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11.5 8.7 4.1 5.9 50 Hz 13.0 10.2 4.5 6.4 60 Hz Inlet air pressure 0.7 (MPa) Inlet air temperature 55 (C) Ambient temperature 32 (C) 10 Outlet air pressure dew point (C) Power supply voltage (frequency) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Power consumption (W) 50/60 Hz Operating current (A) 50/60 Hz Applicable circuit breaker capacity Note 4) 1530/2000 2200/2850 1100

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

When using signal of the servo on (SON) by the I/O signal (CN6) . 0100 4 in HEX 0 0 in HEX 1100 C in HEX 0 0 in HEX When using signal of the Automatic/manual selection (MD0) by the I/O signal (CN6) 0001 1 in HEX 0 0 in HEX 1000 8 in HEX -44- * Enabling Servo-on (SON) and Automatic/manual selection (MD0) Signals Set PD12 to 0C04 and PD14 to 0801 in the I/O setting tab.

When using signal of the servo on (SON) by the I/O signal (CN6) . 0100 4 in HEX 0 0 in HEX 1100 C in HEX 0 0 in HEX When using signal of the Automatic/manual selection (MD0) by the I/O signal (CN6) 0001 1 in HEX 0 0 in HEX 1000 8 in HEX -49- * Enabling Servo-on (SON) and Automatic/manual selection (MD0) Signals Set PD12 to 0C04 and PD14 to 0801 in the I/O setting tab.

Modbus RTU protocol (Hexadecimal notation) Request data 01 08 0 1234 ED7C Response data (normal response) 01 08 0 1234 ED7C (Binary notation) Response data 0001 1000 0 0 0001 0010 0011 0100 1110 1101 0111 1100 Response data (normal response) 0001 1000 0 0 0001 0010 0011 0100 1110 1101 0111 1100 For correspondence between ASCII notation and ASCII hexadecimal notation, refer to the 8.4 ASCII

AC30C Air filter AF40 AF40-06 AF30 AF20 AF30 Mist separator AFM40 AFM40-06 AFM30 AFM20 AFM30 Component Regulator AR40 1/4 3/8 1/2 1/4 AR40-06 AR25 AR20 AR30 1/4 1/8 1/4 3/4 Port sizes 3/8 1/4 3/8 Note 1) 1/4 1/8 1/8 1/8 Air Pressure gauge port size Fluid Proof pressure Maximum operating pressure 1.5MPa 1.0MPa 0.05MPa Minimum operating pressure Set pressure range 0.05 to 0.85MPa Note 2) 1100

200 450 1100 0.3m (95% filtered particle size) Maximum 1.0mg/m3 (ANR) (approx. 0.8ppm) Note 2) Nominal filtration rating Outlet side oil mist concentration Bowl material Bowl guard Drain capacity (cm3) Weight (kg) AFM30 Polycarbonate option 8 0.18 Standard 45 0.44 45 0.49 25 0.22 Note 1) When the inlet pressure is 0.7MPa.

Theoretical Cylinder Thrust Symbol Specifications 1200 -XB11 -XB13 -X116 -X132 -X160 -X168 -X206 -X210 -X322 -X324 -XC57 Long stroke (2001mm and up) Low speed specifications (7 to 50mm/s) 1100 Hydro specifications 40 40 Axial ports 1000 High speed specifications Helical insert thread specifications 900 Added mounting tap positions for slider Oil-free exterior specifications Theoretical thrust

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solen1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

RSH20, 32 Graphq Graphw 1.0 RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] 0.8 1300 1300 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 600 600 0 500 100 200 300 400 63 Lateral load F [N] 500 500 50 400 400 RS1H50, 63,

Model Ambient temperature Applicable cylinder thread nominal size Allowable eccentricity U (mm) Applicable cylinder bore size (mm) Note 1) Maximum tension and compression N Air cylinder Hydraulic cylinder JS10-4-070 JS16-5-080 JS20-8-125 JS32-10-125 JS40-14-150 JS63-18-150 M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 0.5 0.5 0.5 0.5 0.75 1 10 10, 16 20 25, 32 40 50, 63 80 210 1100

Mass (g) Size Standard mass 90 180 10 120 150 15 220 270 20 600 700 30 900 1100 40 1400 1600 Not including the mass of auto switch. D319 Series CRQ2X Rotation Range When pressurized from the port indicated by the arrow, the shaft will rotate in a clockwise direction.

CXT12 CXT16 CXT20 CXT25 CXT32 CXT40 0.015 0.019 0.044 0.180 0.123 0.109 3 7 12 20 30 50 60 70 125 125 140 170 0.002 0.004 0.007 0.030 0.032 0.025 350 500 900 900 1100 1900 For moving and transferring workpieces. For moving the receptacle for workpieces used in stamping or press-fitting processes. For using as a Pick & Place unit in combination with other actuators.

Compressor intake Rated conditions *4 60 Hz 4.6 6.5 10.4 13.3 Inlet air pressure [MPa] 0.7 Refrigerant R407C (HFC) IDF E Inlet air temperature [C] 55 Ambient temperature [C] 32 Outlet air pressure dew point [C] 10 Single-phase: 230 VAC 10% (50 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Power supply voltage (Frequency) Power consumption [W] 50/60 Hz *5 Three-phase 200 V 1100

Actuator cable: 20 m or less Cooling system Natural air cooling Operating temperature range 0C to 40C (No freezing) Operating humidity range 90% RH or less (No condensation) Storage temperature range 10C to 60C (No freezing) Storage humidity range 90% RH or less (No condensation) Insulation resistance Between all external terminals and the case: 50 MW (500 VDC) Weight 1050 g (Screw mounting), 1100

Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 Up to 1300 Up to 1400 Up to 1500 H 24 1800 1580 1170 910 720 580 480 410 A 16 1200 1050 780 600 480 390 320 270 LEJS40 100 W/ m40 B 8 600 520 390 300 240 190 160 130 (Motor rotation speed) (4500 rpm

Caution Theoretical Cylinder Thrust 6, 10 15, 20, 25, 32, 40 50, 63 CY3B CY3R CY3B CY3R CY1S 63 63 1200 40 40 1100 3000 100 90 80 70 60 50 40 30 20 10 Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) H CY1L Bore size 10 Bore size 2500 1000 900 800 700 10 50 50 H 32 32 2000 CY1H 1500 600 25 25 500 400 300 200 100 CY1F 1000

1960 1650 3120 2800 5030 4540 7850 7150 12300 11300 15400 14400 20100 18800 25400 23900 31400 29500 49100 46300 70700 66800 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 314 264 491 412 804 691 1260 1100 1960 1650 3120 2800 5030 4540 7850 7150 12300 11300 15400 14400 20100 18800 25400 23900 31400 29500 49100 46300 70700 66800 8 20

Up to 900 RB 100 25 to 750 25 to 600 Up to 1100 Up to 850 BD1-04M BD1-05M BD1-08M BD1-10M BD1-06M (kg) Weight J 40 50 63 80 100 Bore size (mm) DBasic style 2.18 3.39 5.29 8.66 12.09 BA-04 BA-05 BA-08 BA-10 BA-06 Foot style 2.37 3.61 5.63 9.33 13.08 -X Flange style 2.55 3.84 6.08 10.11 14.01 Basic weight D-A3C/A44C D-G39C/K39C Single clevis style 2.41 3.73 5.92 9.77 13.87 BA3-040 BA3-050

Bore size (mm) Standard stroke (mm) Range of manufacturable stroke* Without rod boot With rod boot Without rod boot With rod boot 40 25 to 850 25 to 700 Up to 1200 Up to 950 50 25 to 800 25 to 650 Up to 1150 Up to 900 63 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 100 25 to 750 25 to 600 Up to 1100 Up to 850 Refer to pages 692 to 697 for cylinders