Series AK1000

in.Hg to 30 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa Refer to the following porting configurations.

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 18 2 x 5.4 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 431 IZS40/41/42 Series Dimensions Ionizer/IZS41, 42 30 44 304 6.8 30 85 9 60 50 A 60 x (n-1) L n (Number of emitter cartridges), L Dimension L (mm) IZS4-340 IZS4-400 IZS4-460 IZS4

C95

RT T V VA VB 4 4 5 9 11.5 17 164 182 195 224 259 289 260 290 333 362 431 471 6 6.5 8 8 10 10 37 41.5 47.5 55 61 68 4 4 5 5 5 5 4 4 6 6 8 8 4 4 4 4 4 4 17 19 24 24 30 30 6.5 9 10.5 12 14 15 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 13 14 15.5 16.5 19 19 6.5 8 9 8.5 10.5 10.5 32 40 50 63 80 100 26 30 37 37 46 51 34 39.5 47 55.5 61.5 69.5 15 17 24 24 30 32 10 13 16 16 21

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H I J K Stroke 5 5 D C 20 +38 +10 +28 I 30 +48 +20 40 +84 +30 +54 50 +94 +40 J H F Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) A B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

, 50 10, 20, 30, 40, 50 Stroke (mm) 0 stroke 0 stroke 1.0N {0.10kgf} 2.0N {0.20kgf} Spring reactive force Stroke end Stroke end 3.0N {0.31kgf} 5.0N {0.51kgf} Without detent (J), With detent (K) Detent specifications Weight Table (g) Vacuum entry Female thread One-Touch fitting Pad diameter (mm) M5 x 0.8 Rc(PT)1/8 4 tube 6 tube 8 tube 30 32 33 10 to 16 128 133 139 20 to 32 158 159 167

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

Ionizer Nozzle type IZN10 Series IZS

30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 445 IZN10 Series Flow Rate Characteristics (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 (3) Female threads for piping/IZN10-11 With Stainless steel 316 One-touch fitting + Anti-static tubing 0.7 Energy saving static neutralization nozzle/IZN10-01 0.3

0.5

Fine particles are generated due to wear of emitters and motor sliding during operation. 26 IZF10/IZF10R Series Dimensions 96 82 80 79 39 37 110 121 96.5 94 103 Holding bolt Bracket 60.3 6.5 46 1 Power supply switch LED indicators Balance adjustment trimmer IZF10R 98.9 Air flow adjustment switch 64.1 Without bracket (39) 30 3 x 5.5 through 33.5 1.5 4 23 25 24.5 (46) 50 12.5 66.8 5.5 5.5 30

C95Series

oO OUT 12,17 304 609 913 1217 1522 1765 30 IN 11 .08 277 554 831 1108 1385 1606 Note) Theoretical outpul(lbl) :: Pressure (pSI) X Piston area (IrI(:h2) Bore SlZ9 .

Title not found

ble acting Single rod o12, o16/5to30 o20, o2t5 io 50 o32, @40l5lo 1N o50, 063/10 io 1m Double rod 612, E1U5lo 30 amlo @Q/5to50 o50, 0631 0 to 50 Large bor lize Double acting Single rod101o 300 Double rod 10 to 300 Standard Double acting Single @d o12. a16/5 lo 3A o20 p2t510 50 o32, o40l5 to 1 00 o50 to o10cy10 to 100 Double rod 012, 016/510 30 a20. o25/5 lo 5A 632, 64US lo 1OA o50 lo 0100

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

Applicable rotary actuator Applicable air gripper Size Page Size 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ MRQ MDSUB MSQ MHZ2 MHZJ2 MHL2 MDHR MHS 12-25 MHK MHS MHC2 MHT2 MHW2 10-25 10/16 MHY MRHQ 2.11-8 D-A72/A73/A80 Grommet D-A72H/A73H D-A76H/A80H 2.11-9 Rail Connector 2.11-10 D-A73C/A80C D-A53/A54/A56

I

re 3up9aasor circdl yoltage suppae66or ckcuit (cromfte'tlype) (Gromm6tterminal) (olN cmnector] (Conduit teminal) NVF5000 # NW5F5-20 Manifold NVF3000 NW5F3-30 Type CYL port Exhaust B mount Common, lndividual o Siltr 15 Port Pilot TyPe/Rubber Seal L,lSeries NVFSOOO symbol Body Ported Doubr.

3M/SMseries

B mount NW5F3-30 side/ Base side/ Base 7oP/ valve ]4NPIF %NPIF }{NPTf ).I|PTF NVF3O30 NVF3O33 x Supoly ls alwaya conmon. Accessories oxTl 55-'t 71 TA HowTo Order Manifold Base NVVsF3 Sris '{VF3O@ manitold 8ymbol 02 2 stations 20 2O stations Series NVFSOOO Construction/Parts List I SUP EXH,2 P,E, Douue Solnoid Symbol "'qlb P.E. EXH.T SUP 3 Fotiition qosd Center Maln Pa.ts No.

Gun Type Ionizer

Cable length: 3 m Nozzle assembly Emitter assembly IZG10 NT IZG10 A001 01 Nozzle type Symbol Type 01 Standard nozzle 02 Bypass nozzle*1 Standard nozzle Bypass nozzle *1 This nozzle is complaint with the OSHA standard for hand and portable powered tools and equipment, general (1910.242b) requiring that static pressure at the main orifice shall not exceed 30 psi (210 kPa).

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: B (Body: Brass; Poppet: 316 SS; Diaphragm: 316 SS), Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Inlet: 40 [0 to 4000 psig (0 to 28 MPa)], Gauge Port, Outlet: V3 [-30 in.Hg to 30 psig (-0.1 to 0.2

NCRAI seies

W tu"b" -30mm: 90" or 180" onv Special order onfy stze-Nom (Torque) (mm) (inch) 30-13i16(16.5in-tbs) 50-2(80in-tbs) 63 _ 2 1/2 (150 in-tbs) 80 3 1/8 (270 in-lbs) tm-4(640in-tbs) Il*. @l lffi*",* With Auto Switch Capability t. qRAl?

ZSE5/ISE5

Note 2)Analog output has no overcu rre nt detection function. I The dual output applies to NPN, -O~P7:~iP~tio~n~-'-~p~a~m~No~.-.~~===rr-N"~e-_ ~~ =4It PNP, and analog output.

Air Pilot Operated Series NVSA

3.78 3_78 3.7E Nt/sA 4t 04 spoor 5lrof6: In. (mm) 0.1n {4.5) o.1n (4.5)0.30a 00) 0.391 (10) o.177 (.1.5) o197 (5) ot97 (5) 043.{ (11) ) 434 fir) 0.197 G) 0.360 (9.8) 0.3& p.E) u61610.646 116.4)106..) 0.388 pa) PSIG (Kgt/cm,) 1.To$.n spool!

Rotary Actuator NCRA1 Series Single Rack and Pinion

W tu"b" -30mm: 90" or 180" onv Special order onfy stze-Nom (Torque) (mm) (inch) 30-13i16(16.5in-tbs) 50-2(80in-tbs) 63 _ 2 1/2 (150 in-tbs) 80 3 1/8 (270 in-lbs) tm-4(640in-tbs) Il*. @l lffi*",* With Auto Switch Capability t. qRAl?

•

~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ . ~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".