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Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Note 3) Not available for piping specifications of 01 and N01.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(In comparison with control by speed controller) Applicable model: ASV310F, ASV410F, ASV510F C With spatter cover Body size K Hexagonal lock nut 1 2 3 4 5 M3 M5 1/8 1/4 3/8 Note) Option should be indicated in order of C and K. Available only for ASV310F, 410F and 510F. Seal Seal Symbol Applicable model Silencer and One-touch fittings are installed.

ARX Series

B G P BG GP 1 Specialty Regulators ARX Series Regulator for 290 psi (2 MPa) ARX20, 21 Flow Characteristics ARX20-N02 130.5 ARX20-N01 Conditions: Supply pressure 290 psig 130.5 116 116 101.5 101.5 Secondary pressure (psig) Secondary pressure (psig) 87 87 72.5 72.5 58 58 43.5 43.5 30 30 15 15 0 3.5 7.1 10.6 14.1 17.7 21.2 24.7 28.3 31.8 35.3 0 3.5 7.1 10.6 14.1 17.7 21.2 24.7 28.3 31.8 35.3

PFM7

Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch

1

0 MGP CY CX CK1 C(L)K CDJZ2B10/16-Z-B C(L)KU CKQ Component Parts CKZ2N No.

V

C I R C U I T ZSM1-115 H O W T O O R D E R V A C U U M S W I T C H S E R I E S ZSM1 ZSM1-121 ZSM1 ACCESSORIES CONTACT PROTECTION BOX ACCESSORIES V A C U U M S W I T C H S E R I E S ZSE1 C O N N E C T I O N Diaphragm type switches have no built-in contact protection circuit.

I

E S W I T C H: S E R I E S IS1000 S W I T C H CHARACTERISTICS E L E C T R I C A L C I R C U I T Up to 100V AC/DC Max Contact Capacity IS1000 01 2V (AC), 2W (DC) Voltage 24V AC, DC or less 48V AC, DC 100V AC, DC P O R T T H R E A D Max Operating Current 50mA 40mA 20mA 01 1/8 PT N01 NPT1/8 Shock Resistance 30G Response Time 1.2ms Set Pressure Range Lead Wire Length *Note.

Digital Pressure Switch

0 kPa 5 kPa X580 10 kPa -10 kPa 0 kPa 10 kPa -60No.PS-OMV1001-C Dimensions Body dimensions -61No.PS-OMV1001-C Mounting brackets Bracket A Bracket B -62No.PS-OMV1001-C Bracket C -63No.PS-OMV1001-C Panel mount adapter Panel mount adapter + Front protective cover -64No.PS-OMV1001-C Panel cut-out dimensions Single Pressure switch Two or more in a row n: The number of the Pressure switch

Vacuum

C C t . : . !

Vacuum

C C t . : . !

Vacuum System Peripherals:

ZP Flow characteristics C (dm3/(sbar)) Effective area (mm2) (Cv) Port size Rc Model Orifice dia.

Digital Flow Switch (Integrated display type)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

Digital Flow Switch (Remote type sensor unit)

N-1/2 -33No.PF-OMJ0016-J PFM5-C/NL-1/2 -34No.PF-OMJ0016-J PFM5S-C/N-1/2 -35No.PF-OMJ0016-J PFM5S-C/NL-1/2 -36No.PF-OMJ0016-J Panel cut-out dimensions Flow adjustment valve A 0.5 None 54 0 0.5 With flow adjustment valve 74 0 1: These are the minimum dimensions for bottom entry piping.

SMC Electronic Switch Series Variations

All data given in a technical specification sheet is based on 25[C]. The temperature range is dependent on the product series. Normally SMC products are rated from 0 to 50[C] or 0 to 60[C]. The failure predict function allows the user to anticipate possible maintenance requirements. How does it work?

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520

Pressure Switch/Reed Switch Type

Example) IS10E-30N03-6PRZ 0.1 0.3 0.2 0.4 MPa q V C Description Symbol Body size B 30 40 20 Left Right Nil Rc V V V V V V V V V w N F V Thread type NPT G + A D Port size 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 V V V V V V V V V V Filter regulator e V Port size A B C D E Applicable model Model Port size IS10E-2001 IS10E-2002 IS10E-2003 IS10E-3002 IS10E-3003 IS10E-3004 IS10E-4002 IS10E-4003

Precision Regulator

Diaphragm( A) IN BLEED BLEED Flapper Nozzle Fixed orifice Exhaust valve Diaphragm(C) SUP side passage OUT SUP Main valve Valve guide Screw displ m Adjusting spring N/m Fixed or ific e SUP Force N Fo rc e N Nozzle flapper MPa/ m Diaph. (C) m2 Main valve MPa/ m (S) 1 1 Displ m Displ m Daiph (A) m2 press MPa Press Press. spring Compd. spring Compd.

Precision Regulator

We guarantee that the product does not have any defects in components, materials or assembly. c. We guarantee that the product complies with the outline dimensions provided. d.

Pressure Sensor

M5 R06 R07 N01 Port size M5 x 0.8 male thread 6 reducer type 1/4 inch reducer type Wetted parts material Pressure sensor: Silicon, O-ring: NBR Body: Stainless steel 304 Body: PBT With sensor cable (3 m) 41 g 38 g Mass Without sensor cable 7 g 3.8 g -12No.PS-OME0004-G Analog output Range Rated pressure range A B C For vacuum 0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -101 to 101 kPa -101