Magnet: Built-in, Mounting: Foot, Tube Material: Aluminum Tube ø125~ø160, Steel Tube ø180~ø300, Bore Size: 140mm, Port Thread: NPT, Stroke: 1300mm, Option: w/o Rod Boot, Cushion: Both Sides, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Basic, Cushion: Air Cushion, Bore Size: 2 1/2", Stroke: 13", Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Guideless] Prototype, Table Size Width W(mm): 112, Table Size Height H(mm): 67, Table Surface Treatment: Electroless Nickel Plating, Environment: General Purpose, Maximum Load(kg): 56, Types: Standard type, Port Screw Type: Rc, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: M9P

Digital Flow Switch ( compatible)

to 6000 7 R/W dtL1 (Delay time at OFF) S16 0 Y Setting of OUT1 delay time at OFF 10 ms increment -83No.PF-OMZ0002-A Product individual parameters (continued) Data Data Index Sub Access Initial value type storage 1 Parameter Set value 4 Remarks index dec hex 2 3 AC1_L (Mantissa L) U16 0 Y Setting range 0 to 9 Setting of OUT1 mantissa Unit: when L is selected OUT1 accumulated flow 1 R/W 1300

Digital Flow Switch ( compatible)

range 0 to 6000 7 R/W dtL1 (Delay time at OFF) S16 0 Y Setting of OUT1 delay time at OFF 10 ms increment -79No.PF-OMY0002 Product individual parameters (continued) Data Data Index Sub Access Initial value type storage 1 Parameter Set value Remarks index dec hex 2 3 AC1_L (Mantissa L) U16 0 Y Setting range 0 to 9 Setting of OUT1 mantissa Unit: when L is selected OUT1 accumulated flow 1 R/W 1300

PFxx-OMX0002

Window comparator hysteresis) Setting of OUT2 hysteresis (Window comparator) 5 R/W U16 400 Y Settable values 0x0 to 0x1770 (0 to 6000) 6 R/W dt2 (Delay time) U16 0 Y Setting of OUT2 delay time 10 ms increment Setting of OUT1 set value Unit specification (Unit): When "L" is selected Setting range 0x0 to 0x270F (0 to 9) AC1_L (OUT1 set value (L)) S16 0 Y OUT1 accumulated flow setting 1 R/W 1300

PFxx-OMX0007

Window comparator hysteresis) Setting of OUT2 hysteresis (Window comparator) 5 R/W U16 400 Y Settable values 0x0 to 0x1770 (0 to 6000) 6 R/W dt2 (Delay time) U16 0 Y Setting of OUT2 delay time 10 ms increment Setting of OUT1 set value Unit specification (Unit): When "L" is selected Setting range 0x0 to 0x270F (0 to 9) AC1_L (OUT1 set value (L)) S16 0 Y OUT1 accumulated flow setting 1 R/W 1300

PFxx-OMY0005

83No.PF-OMY0005-A Product individual parameters (continued) Data Data Index Sub Access Initial value Set value 4 Remarks type storage 1 Parameter index 2 3 dec hex AC_1ot (Selection of output type) U8 0 Y 0: 1_P (Normal output) 1: 1_n (Reverse output) 1290 0x050A 0 R/W OUT1 setting (AC) P1(n1)_L (Selection of output set value) U32 0 Y 0 to 999,999,999 Common for all ranges, units, and criterion 1300

4-channel Flow Monitor ( compatible)

) Setting of OUT1 delay time at ON. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment dtH1 (OUT1 delay time at ON) Y U16 0x0 6 R/W (0) dtL1 (OUT1 delay time at OFF) Setting of OUT1 delay time at OFF. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment Y U16 0x0 7 R/W (0) OUT1 Accumulated threshold value setting (L) Consider the accumulated inclination when reading or writing the accumulated value. 0x0514 (1300

Digital Flow Switch (Integrated display type) ( compatible)

(Page 84) SAVE (Accumulated flow value hold setting) 0: oFF (Not held) 1: 2.0 min 2: 5.0 min 1300 0x0514 0 R/W U8 0 Y 1800 0x0708 0 R/W diSP (Display OFF setting) U8 0 Y 0: on 1: oFF Pin (Security code Used/Not used) Security code U8 0 Y 0 :unused 1: use 1810 0x0712 0 R/W PinCode (Security code setting) Setting range 0x0 to 0x03E7 (0 to 999) 1811 0x0713 0 R/W U16 0 Y Line name 1st letter

Digital Flow Switch (Integrated display type) ( compatible)

(Page 86) SAVE (Accumulated flow value hold setting) 0: oFF (Not held) 1: 2.0 min 2: 5.0 min 1300 0x0514 0 R/W U8 0 Y 1800 0x0708 0 R/W dSP (Display OFF setting) U8 0 Y 0: on 1: oFF Pin (Security code Used/Not used) Security code U8 0 Y 0 :unused 1: use 1810 0x0712 0 R/W PinCode (Security code setting) Setting range 0x0 to 0x03E7 (0 to 999) 1811 0x0713 0 R/W U16 0 Y Line name 1st letter U8

IBV-OMY0015

Length (mm) Peak pressure (compared with existing product) 8 2000 2 times 10 1300 2.5 times 13 800 3 times In SMC test conditions. Refer to page 5 for the relation between the upstream piping and peak pressure. Oscillation may occur when supply air is insufficient. Upstream piping I.D. Must be larger than 8. Be careful that pressure drop does not occur. 2 4.

IDX-OM-W016

Pressure 0.15MPa Range MAX.Inlet Air Pressure 1.0MPa Ambient Temperature 2 ~ 40oC(Relative Humidity of 85% or less) Power source 1 AC230V10% 50Hz (Note 4) Specification Operating current(Note 2) 1.2A 1.2A 1.2A 1.4A 2.7A 2.9A Electrical Power consumption(Note 2) 180W 180W 180W 208W 385W 420W Circuit Breaker (Note 3) 5A 10A Noize at 50Hz 50dB Condenser Air cooling Refrigerant R134aHFC(WGP:1300

LEJ-OM002xx

85 Vertical 3 5 10 6 10 20 Up to 500 1800 1200 600 1800 1200 600 501 to 600 1580 1050 520 1800 1200 600 601 to 700 1170 780 390 1800 1200 600 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110 740 370 Speed [mm/s] Note3) Stroke range 901 to 1000 580 390 190 900 600 300 Actuator specification 1001 to 1100 480 320 160 750 500 250 1101 to 1200 410 270 130 630 420 210 1201 to 1300

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

C95

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics lnc. (Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N.

CJ1

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics lnc. (Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N.

CJ2

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics lnc. (Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N.

CL

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics lnc. (Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N.

CM2

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321-1300 FAX: (716) 321-1865 SMC Pneumatics lnc. (Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N.