CJ2X/CUX/CQSX/CQ2X/CM2X

Electrical entry Pre-wire connector Wiring (Output) Applicable load Rail mounting Band mounting 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC Perpendicular In-line 3-wire (NPN equivalent) 5 V IC circuit C76 A76H Reed switch Solid state switch Grommet 200 V 100 V 12 V 12 V C73 C73C H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7NF A72H A73H F79 F7P J79 F79W F7PW J79W F79F Lead wire length symbols: A72

CV/MVGQ

Lead wire length (m) Auto switch model Load voltage Indicator light Wiring (Output) Special function Type Electrical entry Pre-wire connector Rail mounting Band mounting Applicable load 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC Perpendicular In-line 3-wire (NPN equivalent) 5 V IC circuit C76 A76H Reed switch Solid state switch Grommet C73 C73C H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7NF A72 A73

MK

A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F P5DW 200 V A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV Grommet Yes 100 V 12 V Relay, PLC 2-wire 24 V Connector 12 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 2-wire 12 V Connector Relay, PLC Yes 24 V 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic output

1

Auto Switch Mounting Position Auto Switch Mounting Height D-A7H/J79W D-A80H/F7BAL D-F7/F7F D-F79/F7NTL D-F7W D-A72/A7H/A80H D-A73C/A80C D-F7/F7V/F7W D-F7WV/F7BAL D-J7 D-A73C D-A80C D-F7WV D-F7V D-J79C D-A7/A8 D-A79W D-A73 D-A80 D-A79W D-F7F D-F7NTL Bore size (mm) Bore size (mm) A B A B A B A B A B Hs Hs Hs Hs Hs Hs 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 40.5 39.5 40 39 37.5 36.5

CQM

IC circuit 5 V A76H A96V A96 Yes No A72 A73 A80 A72H A73H A80H 200 V Solid state switch Reed switch Grommet 100 V 12 V IC circuit A90V A93V A90 A93 5 V, 12 V 12 V 12 V Relay, PLC 2-wire No Yes 24 V A73C A80C A79W F7NV F7PV F7BV J79C F7NWV Connector IC circuit 5 V, 12 V Grommet Diagnostic indication (2-color indication) Yes 3-wire (NPN) 3-wire (PNP) F79 F7P J79 M9NV M9PV M9BV M9N M9P M9B 5

CXT

Lead wire length (m) Load voltage Rail mounting Direct mounting Indicator light Special function Type Electrical entry Wiring (Output) Pre-wire connector Applicable load 12 to 40 32, 40 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC In-line In-line Perpendicular Perpendicular 3-wire (NPN equivalent) IC circuit 5 V A76H A96V A96 A93V A93 A72H A73H A72 A73 A73C 200 V Grommet Reed switch Solid

CXWM/CXWL

Lead wire length (m) Load voltage Rail mounting Applicable cylinder size Indicator light Wiring (Output) Type Pre-wire connector Applicable load Electrical entry Housing mounting Plate mounting 0.5 (Nil) 3 (L) 5 (Z) None (N) Special function In-line Perpendicular AC DC 3-wire (NPN equivalent) IC circuit 10 16 20 25 32 A76H 5 V 16 20 25 32 Grommet Reed switch Solid state switch A72 A73

Refrigerated Thermo-chiller

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

MRQB-OM0002

4 A = (3) ) d D ( 4 A 2 2 2 = (4) F=[N] F=[N] = A=[mm] A=[mm] D=[mm] d=[mm] P=[MPa] 5.6 () 5.7 () 5.5 23 6. 6. 6. 6. ,, , ,, 6-1. 6.1 (m) DC AC 0.5 3 5 (L) (Z) (N) 3 (NPN) F7NV F79 3 (PNP) 5V,12V F7PV F7P IC F7BV J79 2 12V J79C 24V 3 (NPN) F7NWV F79W PLC 3 (PNP) 5V,12V F79W IC (2 ) F7BWV J79W (2 ) 2 12V F7BAV F7BA (2 ) 4 (NPN) 5V,12V F79F IC 3 (NPN ) 5V A76H IC 200V A72

Cylinder with Turntable Series MGT

D-A72(H) must be used with the contact protection box regardless of load types and lead wire length since it is greatly affected by loads.

MHT2

IC circuit A76H A96V A96 5 V Grommet A72 A73 A72H A73H 200 V Reed switch Solid state switch 100 V 12 V A93V A93 Relay, PLC 2-wire 24 V A73C 12 V Connector Diagnosis (2-color indication) Grommet A79W 3-wire (NPN) F79 M9NV M9N F7NV 5 V 12 V IC circuit Grommet 3-wire (PNP) F7P M9PV M9P F7PV J79 M9BV M9B F7BV J79C 12 V 2-wire Connector 3-wire (NPN) F79W F7NWV F9NWV F9NW Relay, PLC IC circuit

CE

A96V A96 A76H 5V IC circuit A93V A90V A93 A90 A72H A73H A80H A72 A73 A80 A73C A80C Reed switch Solid state switch 200V Grommet Yes 12V 100V Relay PLC 2 wire No Yes No 5V,12V 100V or less IC circuit 24V 24V or less 12V Connector 5V, 12V IC circuit Diagnostic indication (2 color indicator) A79W Yes Grommet F9NV F9PV F9BV F9NWV F9PWV F9BWV F9N F9P F9B F9NW F9PW F9BW

Series CE1

A76H 5V A96 A96V IC V V A72H A73H A72 A73 200V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V Grommet Yes Reed switch Solid state switch V 100V 12V A93 A90 A93V A90V Relay PLC 2 wire A80H A80 A73C A80C A79W F7NV IC No Yes No Yes 5V,12V 100V 24V 24V 12V V V V V Connector IC 5V,12V Diagnostic indication (2 color) Grommet F79 IC 5V,12V 3 wire (NPN) 3 wire

CJ2Q

In-line 3 wire (NPN) C76 A76H 5V IC Yes Reed switch Solid state switch A72 A73 A80 A73C A80C A79W F7NV F7PV F7BV J79C F7NWV A72H A73H A80H 200V Ex.

CLQ

CLQ-D025 CLQ-F025 CLQ-L025 A96V A96 A76H IC circuit 5V CLQ-D032 CLQ-F032 CLQ-L032 A72H A72 200V Yes Reed switch CLQ-D040 CLQ-F040 CLQ-L040 Grommet A73H A73 12V 100V CLQ-D050 CLQ-F050 CLQ-L050 A93V A93 Relay, PLC CLQ-D063 CLQ-F063 CLQ-L063 100V or less IC circuit 5V, 12V No A80 A90V A90 A80H 2 wire 24V CLQ-D080 CLQ-F080 CLQ-L080 12V Yes A73C Connector CLQ-D100 CLQ-F100 CLQ-L100 5V,

MHT2

IC circuit A76H A96V A96 5 V Grommet A72 A73 A72H A73H 200 V Reed switch Solid state switch 100 V 12 V A93 A93V Relay, PLC 2-wire 24 V A73C 12 V Connector Diagnosis (2-color indication) Grommet A79W 3-wire (NPN) F79 M9N M9NV F7NV 5 V 12 V IC circuit Grommet 3-wire (PNP) F7P M9P M9PV F7PV J79 M9B M9BV F7BV J79C 12 V 2-wire Connector 3-wire (NPN) F79W F9NW F9NWV F7NWV Relay, PLC IC circuit

MGG

R Y + Stroke View D-D' 63 to 100 Reinforcing bracket Mounted in case of 301mm or longer strokes Front mounting flange Width across flats HT B HS C D View C-C' HU D' C' A R Y + Stroke View D-D' Auto switch mounting position Auto switch mounting height (mm) (mm) D-A72, A7H, A80H D-A73C, A80C D-F7, F7V, F7W D-F7WV, F7BAL D-J7 D-A7H, J79W D-A80H, F7BAL D-F7, F7F D-J79, F7NTL D-F7W D-A7, A8 D-F7V

MHT2

IC circuit A76H A96V A96 5V Yes A72 A73 A72H A73H 200V MHQ Reed switch Grommet 100V 12V A93 A90 A93V A90V Relay, PLC MHL2 2-wire A80 A73C A80C A79W F7NV A80H IC circuit No 5V, 12V 100V or less 24V 12V Yes Connector IC circuit 5V, 12V No 24V or less MHR Diag. indicator (2 color) Grommet Yes F79 5V, 12V 3-wire (NPN) F9N F9NV 12V MHK IC circuit 5V, 12V F7PV F7P 3-wire (PNP) Grommet F9P

MRQ

Indication Electrical entry Wiring (Output) Type Special ability Applicable loading Direction of electrical entry 3 (L) 5 (Z) (N) 0.5 () DC AC In-line Perpendicular 4 to 8V 3 wire A76H IC Yes A72 A73 A80 A73C A80C A79W F7NV F7PV F7BV J79C A72H 200V Relay, PLC Relay, PLC Grommet Reed switch Solid state switch A80H A73H 24V 100V or less 100V or less 100V Relay, PLC, IC Relay, PLC, IC

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

(NPN) 3-wire (PNP) 5V, 12V Grommet 2-wire 12V Connector 10 3-wire (NPN) 3-wire (PNP) 15 24V IC circuit Yes Yes Yes Yes No No No Diagnostic indication (2-color indication) 5V, 12V 15 Relay, PLC 25 25 Grommet 12V Water resistant (2-color indication) 2-wire F7BA F7BAV With diagnostic output (2-color indication) IC circuit F79F 4-wire (NPN) 5V, 12V A76H A72H A73H A80H E76A E73A E80A A72