.5 L1 L2 (L3) (L4) (L5) *SG Type: L2=10n+68 (L3)=L3(Std.)+25 (L4)=L4(Std.)+25 (L5)=L5(Std.)+25 11 Series VQ100 Non Plug-in Unit Manifold VV3Q12 Phillips/ordinary round head screw M1.74 L1 5 L2 3 Manual override 2-3.2 Mounting hole 10.8 3.5 8.9 P E 28.7 11 P E 26.5 33.8 44.8 4-M5 (P,E port

240

L4 [mm] L4 [mm] L4 [mm] L4 [mm] 120 120 120 120 X 80 80 80 80 Me m 40 40 40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Me 150 150 150 150 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 100 100 100 100 Wall Y L5 50 50 50 50 0 0.2 0.4 0.6 0.8 1 0 0 0 0 0 0.2 0.4 0.6 0.8 1

F

17 14 31.5 15.5 13 15.5 3.4/2.9 5/32 1/4 KQE03-35 1/2-20 17.46 17.46 31.5 15 14 16 3 4 18 KQE04-01 M12x1 14 14 27.5 11 13 16 5.6 3/16 1/8 KQE05-34 9/16-18 17.46 17.46 28.5 13 15 16.5 3.5 4 14 KQE04-02 M12x1 17 14 31 15 13 16 5.6 1/4 1/4 KEQ07-35 9/16-18 17.46 17.46 30.5 14.5 15 17 4.6 6 18 KEQ06-01 M14x1 17 17 28 11 15 17 13.1 5/16 3/8 KQE09-36 3/4-16 22.23 22.23 35.5 15 20 18.5 6 6 14 KQE06

CRQ2

34 69 (11) 68 14 39 14.5 16.5 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 16 16 5.2 49 78 (13) 76 16 47 18.5 55 40.4 Size K Q S W Keyway dimensions TF (H9) TG (H9) TL Rotating angle JJ US TA TD UW G L TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 20 11.5 4 1 13.5 27 4 4 2.5 15 59 24.5 74 8 11 9.6 M5 x 0.8 depth 6 0 0.03 30 4 33 4 20 13.5 2 19 36 4 4 2.5 18 83 65 27 10 13

Compact Manifold Regulator Series ARM5

L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the handle is unlocked.

Table of Contents

Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-111 to 16-1-13 for Precautions on every series.